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2020 | OriginalPaper | Buchkapitel

15. Advances in Nano-finishing of Optical Glasses and Glass Ceramics

verfasst von : Mahender Kumar Gupta, I. Abdul Rasheed, M. Buchi Suresh

Erschienen in: Handbook of Advanced Ceramics and Composites

Verlag: Springer International Publishing

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Abstract

Optical glass and glass ceramic components with angstrom-level surface roughness and nanometer-level dimensional accuracy are in potential demand for sophisticated optical fabrication. In recent years, aspherical and free-form surfaces are gaining prominence for high performance applications. Moreover, the new optical materials and fabrication process which exhibit superior mechanical properties are being developed to meet the stringent requirements and harsh environment. Fabrication of complex-shaped high optical finish components becomes a significant challenge as conventional finishing techniques are unable to machine aspherical or free-form surfaces precisely. This situation demands few highly advanced and precise finishing processes which ensure stress-free surfaces. Mostly, the optical components are fabricated by shaping or pre-finishing methods followed by final finishing processes. Final finishing processes include more deterministic and flexible polishing techniques that can achieve desired surface finish, figure accuracy and surface integrity to make it suitable for shorter wavelength applications. In this chapter, basic principle, mechanism of various material removal processes, and precision polishing techniques such as magnetorheological fluid-based finishing were discussed and are compared with the convention polishing techniques.

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Vorheriges Kapitel Zinc Sulfide Ceramics for Infrared Optics

Nächstes Kapitel Electric Field/Current-Assisted Sintering of Optical Ceramics

Church EL, Jenkinson HA, Zavada JM (1979) Relationship between surface scattering and micro-topographic features. Opt Eng 18:125–136CrossRef

Hank H (1993) Karow, fabrication methods for precision optics. A Wiley Interscience Publications, New York

Fahnle OW, Van Brug H (1999) novel approaches to generate aspherical optical surfaces, part of SPIE conference on optical manufacturing and testing III Denver, July 1999

Yamauchi K, Yamamura K, Mimura H, Sano Y, Saito A, Souvorov A, Yabashi M, Tamasaku K, Ishikawa T, Mori Y (2002) Nearly diffraction-limited line focusing of a hard X-ray beam with an elliptically figured mirror. J Synchrotron Radiat 9:313–316CrossRef

Mimura H, Yamauchi K, Yamamura K, Kubota A, Matsuyama S, Sano Y, Ueno K, Endo K, Nishino Y, Tamasaku K, Yabashi M, Ishikawa T, Mori Y (2004) Image quality improvement in a hard X-ray projection microscope using total reflection mirror optics. J Synchrotron Radiat 11:343–346CrossRef

Mimura H, Takei Y, Kume T, Takeo Y, Motoyama H, Egawa S, Matsuzawa Y, Yamaguchi G, Senba Y, Kishimoto H, Ohashi H (2018) Fabrication of a precise ellipsoidal Mirror for soft X-ray Nanofocusing. Rev Sci Instrum 89:093104CrossRef

Yumoto H, Mimura H, Matsuyama S, Hara H (2005) Fabrication of elliptically figured mirror for focusing hard X-rays to size less than 50nm. Rev Sci Instrum 76:063708CrossRef

Matsuyama S, Mimura H, Yumoto H (2005) Diffraction-limited two-dimensional hard X-ray focusing at the 100nm level using a kirkpatrick-baez mirror arrangement. Rev Sci Instrum 76:083114CrossRef

Bifano TG, Dow TA, Scattergood RO (1991) Ductile-regime grinding: a novel technology for machining brittle materials. Trans ASME 113:184–189

10.

Kim J-D, Nam S-R (1996) A piezoelectric driven micro-positioning system for the ductile-mode grinding of brittle materials. J Mater Process Tech 16:309–319

11.

Allen SD, Braunstein M, Guiliano C, Wang V(1974) Laser induced damage in optical materials: NBS special publication 414:66–75

12.

Bennet JM, King RJ (1970) Effect of polishing technique on the roughness and residual surface film on fused quartz optical flats. Appl Opt 9(1):236–238CrossRef

13.

Xu W (2019) Yanyao Cheng, min Zhong, effects of process parameters on chemical-mechanical interactions during sapphire polishing. Microelectron Eng 216:111029CrossRef

14.

Mao M, Chen W, Liu J, Hu Z, Qin C (2020) Chemical mechanism of chemical-mechanical polishing of tungsten cobalt cemented carbide inserts. Int J Refract Met Hard Mater 88:105179CrossRef

15.

Dietz RW, Bennet ZL (1966) Bowl feed technique for producing supersmooth optical surface. Appl Opt 5:881–882CrossRef

16.

