Skip to main content
Top
Published in: Journal of Materials Science: Materials in Electronics 23/2020

27-10-2020

Structural, optical, and electrical properties of spray-pyrolyzed MoO3 thin films by varying precursor molarity, as hole-selective contact for silicon-based heterojunction devices

Authors: Bashir Yusuf, Mohd Mahadi Halim, Md Roslan Hashim, Mohd Zamir Pakhuruddin

Published in: Journal of Materials Science: Materials in Electronics | Issue 23/2020

Log in

Activate our intelligent search to find suitable subject content or patents.

search-config
loading …

Abstract

Sub-stoichiometric molybdenum oxide (MoO3) films are recurrently deposited on crystalline silicon (c-Si)-based devices by thermal evaporation. This technique necessitates high temperature, which offers limited control of oxide stoichiometry and therefore affects the control of hole-transport mechanism. In this work, the effect of precursor molarity on the properties of deposited MoO3 films by spray pyrolysis at a substrate temperature of 300 °C was investigated. The molarity was varied in a range of 0.05 M to 0.2 M with 0.05 M increment. The films were characterized by analyzing their structural, morphological/composition, and electrical properties. X-ray diffraction findings revealed the growth of orthorhombic lamellar crystal structure with (0k0) preferred orientation. Field emission scanning electron microscopes images displayed nanobelts-like structure with improved grain size as the molarity increases. The typical diode parameters, such as ideality factor (n) and barrier height (ϕB), are determined. At the same time, the quantitative analysis of the carrier transport mechanism of MoO3/n-Si heterojunction was conducted by I–V characteristics curve. The decrease in barrier heights and the subsequent increase in the ideality factor were observed by increasing precursor molarity. Similarly, when the junction exposed to illumination, both the parameters were found to decrease.

Dont have a licence yet? Then find out more about our products and how to get one now:

Springer Professional "Wirtschaft+Technik"

Online-Abonnement

Mit Springer Professional "Wirtschaft+Technik" erhalten Sie Zugriff auf:

  • über 102.000 Bücher
  • über 537 Zeitschriften

aus folgenden Fachgebieten:

  • Automobil + Motoren
  • Bauwesen + Immobilien
  • Business IT + Informatik
  • Elektrotechnik + Elektronik
  • Energie + Nachhaltigkeit
  • Finance + Banking
  • Management + Führung
  • Marketing + Vertrieb
  • Maschinenbau + Werkstoffe
  • Versicherung + Risiko

Jetzt Wissensvorsprung sichern!

Springer Professional "Technik"

Online-Abonnement

Mit Springer Professional "Technik" erhalten Sie Zugriff auf:

  • über 67.000 Bücher
  • über 390 Zeitschriften

aus folgenden Fachgebieten:

  • Automobil + Motoren
  • Bauwesen + Immobilien
  • Business IT + Informatik
  • Elektrotechnik + Elektronik
  • Energie + Nachhaltigkeit
  • Maschinenbau + Werkstoffe




 

Jetzt Wissensvorsprung sichern!

Springer Professional "Wirtschaft"

Online-Abonnement

Mit Springer Professional "Wirtschaft" erhalten Sie Zugriff auf:

  • über 67.000 Bücher
  • über 340 Zeitschriften

aus folgenden Fachgebieten:

  • Bauwesen + Immobilien
  • Business IT + Informatik
  • Finance + Banking
  • Management + Führung
  • Marketing + Vertrieb
  • Versicherung + Risiko




Jetzt Wissensvorsprung sichern!

