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Microsystem Technologies

Issue 6/2017

Part II of the Special Issue on 3rd International Conference on Engineering and Technology Innovation (ICETI 2014), held in Kenting, Taiwan Oct 31–Nov 2, 2014

Content (70 Articles)

Technical Paper

High resolution topography utilizing a line scan stereo vision technique

Po-Cheng Chen, Ming Chang, Jacque Lynn Gabayno, Xiangning Wang, Xiaojun Liu

Technical Paper

Fabrication of microfluidic structures in quartz via micro machining technologies

Ying-Chieh Lin, Chung-Ching Lee, Heng-Sheng Lin, Zheng-Han Hong, Fu-Chuan Hsu, Tsung-Pin Hung, Yu-Ting Lyu

Technical Paper

Ultrasonic assisted thermoforming for rapid fabrication of a microspeaker diaphragm

Ho-Jin Bae, Hyun-Joong Lee, Keun Park

Technical Paper

Experiment study of laser thermal enhanced electrochemical deposition

Zhaoyang Zhang, Yujia Jiang, Lei Huang, Xin Nie, Gao Liu

Technical Paper

Fabrication of ultra-high-sensitivity flexible strain sensor based on single ZnO nanowire

Hao Zhao, Xiaojun Liu, Liangzhou Chen, Suping Chang, Ming Chang

Technical Paper

Characteristic studies of a novel piezoelectric impedance micropump

Chiang-Ho Cheng, An-Shik Yang, Chih-Jer Lin, Wei-Jui Huang

Technical Paper

A model for the metal deposition process

Bo Wun Huang, Wen-Ye Huang, Nan-Wem Lin

Technical Paper

A single asperity sliding contact model for molecularly thin lubricant

Youfeng Zhang, Andreas A. Polycarpou

Technical Paper

Generalized fractional magneto-thermo-viscoelasticity

Magdy A. Ezzat, Alaa A. El-Bary

Technical Paper

MEMS based vacuum packaging method of optically readable infrared focal plane array

Fei Feng, Yunsheng Zhang, Fan Luo, Xudong Wei, Xiaohong Ge, Yuelin Wang, Xinxin Li

Technical Paper

Silicon tip sharpening based on thermal oxidation technology

Huan He, Jinying Zhang, Jinling Yang, Fuhua Yang

Technical Paper

Free transverse vibration analysis of size dependent Timoshenko FG cracked nanobeams resting on elastic medium

Mahdi Soltanpour, Majid Ghadiri, Ali Yazdi, Mohsen Safi

Technical Paper

High precision tracking of a piezoelectric positioner using a discrete-time sliding mode control

Geng Wang, Yanru Zhao, Yeming Zhang, Chunchao Chen

Technical Paper

Distilling determination of water content in hydraulic oil with a ZnO/glass surface acoustic wave device

Zebing Mao, Jiuxuan Zhao, Weipeng Xuan, Wenbo Wang, Jikui Luo, Jin Xie

Technical Paper

A flexible three-axial capacitive tactile sensor with multilayered dielectric for artificial skin applications

Ying Huang, Haitao Yuan, Wenqing Kan, Xiaohui Guo, Caixia Liu, Ping Liu

Technical Paper

A small size Ka band six-bit DMTL phase shifter using new design of MEMS switch

Saied Afrang, Keyvan Samandari, Ghader Rezazadeh

Technical Paper

Stress reduction method in fabrication of a multi-scale inertial switch with ultra-high aspect ratio

Liqun Du, Shengli Chen, Yousheng Tao, Lei Luo, Ming Zhao, Tong Yang, Shuangjie Liu, Yongping Hao

Technical Paper

The fabrication and rapid replication of WR-10 filter with NOA73 materials

Xueli Nan, Binzhen Zhang, Xin Yang, Jianli Cui, Shaolei Ge

Technical Paper

Gas-assisted microstructure elastic multiform UV imprint replication molding technology

Cheng-Chang Lien, Yung-Jin Weng, Chun-Yu Tsai, Shih-Hsuan Wu

Technical Paper

Nonlinear dynamics of MEMS/NEMS resonators: analytical solution by the homotopy analysis method

Farid Tajaddodianfar, Mohammad Reza Hairi Yazdi, Hossein Nejat Pishkenari

Technical Paper

A thermal-calorimetric gas flow meter with improved isolating feature

Yousef Valizadeh Yaghmourali, Nima Ahmadi, Ebrahim Abbaspour-sani

Technical Paper

PMMA microfluidic chip fabrication using laser ablation and low temperature bonding with OCA film and LOCA

