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Microsystem Technologies

Issue 6/2012

Content (18 Articles)

Technical Paper

Batch welding of aligned carbon nanotube onto metal electrodes

Mingxiang Chen, Xiaohui Song, Sheng Liu, Zhiyin Gan, Qiang Lv

Technical Paper

Characterization of the thermodynamic cycle of a MEMS-based external combustion resonant engine

H. Bardaweel, R. Richards, C. Richards, M. Anderson

Technical Paper

Rapid polymer microchannel fabrication by hot roller embossing process

Chia-Wen Tsao, Tzug-Yi Chen, Wei Yen Woon, Chien-Jung Lo

Technical Paper

A highly reliable integrated PDMS interconnector with a long cast flange for microfluidic systems

Hong-long Chang, Feng Zhang, Ji-liang Ding, Fang-lu Chen, Shui-jin Hong, Michael Kraft, Wei-zheng Yuan

Technical Paper

Development and characterization of a capillary-flow microfluidic device for nucleic acid detection

Shengquan Jin, Minhui Dai, Fei He, Yuhong Wang, Bang-Ce Ye, Sam R. Nugen

Technical Paper

Design, fabrication and testing of sandwich coupled inductors

J. Yunas, B. Yeop Majlis, A. A. Hamzah, B. Bais

Technical Paper

Simulation and experimental investigation of a wide band PZ MEMS harvester at low frequencies

Mohammed Dhia Salim, Hanim Salleh, Dhia Shaker Mohammed Salim

Technical Paper

Metal-based piezoelectric microelectromechanical systems scanner composed of Pb(Zr, Ti)O3 thin film on titanium substrate

Shuhei Matsushita, Isaku Kanno, Kazuhiko Adachi, Ryuji Yokokawa, Hidetoshi Kotera

Technical Paper

Analytical study on effect of ring geometry on frequency shift of piezoelectric ring-shaped resonator

Dong F. Wang, Takahisa Sagawa, Jian Lu, Ryutaro Maeda

Technical Paper

Sputtered thin film piezoelectric aluminum nitride as a functional MEMS material

S. Marauska, V. Hrkac, T. Dankwort, R. Jahns, H. J. Quenzer, R. Knöchel, L. Kienle, B. Wagner

Technical Paper

Frequency response of in-plane coupled resonators for investigating the acceleration sensitivity of MEMS tuning fork gyroscopes

Thakur Praveen Singh, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata

Technical Paper

Non-uniform residual stress assembly for free-space optical systems

R. W. Johnstone, D. Sameoto, M. Parameswaran