Literature
1.
go back to reference K. Krishnamoorthy et al., New function of molybdenum trioxide nanoplates: toxicity towards pathogenic bacteria through membrane stress. Colloids Surf. B 112, 521–524 (2013) K. Krishnamoorthy et al., New function of molybdenum trioxide nanoplates: toxicity towards pathogenic bacteria through membrane stress. Colloids Surf. B 112, 521–524 (2013)
2.
go back to reference L. Chibane et al., A simple process for synthesis of transparent thin films of molybdenum trioxide in the orthorhombic phase (α-MoO3). J. Electron. Mater. 46(4), 1963–1970 (2017) L. Chibane et al., A simple process for synthesis of transparent thin films of molybdenum trioxide in the orthorhombic phase (α-MoO3). J. Electron. Mater. 46(4), 1963–1970 (2017)
3.
go back to reference R. Singh et al., Growth angle-dependent tunable work function and optoelectronic properties of MoOx thin films. Appl. Surf. Sci. 507, 144958 (2020) R. Singh et al., Growth angle-dependent tunable work function and optoelectronic properties of MoOx thin films. Appl. Surf. Sci. 507, 144958 (2020)
4.
go back to reference L. Zhou et al., α-MoO3 nanobelts: a high performance cathode material for lithium ion batteries. J. Phys. Chem. C 114(49), 21868–21872 (2010) L. Zhou et al., α-MoO3 nanobelts: a high performance cathode material for lithium ion batteries. J. Phys. Chem. C 114(49), 21868–21872 (2010)
5.
go back to reference F. Cauduro et al., Crystalline molybdenum oxide thin-films for application as interfacial layers in optoelectronic devices. ACS Appl. Mater. Interfaces 9(8), 7717–7724 (2017) F. Cauduro et al., Crystalline molybdenum oxide thin-films for application as interfacial layers in optoelectronic devices. ACS Appl. Mater. Interfaces 9(8), 7717–7724 (2017)
6.
go back to reference L. Li et al., Highly aligned molybdenum trioxide nanobelts for flexible thin-film transistors and supercapacitors: macroscopic assembly and anisotropic electrical properties. ACS Appl. Nano Mater. 2(3), 1466–1471 (2019) L. Li et al., Highly aligned molybdenum trioxide nanobelts for flexible thin-film transistors and supercapacitors: macroscopic assembly and anisotropic electrical properties. ACS Appl. Nano Mater. 2(3), 1466–1471 (2019)
7.
go back to reference C. Lu, A.B. Prakoso, Z. Li, Investigation of solution processed molybdenum oxide as selective contacts for silicon solar cells application. Mater. Chem. Phys. 236, 121779 (2019) C. Lu, A.B. Prakoso, Z. Li, Investigation of solution processed molybdenum oxide as selective contacts for silicon solar cells application. Mater. Chem. Phys. 236, 121779 (2019)
8.
go back to reference L. Zheng et al., Novel metastable hexagonal MoO3 nanobelts: synthesis, photochromic, and electrochromic properties. Chem. Mater. 21(23), 5681–5690 (2009) L. Zheng et al., Novel metastable hexagonal MoO3 nanobelts: synthesis, photochromic, and electrochromic properties. Chem. Mater. 21(23), 5681–5690 (2009)
9.
go back to reference D. Murugesan et al., Two dimensional α-MoO3 nanosheets decorated carbon cloth electrodes for high-performance supercapacitors. Colloids Surf. A 569, 137–144 (2019) D. Murugesan et al., Two dimensional α-MoO3 nanosheets decorated carbon cloth electrodes for high-performance supercapacitors. Colloids Surf. A 569, 137–144 (2019)
10.
go back to reference Ya. Chen, B. Wang, Effects of deposition parameters on structures and photoluminescence of MoO3–x nanomaterials grown by CVD. Opt. Mater. 92, 150–155 (2019) Ya. Chen, B. Wang, Effects of deposition parameters on structures and photoluminescence of MoO3–x nanomaterials grown by CVD. Opt. Mater. 92, 150–155 (2019)
11.