Kan Liu, Jianzhen Xiang, Zhao Ai, Shoukun Zhang, Yi Fang, Ting Chen, Qiongwei Zhou, Songzhan Li, Shengxiang Wang, Nangang Zhang

Technical Paper

Design of compact multiband pattern diversity antenna for WiMax, LTE and WLAN applications

Ramkrishnan B Kasyap, Gourang Namdeo Mulay

Technical Paper

Experimental and numerical investigation of flexibility of ITO electrode for application in flexible electronic devices

Hoon Sun Jung, Kyoungtae Eun, Yong Taek Kim, Eun Kyung Lee, Sung-Hoon Choa

Technical Paper

Fluid mixing in a swirl-inducing microchannel with square and T-shaped cross-sections

S.-W. Huang, C.-Y. Wu, B.-H. Lai, Y.-C. Chien

Technical Paper

Silicon-on-quartz bonding based SPR chip

Yeonsu Lee, Sung-min Sim, Eduardo Fontana, Ignacio Llamas-Garro, Gustavo Oliveira Cavalcanti, Jung-Mu Kim

Technical Paper

Comparison analysis of energy loss between micro clamped–clamped and clamped-free beam in vertical motion flux modulation magnetic sensor

Wenyin Li, Mengchun Pan, Xuezhong Wu, Dingbang Xiao, Wugang Tian, Jiafei Hu, Zhanqiang Hou, Jianqiang Zhao, Jinghua Hu

Technical Paper

Design and characteristic evaluation of a novel amphibious spherical robot

Jian Guo, Shuxiang Guo, Liguo Li

Technical Paper

Resonance frequency tracking and measuring system for micro-electromechanical cantilever array sensors

Ju Liao, Jingjing Wang, Nannan Li, Yinfang Zhu, Jinying Zhang, Jinling Yang, Fuhua Yang

Technical Paper

Electromagnetically actuated biaxial scanning micromirror fabricated with silicon on glass wafer

Jun-Ho Kim, Haesoo Jeong, Seung-Ki Lee, Chang-Hyeon Ji, Jae-Hyoung Park

Technical Paper

Replication of large scale micro pillar array with different diameters by micro injection molding

Mancang Song, Hui Zhao, Junshan Liu, Chong Liu, Jingmin Li

Technical Paper

New simulation approach for tuneable trapezoidal and rectangular piezoelectric bimorph energy harvesters

Mohammed Salim, Hanim Salleh, Eric Wooi Kee LOH, Mhd Khir, Dhia Salim

Technical Paper

Back-end-of-line compatible Poly-SiGe lateral nanoelectromechanical relays with multi-level interconnect

Kimberly L. Harrison, William A. Clary, J. Provine, Roger T. Howe

Technical Paper

A measurement free pre-etched pattern to identify the <110> directions on Si{110} wafer

S. S. Singh, V. N. Avvaru, S. Veerla, A. K. Pandey, P. Pal

Technical Paper

Ultrasonically manufactured microfluidic device for yeast analysis

Tim Runge, Johannes Sackmann, Werner Karl Schomburg, Lars Mathias Blank

Technical Paper

Effect of fused silica surface wettability on thermal reflow of polymer microlens arrays

D. Jucius, V. Grigaliūnas, A. Lazauskas, E. Sapeliauskas, B. Abakevičienė, S. Smetona, S. Tamulevičius

Technical Paper

Investigation of the anti-adhesion layers for nanoimprint molding

C. T. Pan, T. L. Yang, C. Y. Su, C. H. Chao, Z. K. Wang, S. C. Shen

Technical Paper

Modal and fatigue analysis of critical components of an amphibious spherical robot

Shuxiang Guo, Yanlin He, Liwei Shi, Shaowu Pan, Kun Tang, Rui Xiao, Ping Guo

Technical Paper

Plastic deformation of membrane with mesa silicon microstructure

Wanli Jiang, Dehui Xu, Bin Xiong, Yuelin Wang

Technical Paper

Continuous ultra-thin carbon nitride thin film for magnetic hard disk via post nitrogen plasma treatment

Wah Lawrence Ng, Amalina Balqis binti Abu Bakar, Mohammad Azrul Firdhaus bin Azmi, Khoo Wee Shen, Yonggang Meng

Technical Paper

Probe system design for three dimensional micro/nano scratching machine

Zhiyong Guo, Yanling Tian, Jia Tian, Xianping Liu, Fujun Wang, Hongjie Zhang, Dawei Zhang

Technical Paper

Feature coefficient prediction of micro-channel based on artificial neural network

Liu Huang, Weirong Nie, Xiaofeng Wang, Teng Shen