Prefabrication design, theoretical framework and simulation demonstration of a meander-shaped MEMS piezoresistive pressure sensor implanted on silicon substrate circular diaphragm for enhancement of key performance parameters utilized for low-pressure applications

Pressure sensors have shown an astounding change in revenue generation during the past few years. The rapid expansion of smart micro-system technology for automation systems has significantly increased the demand for sensors. One of the main reasons pressure sensors are flourishing in the market is their high sensitivity, versatility, miniaturization and mass production. In this proposed work, a MEMS meander-shaped piezoresistive pressure sensor for low-pressure applications is presented. It is mounted on a rigidly clamped circular diaphragm. COMSOL Multiphysics software was employed to develop the model and simulate it at a pressure range of 0–1 MPa. High sensitivity and low nonlinearity in the proposed model are analysed. Analytical models and numerical simulations are used to validate the performance advantage of this design. To get reliable simulation results, FEA (finite element analysis) was used with the COMSOL Multiphysics software. The results are then compared to previous research studies. Over an operating range of 0–1 MPa, the proposed design produces a sensitivity of 164.6 mV/V/MPa. As a result, the proposed architecture has a wide range of application possibilities.