go back to reference H. Mehmood et al., Electrical, optical and surface characterization of reactive RF magnetron sputtered molybdenum oxide films for solar cell applications. Mater. Sci. Semicond. Process. 101, 46–56 (2019) H. Mehmood et al., Electrical, optical and surface characterization of reactive RF magnetron sputtered molybdenum oxide films for solar cell applications. Mater. Sci. Semicond. Process. 101, 46–56 (2019)
12.
go back to reference N. Zamora-Romero et al., Molybdenum nanoparticles generation by pulsed laser ablation and effects of oxidation due to aging. J. Alloy. Compd. 788, 666–671 (2019) N. Zamora-Romero et al., Molybdenum nanoparticles generation by pulsed laser ablation and effects of oxidation due to aging. J. Alloy. Compd. 788, 666–671 (2019)
13.
go back to reference C. Ahn et al., Low-temperature synthesis of large‐scale molybdenum disulfide thin films directly on a plastic substrate using plasma‐enhanced chemical vapor deposition. Adv. Mater. 27(35), 5223–5229 (2015) C. Ahn et al., Low-temperature synthesis of large‐scale molybdenum disulfide thin films directly on a plastic substrate using plasma‐enhanced chemical vapor deposition. Adv. Mater. 27(35), 5223–5229 (2015)
14.
go back to reference S.-Y. Lin et al., Electrochromic properties of MoO3 thin films derived by a sol–gel process. J. Solgel Sci. Technol. 53(1), 51–58 (2010) S.-Y. Lin et al., Electrochromic properties of MoO3 thin films derived by a sol–gel process. J. Solgel Sci. Technol. 53(1), 51–58 (2010)
15.
go back to reference S. Khalate et al., Structural and electrochemical properties of spray deposited molybdenum trioxide (α-MoO3) thin films. J. Solid State Electrochem. 21(9), 2737–2746 (2017) S. Khalate et al., Structural and electrochemical properties of spray deposited molybdenum trioxide (α-MoO3) thin films. J. Solid State Electrochem. 21(9), 2737–2746 (2017)
16.
go back to reference K.V. Alex et al., Substrate temperature induced effect on microstructure, optical and photocatalytic activity of ultrasonic spray pyrolysis deposited MoO3 thin films. Mater. Res. Express 6(6), 066421 (2019) K.V. Alex et al., Substrate temperature induced effect on microstructure, optical and photocatalytic activity of ultrasonic spray pyrolysis deposited MoO3 thin films. Mater. Res. Express 6(6), 066421 (2019)
17.
go back to reference B. Kannan, R. Pandeeswari, B. Jeyaprakash, Influence of precursor solution volume on the properties of spray deposited α-MoO3 thin films. Ceram. Int. 40(4), 5817–5823 (2014) B. Kannan, R. Pandeeswari, B. Jeyaprakash, Influence of precursor solution volume on the properties of spray deposited α-MoO3 thin films. Ceram. Int. 40(4), 5817–5823 (2014)
18.
go back to reference A. Mane, A. Moholkar, Effect of solution concentration on physicochemical and NO2 gas sensing properties of sprayed MoO3 nanobelts. Thin Solid Films 648, 50–61 (2018) A. Mane, A. Moholkar, Effect of solution concentration on physicochemical and NO2 gas sensing properties of sprayed MoO3 nanobelts. Thin Solid Films 648, 50–61 (2018)
19.
go back to reference K. Mallem et al., Molybdenum oxide: a superior hole extraction layer for replacing p-type hydrogenated amorphous silicon with high efficiency heterojunction Si solar cells. Mater. Res. Bull. 110, 90–96 (2019) K. Mallem et al., Molybdenum oxide: a superior hole extraction layer for replacing p-type hydrogenated amorphous silicon with high efficiency heterojunction Si solar cells. Mater. Res. Bull. 110, 90–96 (2019)
20.
go back to reference B. Macco et al., Low-temperature atomic layer deposition of MoOx for silicon heterojunction solar cells. Physica Status Solidi 9(7), 393–396 (2015) B. Macco et al., Low-temperature atomic layer deposition of MoOx for silicon heterojunction solar cells. Physica Status Solidi 9(7), 393–396 (2015)
