Issue 7-8/2012
Special issue of the conference 'Smart Sensors, Actuators and MEMS' within the SPIE EUROPE Symposium 'MICROTECHNOLOGIES' Prague, Czech Republic, 18-20 April 2011
Content (43 Articles)
Special issue of the conference ‘Smart Sensors, Actuators and MEMS’, within the SPIE EUROPE Symposium ‘MICROTECHNOLOGIES’ Prague, Czech Republic, 18–20 April 2011
Ulrich Schmid, Thomas Becker, Bernd Michel
Cleaning of structured templates from nanoparticle accumulation using silicone
S. Merzsch, H. S. Wasisto, A. Waag, I. Kirsch, E. Uhde, T. Salthammer, E. Peiner
Low-cost fiber-optic waveguide sensor for the colorimetric detection of ammonia
Katrin Schmitt, Jonas Rist, Carolin Peter, Jürgen Wöllenstein
Thermopile-based THz antenna
Béla Szentpáli, Gábor Matyi, Péter Fürjes, Endre László, Gábor Battistig, István Bársony, Gergely Károlyi, Tibor Berceli
Nanowire silicon as a material for thermoelectric energy conversion
A. Stranz, J. Kähler, S. Merzsch, A. Waag, E. Peiner
Platinated ultrathin films made of carbon nanotubes
Timo Bohnenberger, Frank Steinhäußer, Jovan Matovic, Ulrich Schmid
Fabrication, packaging, and characterization of p-SOI Wheatstone bridges for harsh environments
J. Kähler, A. Stranz, L. Doering, S. Merzsch, N. Heuck, A. Waag, E. Peiner
Long-term stability of Ag and Cu thin films on glass, LTCC and alumina substrates
A. Bittner, N. Pagel, H. Seidel, U. Schmid
Microfabricated self-resonant structure as a passive wireless dielectric constant and conductivity sensor
Sheng Zhang, Praveenkumar Pasupathy, Dean P. Neikirk
Design and evaluation process of a robust pressure sensor for measurements in boundary layers of liquid fluids
T. Beutel, M. Leester-Schädel, S. Büttgenbach
Determination of exposure to engineered carbon nanoparticles using a self-sensing piezoresistive silicon cantilever sensor
H. S. Wasisto, S. Merzsch, A. Waag, I. Kirsch, E. Uhde, T. Salthammer, E. Peiner
Selective modal excitation in coupled piezoelectric microcantilevers
M. Gil, T. Manzaneque, J. Hernando-García, A. Ababneh, H. Seidel, J. L. Sánchez-Rojas
Metallo-porphyrin zinc as gas sensitive material for colorimetric gas sensors on planar optical waveguides
Carolin Peter, Katrin Schmitt, Martin Apitz, Juergen Woellenstein
Micro harvester using isotropic charging of electrets deposited on vertical sidewalls for conversion of 3D vibrational energy
Ulrich Mescheder, Antwi Nimo, Bernhard Müller, Awad Saad Abou Elkeir
Measurement of Young’s modulus and residual stress of thin SiC layers for MEMS high temperature applications
Oliver Pabst, Michael Schiffer, Ernst Obermeier, Tolga Tekin, Klaus Dieter Lang, Ha-Duong Ngo
Hardware implementation of an electrostatic MEMS-actuator linearization
F. Mair, M. Egretzberger, A. Kugi
Gold-based thin multilayers for ohmic contacts in RF-MEMS switches
V. Mulloni, J. Iannacci, R. Bartali, V. Micheli, S. Colpo, N. Laidani, B. Margesin
Measurement technique for the thermal properties of thin-film diaphragms embedded in calorimetric flow sensors
Roman Beigelbeck, Samir Cerimovic, Almir Talic, Franz Kohl, Franz Keplinger
Role of the electro-thermo-mechanical multiple coupling on the operation of RF-microswitch
Eugenio Brusa, Mircea Gheorghe Munteanu
Modelling and characterization of AlN-actuated microcantilevers vibrating in the first in-plane mode
V. Ruiz, J. Hernando-García, A. Ababneh, H. Seidel, U. Schmid, J. L. Sánchez-Rojas