Van Wingerden J, Frankena HJ, Van der Zwam BA (1992) Production and measurement of super polished surfaces. Opt Eng 31(5):1086–1092CrossRef

17.

Dietz RW, Bennett JM (1966) Bowl feed technique for producing Supersmooth optical surfaces. Appl Opt 5:881CrossRef

18.

Soares SF, Baselt DR, Black JP, Jungling KC, Stowell WK (1994) Float-polishing process and analysis of float polished quartz. Appl Opt 33(1):89–95CrossRef

19.

Hirata T, Takei Y, Mimura H (2014) Machining property in smooting of steeply curved surfaces by elastic emission machining. Proc CIRP 13:198–202CrossRef

20.

Mori Y, Yamauchi Y, Yamamura K (2001) Development of plasma chemical vaporization machining and elastic emission machining systems for coherent x-ray optics. Proc SPIE 4501:30CrossRef

21.

Kordonski WI, Golini D (1998) Magnetorheological suspension-based high precision finishing technology (MRF). J Intell Mater Syst Struct 9(8):650–654CrossRef

22.

Kordonski WI, Golini D (1999) Fundamentals of magnetorheological fluid utilization in high precision finishing. J Intell Mater Syst Struct 10(9):683–689CrossRef

23.

Kordonski WI, Golini D (1999) Progress update in magnetorheological finishing. Int J Mod Phys B 13:2205–2212CrossRef

24.

Kordonski WI, Jacobs S (1996) Magnetorheological finishing. Int J Mod Phys B 10:2837–2848CrossRef

25.

Kordonski WI (2014) Magnetorheological Fluid-Based High Precision Finishing Technology, Chapter 11. In: Wereley NM (ed) Magnetorheology: Advances and Applications. RSC Smart Materials, Cambridge, pp 261–277

26.

Liu J, Li X, Zhang Y, Dong T, Ye M, Wang C (2020) Predicting the material removal rate in surface magnetorheological finishing based on synergistic effect of pressure and shear stress. Appl Surf Sci 504:144492CrossRef

27.

Nie M, Cao J, Li J, Maohui F (2019) Magnet arrangements in a magnetic field generator for magnetorheological finishing. Int J Mech Sci 161-162:105018CrossRef

28.

Dhongade SH, Suresh MB, Shanker V, Rao YS (2019) Impact of particle size distribution of non-magnetic abrasive particles on rheology of magneto-rheological polishing fluids. In: International conference advances in chemical sciences and technology

29.

Luckham PF, Ukeje MA (1999) Effect of Particle Size Distribution on the Rheology of Dispersed Systems. J Colloid Interface Sci 356:347–356CrossRef

30.

Zhang FH, Kang GW, Qiu ZJ, Dong S (2004) Magnetorheological finishing of glass ceramic. Key Eng Mater 257-258:511–514CrossRef

31.

Xiao YM, Bass M (1983) Thermal stress limitations to laser fire polishing of glasses. Appl Opt 22:2933–2936CrossRef

32.

Weingarten C, Schmickler A, Willenborg E, Wissenbach K (2017) Laser polishing and laser shape correction of optical glass. J Laser Appl 29:011702CrossRef

33.

Carter G, Nobes MJ, Katardjiev IV (1993) The theory of ion beam polishing and machining. Vacuum 44:303–309CrossRef

34.

Gruner D, Faldt J, Jansson R, Shen Z (2011) Argon ion beam polishing: a preparation technique for evaluating the interface of asseointegrated implants with high resolution. Int J Oral Maxillofac Implants 26:547–552

35.

Haghbin N, Zadeh FA, Spelt JK, Papini M (2016) High pressure abrasive slurry jet micro machining using slurry entrainment. Int J Adv Manuf Technol 84:1031–1043

36.

Nouraei H, Wodoslawsky A, Papini M, Spelt JK (2013) Characteristics of abrasive slurry jet micro machining: A comparison with abrasive air jet micromachining. J Mater Process Technol 213:1711–1724CrossRef

37.

Mader H (1990) Plasma-assisted etching. Micro Syst Technol 90:357–365CrossRef

38.

Coburn JW (1998) Mechanisms in plasma-assisted etching. Phys Scr 23:1–7

Titel: Advances in Nano-finishing of Optical Glasses and Glass Ceramics
verfasst von: Mahender Kumar Gupta
I. Abdul Rasheed
M. Buchi Suresh
Verlag: Springer International Publishing
Buch: Handbook of Advanced Ceramics and Composites
Print ISBN: 978-3-030-16346-4

Electronic ISBN: 978-3-030-16347-1

Copyright-Jahr: 2020
DOI: https://doi.org/10.1007/978-3-030-16347-1_17

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