21.
go back to reference W. Kern, The evolution of silicon wafer cleaning technology. J. Electrochem. Soc. 137(6), 1887 (1990) W. Kern, The evolution of silicon wafer cleaning technology. J. Electrochem. Soc. 137(6), 1887 (1990)
22.
go back to reference J. Cho et al., Interface analysis and intrinsic thermal stability of MoOx based hole-selective contacts for silicon heterojunction solar cells. Sol. Energy Mater. Sol. Cells 201, 110074 (2019) J. Cho et al., Interface analysis and intrinsic thermal stability of MoOx based hole-selective contacts for silicon heterojunction solar cells. Sol. Energy Mater. Sol. Cells 201, 110074 (2019)
23.
go back to reference J. Hanawalt, H. Rinn, L. Frevel, Chemical analysis by X-ray diffraction. Ind. Eng. Chem. Anal. Ed. 10(9), 457–512 (1938) J. Hanawalt, H. Rinn, L. Frevel, Chemical analysis by X-ray diffraction. Ind. Eng. Chem. Anal. Ed. 10(9), 457–512 (1938)
24.
go back to reference G. Andersson, A. Magneli, On the crystal structure of molybdenum trioxide. Acta Chem. Scand. 4, 793–797 (1950) G. Andersson, A. Magneli, On the crystal structure of molybdenum trioxide. Acta Chem. Scand. 4, 793–797 (1950)
25.
go back to reference L. Jiwen et al., Nano MoO3 phase structural evolution during hydrothermal synthesis and its electrochemical properties. Int. J. Electrochem. Sci. 12, 2429–2440 (2017) L. Jiwen et al., Nano MoO3 phase structural evolution during hydrothermal synthesis and its electrochemical properties. Int. J. Electrochem. Sci. 12, 2429–2440 (2017)
26.
go back to reference J.Z. Ou et al., In situ Raman spectroscopy of H2 gas interaction with layered MoO3. J. Phys. Chem. C 115(21), 10757–10763 (2011) J.Z. Ou et al., In situ Raman spectroscopy of H2 gas interaction with layered MoO3. J. Phys. Chem. C 115(21), 10757–10763 (2011)
27.
go back to reference E. Ghaleghafi, M.B. Rahmani, Facile synthesis, characterization, and photoluminescence of lamellar α-MoO3 thin films. Solid State Sci. 94, 85–91 (2019) E. Ghaleghafi, M.B. Rahmani, Facile synthesis, characterization, and photoluminescence of lamellar α-MoO3 thin films. Solid State Sci. 94, 85–91 (2019)
28.
go back to reference V. Jagadeesan, V. Subramaniam, Impact of molarity on structural, optical, morphological and electrical properties of copper oxide thin films prepared by cost effective jet nebulizer spray pyrolysis technique. J. Mater. Sci. 30(2), 1571–1578 (2019) V. Jagadeesan, V. Subramaniam, Impact of molarity on structural, optical, morphological and electrical properties of copper oxide thin films prepared by cost effective jet nebulizer spray pyrolysis technique. J. Mater. Sci. 30(2), 1571–1578 (2019)
29.
go back to reference P. Shinde et al., Properties of spray deposited titanium dioxide thin films and their application in photoelectrocatalysis. Sol. Energy Mater. Sol. Cells 92(3), 283–290 (2008) P. Shinde et al., Properties of spray deposited titanium dioxide thin films and their application in photoelectrocatalysis. Sol. Energy Mater. Sol. Cells 92(3), 283–290 (2008)
30.
go back to reference Y.-F. Sun et al., Metal oxide nanostructures and their gas sensing properties: a review. Sensors 12(3), 2610–2631 (2012) Y.-F. Sun et al., Metal oxide nanostructures and their gas sensing properties: a review. Sensors 12(3), 2610–2631 (2012)
31.