Artificial intelligence based optimization for vibration energy harvesting applications
Zdenek Hadas, Jiri Kurfurst, Cestmir Ondrusek, Vladislav Singule
New method for selectivity enhancement of SiC field effect gas sensors for quantification of NO x
Christian Bur, Peter Reimann, Mike Andersson, Anita Lloyd Spetz, Andreas Schütze
Studies on SiC, DLC and TiO2 thin films as piezoresistive sensor materials for high temperature application
M. A. Fraga, H. Furlan, R. S. Pessoa, L. A. Rasia, C. F. R. Mateus
Modeling the performance of a micromachined piezoelectric energy harvester
Ali B. Alamin Dow, M. Schneider, David Koo, Hasan A. Al-Rubaye, A. Bittner, U. Schmid, Nazir Kherani
Sensing viscosity and density of glycerol–water mixtures utilizing a suspended plate MEMS resonator
Samir Cerimovic, Roman Beigelbeck, Hannes Antlinger, Johannes Schalko, Bernhard Jakoby, Franz Keplinger
Through wafer via holes manufacturing by variable isotropy Deep RIE process for RF applications
D. Vasilache, S. Colpo, F. Giacomozzi, S. Ronchin, S. Gennaro, A. Q. A. Qureshi, B. Margesin
CMOS: compatible wafer bonding for MEMS and wafer-level 3D integration
Viorel Dragoi, Eric Pabo, Jürgen Burggraf, Gerald Mittendorfer
MEMS-based microthruster with integrated platinum thin film resistance temperature detector (RTD), heater meander and thermal insulation for operation up to 1,000°C
Natsuki Miyakawa, Wolfgang Legner, Thomas Ziemann, Dimitri Telitschkin, Hans-Jörg Fecht, Alois Friedberger
Resonantly excited AlN-based microcantilevers for immunosensing
M. J. Oliver, J. Hernando-García, A. Ababneh, H. Seidel, U. Schmid, J. P. Andrés, P. Pobedinskas, K. Haenen, J. L. Sánchez-Rojas
Novel 3D manufacturing method combining microelectrial discharge machining and electrochemical polishing
Claudia Richter, Thomas Krah, Stephanus Büttgenbach
Cantilever probes for high speed AFM
C. Richter, P. Weinzierl, W. Engl, C. Penzkofer, B. Irmer, T. Sulzbach
Hysteresis correction of tactile sensor response with a generalized Prandtl–Ishlinskii model
José A. Sánchez-Durán, Óscar Oballe-Peinado, Julián Castellanos-Ramos, Fernando Vidal-Verdú
Modeling of gold microbeams as strain and pressure sensors for characterizing MEMS packages
A. Faes, G. Resta, F. Solazzi, B. Margesin
A MEMS-based thermal infrared emitter for an integrated NDIR spectrometer
C. Calaza, M. Salleras, N. Sabaté, J. Santander, C. Cané, L. Fonseca
Flexible and large area pressure sensors for human-neuroprostheses and human-neurorobotic interface assessment
J. Herrán, I. Fernández, E. Ochoteco, G. Cabañero, H. Grande, J. C. Moreno, E. Rocón, J. L. Pons
Integration of impedance spectroscopy sensors in a digital microfluidic platform
Thomas Lederer, Stefan Clara, Bernhard Jakoby, Wolfgang Hilber
Smart ultrasonic sensors systems: potential of aluminum nitride thin films for the excitation of the ultrasound at high frequencies
Susan Walter, Thomas Herzog, Henning Heuer, Hagen Bartzsch, Daniel Gloess
Battery-and wire-less tire pressure measurement systems (TPMS) sensor
Noaman Makki, Remon Pop-Iliev
Thin-film electro-acoustic sensors based on AlN and its alloys: possibilities and limitations
Gunilla Wingqvist
Binary Zero-Power Sensors: an alternative solution for power-free energy-autonomous sensor systems
Thomas Frank, Gerald Gerlach, Arndt Steinke