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Published in: Journal of Electronic Materials 1/2023

11-10-2022 | Original Research Article

Analog Performance Analysis of High-K Spacer Dual Material Gate Graded Channel Nanotube

Authors: Ashima Rai, D. Vaithiyanathan, Balwinder Raj

Published in: Journal of Electronic Materials | Issue 1/2023

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Abstract

A dual-metal gate with a high-k spacer and a graded channel nanotube is proposed and analyzed. It is a promising architecture to combat the prominent lateral band-to-band tunneling (L-BTBT)-based gate-induced drain leakage (GIDL) experienced in gate-all-around structures, and has a superior analog performance. A comparative analysis of dual metal gate (DMG) and single metal gate (SMG) structures shows the higher efficacy of the DMG and high-k spacer structures. The proposed device structure offers peaks for gm, fT, gd, and IDS at 0.065 mS, 980 GHz, 0.11 mS/μm, and 10−3 A, respectively, making them a good choice for analog applications in the terahertz range. The work function tuning of the dual gate is demonstrated, and the use of graded channel and high-k spacers makes the proposed device a reliable candidate for scaling and applications, while being cost-effective and in sync with existing fabrication processes. This work illustrates the benefits of DMG with a high-k spacer over SMG and DMG structures without high-k spacer counterparts. It provides an incentive for further experimental exploration.

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Metadata
Title
Analog Performance Analysis of High-K Spacer Dual Material Gate Graded Channel Nanotube
Authors
Ashima Rai
D. Vaithiyanathan
Balwinder Raj
Publication date
11-10-2022
Publisher
Springer US
Published in
Journal of Electronic Materials / Issue 1/2023
Print ISSN: 0361-5235
Electronic ISSN: 1543-186X
DOI
https://doi.org/10.1007/s11664-022-10003-3

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