go back to reference H. Attouche et al., Precursor nature and molarities effect on the optical, structural, morphological, and electrical properties of TiO2 thin films deposited by spray pyrolysis. Optik 203, 163985 (2020) H. Attouche et al., Precursor nature and molarities effect on the optical, structural, morphological, and electrical properties of TiO2 thin films deposited by spray pyrolysis. Optik 203, 163985 (2020)
32.
go back to reference S. Joishy et al., Influence of solution molarity on structure, surface morphology, non-linear optical and electric properties of CdO thin films prepared by spray pyrolysis technique. Mater. Res. Express 6(10), 106447 (2019) S. Joishy et al., Influence of solution molarity on structure, surface morphology, non-linear optical and electric properties of CdO thin films prepared by spray pyrolysis technique. Mater. Res. Express 6(10), 106447 (2019)
33.
go back to reference D. Somvanshi, S. Jit, Analysis of I–V characteristics of Pd/ZnO thin film/n-Si schottky diodes with series resistance. J. Nanoelectron. Optoelectron. 9(1), 21–26 (2014) D. Somvanshi, S. Jit, Analysis of I–V characteristics of Pd/ZnO thin film/n-Si schottky diodes with series resistance. J. Nanoelectron. Optoelectron. 9(1), 21–26 (2014)
34.
go back to reference V. Mikhelashvili, G. Eisenstein, R. Uzdin, Extraction of Schottky diode parameters with a bias dependent barrier height. Solid-State Electron. 45(1), 143–148 (2001) V. Mikhelashvili, G. Eisenstein, R. Uzdin, Extraction of Schottky diode parameters with a bias dependent barrier height. Solid-State Electron. 45(1), 143–148 (2001)
35.
go back to reference V. Balasubramani et al., Impact of annealing temperature on spin coated V2O5 thin films as interfacial layer in Cu/V2O5/n-Si structured schottky barrier diodes. J. Inorg. Organomet. Polym. Mater. 29(5), 1533–1547 (2019) V. Balasubramani et al., Impact of annealing temperature on spin coated V2O5 thin films as interfacial layer in Cu/V2O5/n-Si structured schottky barrier diodes. J. Inorg. Organomet. Polym. Mater. 29(5), 1533–1547 (2019)
36.
go back to reference A. Karabulut, H. Efeoglu, A. Turut, Influence of Al2O3 barrier on the interfacial electronic structure of Au/Ti/n-GaAs structures. J. Semicond. 38(5), 054003 (2017) A. Karabulut, H. Efeoglu, A. Turut, Influence of Al2O3 barrier on the interfacial electronic structure of Au/Ti/n-GaAs structures. J. Semicond. 38(5), 054003 (2017)
37.
go back to reference Y. Liu et al., High performance MoO3 – x/Si heterojunction photodetectors with nanoporous pyramid Si arrays for visible light communication application. J. Mater. Chem. C 7(4), 917–925 (2019) Y. Liu et al., High performance MoO3 – x/Si heterojunction photodetectors with nanoporous pyramid Si arrays for visible light communication application. J. Mater. Chem. C 7(4), 917–925 (2019)
38.
go back to reference J. Semple, S. Rossbauer, T.D. Anthopoulos, Analysis of Schottky contact formation in coplanar Au/ZnO/Al nanogap radio frequency diodes processed from solution at low temperature. ACS Appl. Mater. Interfaces 8(35), 23167–23174 (2016) J. Semple, S. Rossbauer, T.D. Anthopoulos, Analysis of Schottky contact formation in coplanar Au/ZnO/Al nanogap radio frequency diodes processed from solution at low temperature. ACS Appl. Mater. Interfaces 8(35), 23167–23174 (2016)
39.
go back to reference V. Balasubramani et al., Impact of annealing temperature on spin coated V2O5 thin films as interfacial layer in Cu/V2O5/n-Si structured Schottky barrier diodes. J. Inorg. Organomet. Polym Mater. 29(5), 1533–1547 (2019) V. Balasubramani et al., Impact of annealing temperature on spin coated V2O5 thin films as interfacial layer in Cu/V2O5/n-Si structured Schottky barrier diodes. J. Inorg. Organomet. Polym Mater. 29(5), 1533–1547 (2019)
40.
go back to reference K. Sasikumar et al., Fabrication and characterization of rare earth (Ce, Gd, and Y) doped ZrO2 based metal-insulator-semiconductor (MIS) type Schottky barrier diodes. Superlattices Microstruct. 139, 106424 (2020) K. Sasikumar et al., Fabrication and characterization of rare earth (Ce, Gd, and Y) doped ZrO2 based metal-insulator-semiconductor (MIS) type Schottky barrier diodes. Superlattices Microstruct. 139, 106424 (2020)
41.
go back to reference P. Vivek et al., Incorporation of Ba2+ ions on the properties of MoO3 thin films and fabrication of positive photo-response Cu/Ba–MoO3/p-Si structured diodes. Superlattices Microstruct. 133, 106197 (2019) P. Vivek et al., Incorporation of Ba2+ ions on the properties of MoO3 thin films and fabrication of positive photo-response Cu/Ba–MoO3/p-Si structured diodes. Superlattices Microstruct. 133, 106197 (2019)
42.
go back to reference M. Balaji, J. Chandrasekaran, M. Raja, Role of substrate temperature on MoO3 thin films by the JNS pyrolysis technique for P–N junction diode application. Mater. Sci. Semicond. Process. 43, 104–113 (2016) M. Balaji, J. Chandrasekaran, M. Raja, Role of substrate temperature on MoO3 thin films by the JNS pyrolysis technique for P–N junction diode application. Mater. Sci. Semicond. Process. 43, 104–113 (2016)
43.
go back to reference M. Balaji et al., Fabrication of ON/OFF switching response based on n-Ni-doped MoO3/p-Si junction diodes using Ni-MoO3 thin films as n-type layer prepared by JNS pyrolysis technique. Appl. Phys. A 126(3), 1–14 (2020) M. Balaji et al., Fabrication of ON/OFF switching response based on n-Ni-doped MoO3/p-Si junction diodes using Ni-MoO3 thin films as n-type layer prepared by JNS pyrolysis technique. Appl. Phys. A 126(3), 1–14 (2020)
44.
go back to reference E.H. Rhoderick, E. Rhoderick, Metal-Semiconductor Contacts (Clarendon Press, Oxford, 1978) E.H. Rhoderick, E. Rhoderick, Metal-Semiconductor Contacts (Clarendon Press, Oxford, 1978)
45.
go back to reference S.M. Sze, K.K. Ng, Physics of Semiconductor Devices (Wiley, New York, 2006) S.M. Sze, K.K. Ng, Physics of Semiconductor Devices (Wiley, New York, 2006)
46.
go back to reference C. Battaglia et al., Hole selective MoOx contact for silicon solar cells. Nano Lett. 14(2), 967–971 (2014) C. Battaglia et al., Hole selective MoOx contact for silicon solar cells. Nano Lett. 14(2), 967–971 (2014)
47.
go back to reference Y. Zhang et al., The effect of oxygen pretreatment at hetero-interface on the photovoltaic properties of MoS2/Si heterojunction solar cells. J. Alloy. Compd. 803, 1023–1031 (2019) Y. Zhang et al., The effect of oxygen pretreatment at hetero-interface on the photovoltaic properties of MoS2/Si heterojunction solar cells. J. Alloy. Compd. 803, 1023–1031 (2019)
48.
go back to reference C. Battaglia et al., Silicon heterojunction solar cell with passivated hole selective MoOx contact. Appl. Phys. Lett. 104(11), 113902 (2014) C. Battaglia et al., Silicon heterojunction solar cell with passivated hole selective MoOx contact. Appl. Phys. Lett. 104(11), 113902 (2014)
Metadata
Title
Structural, optical, and electrical properties of spray-pyrolyzed MoO3 thin films by varying precursor molarity, as hole-selective contact for silicon-based heterojunction devices
Authors
Bashir Yusuf
Mohd Mahadi Halim
Md Roslan Hashim
Mohd Zamir Pakhuruddin
Publication date
27-10-2020
Publisher
Springer US
Published in
Journal of Materials Science: Materials in Electronics / Issue 23/2020
Print ISSN: 0957-4522
Electronic ISSN: 1573-482X
DOI
https://doi.org/10.1007/s10854-020-04692-x

Other articles of this Issue 23/2020

Journal of Materials Science: Materials in Electronics 23/2020 Go to the issue