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2019 | OriginalPaper | Buchkapitel

1. Atomic Resolution Transmission Electron Microscopy

verfasst von : Angus I. Kirkland, Shery L.-Y. Chang, John L. Hutchison

Erschienen in: Springer Handbook of Microscopy

Verlag: Springer International Publishing

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Abstract

This chapter provides an overview of the essential theory and instrumentation relevant to high-resolution imaging in the transmission electron microscope together with selected application examples. It begins with a brief historical overview of the field. Subsequently, the theory of image formation and resolution limits are discussed. We then discuss the effects of the objective lens through the wave aberration function and coherence of the electron source. In the third section, the key instrument components important for HRTEM imaging are discussed; namely, the objective lens, electron sources and monochromators, energy filters and detectors. The theory and experimental implementation of exit wavefunction reconstruction from HRTEM images is detailed in the fourth section, including examples taken from studies of complex oxides. The final section treats the simulation of HRTEM images with particular reference to the widely adopted multislice method.

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Zurück zum Zitat D. van Dyck: High-speed computation techniques for the simulation of high resolution electron micrographs, J. Microsc. 132, 31–42 (1983) D. van Dyck: High-speed computation techniques for the simulation of high resolution electron micrographs, J. Microsc. 132, 31–42 (1983)
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Zurück zum Zitat P. Hirsch, A. Howie, R. Nicholson, D. Pashley, M. Whelan: Electron Microscopy of Thin Crystals (Butterworths, London 1965) P. Hirsch, A. Howie, R. Nicholson, D. Pashley, M. Whelan: Electron Microscopy of Thin Crystals (Butterworths, London 1965)
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Zurück zum Zitat E. Kirkland: Advanced Computing in Electron Microscopy (Plenum, New York 1998) E. Kirkland: Advanced Computing in Electron Microscopy (Plenum, New York 1998)
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Zurück zum Zitat J.M. Cowley: The scattering of electrons by atoms and crystals. III. Single-crystal diffraction patterns, Acta Crystallogr. 12, 360–367 (1959) J.M. Cowley: The scattering of electrons by atoms and crystals. III. Single-crystal diffraction patterns, Acta Crystallogr. 12, 360–367 (1959)
Zurück zum Zitat D. van Dyck, M. Op de Beeck: Comparison and test of HRTEM image simulation programs, Ultramicroscopy 55, 435–457 (1994) D. van Dyck, M. Op de Beeck: Comparison and test of HRTEM image simulation programs, Ultramicroscopy 55, 435–457 (1994)
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Zurück zum Zitat K. Hanßen: The optical transfer theory of the electron microscope: Fundamental principles and applications, Adv. Opt. Electron Microsc. 4, 1–84 (1971) K. Hanßen: The optical transfer theory of the electron microscope: Fundamental principles and applications, Adv. Opt. Electron Microsc. 4, 1–84 (1971)
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Zurück zum Zitat J. Barthel, A. Thust: Quantification of the information limit of transmission electron microscopes, Phys. Rev. Lett. 101, 200801 (2008) J. Barthel, A. Thust: Quantification of the information limit of transmission electron microscopes, Phys. Rev. Lett. 101, 200801 (2008)
Zurück zum Zitat P. Hawkes, E. Kasper: Wave Optics, Principles of Electron Optics, Vol. 3, 1st edn. (Academic Press, London 1994) P. Hawkes, E. Kasper: Wave Optics, Principles of Electron Optics, Vol. 3, 1st edn. (Academic Press, London 1994)
Zurück zum Zitat O. Saxton: Observation of lens aberrations for very high-resolution electron microscopy. I. Theory, J. Microsc. 179, 201–213 (1995) O. Saxton: Observation of lens aberrations for very high-resolution electron microscopy. I. Theory, J. Microsc. 179, 201–213 (1995)
Zurück zum Zitat S. Morishita, M. Mukai, K. Suenaga, H. Sawada: Atomic resolution imaging at an ultralow accelerating voltage by a monochromatic transmission electron microscope, Phys. Rev. Lett. 117, 153004 (2016) S. Morishita, M. Mukai, K. Suenaga, H. Sawada: Atomic resolution imaging at an ultralow accelerating voltage by a monochromatic transmission electron microscope, Phys. Rev. Lett. 117, 153004 (2016)
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Zurück zum Zitat P. Hawkes, E. Kasper: Basic Geometrical Optics, Principles of Electron Optics, Vol. 1, 2nd edn. (Academic Press, London 2018) P. Hawkes, E. Kasper: Basic Geometrical Optics, Principles of Electron Optics, Vol. 1, 2nd edn. (Academic Press, London 2018)
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Zurück zum Zitat H. Rose: Outline of a spherically corrected semiaplanatic medium-voltage transmission electron microscope, Optik 85, 19–24 (1990) H. Rose: Outline of a spherically corrected semiaplanatic medium-voltage transmission electron microscope, Optik 85, 19–24 (1990)
Zurück zum Zitat M. Haider, H. Rose, S. Uhlemann, E. Schwan, B. Kabius, K. Urban: A spherical-aberration-corrected 200 kV transmission electron microscope, Ultramicroscopy 75, 53–60 (1998) M. Haider, H. Rose, S. Uhlemann, E. Schwan, B. Kabius, K. Urban: A spherical-aberration-corrected 200 kV transmission electron microscope, Ultramicroscopy 75, 53–60 (1998)
Zurück zum Zitat K. Urban, B. Kabius, M. Haider, H. Rose: A way to higher resolution: Spherical-aberration correction in a 200 kV transmission electron microscope, J. Electron Microsc. 48, 821–826 (1999) K. Urban, B. Kabius, M. Haider, H. Rose: A way to higher resolution: Spherical-aberration correction in a 200 kV transmission electron microscope, J. Electron Microsc. 48, 821–826 (1999)
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Zurück zum Zitat M. Haider, S. Uhlemann, J. Zach: Upper limits for the residual aberrations of a high-resolution aberration-corrected STEM, Ultramicroscopy 81, 163–175 (2000) M. Haider, S. Uhlemann, J. Zach: Upper limits for the residual aberrations of a high-resolution aberration-corrected STEM, Ultramicroscopy 81, 163–175 (2000)
Zurück zum Zitat O. Saxton: A new way of measuring microscope aberrations, Ultramicroscopy 81, 41–45 (2000) O. Saxton: A new way of measuring microscope aberrations, Ultramicroscopy 81, 41–45 (2000)
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Zurück zum Zitat G. Chand: Aberration Determination and Compensation in High Resolution Electron Microscopy, Ph.D. Thesis (Univ. of Cambridge, Cambridge 1997) G. Chand: Aberration Determination and Compensation in High Resolution Electron Microscopy, Ph.D. Thesis (Univ. of Cambridge, Cambridge 1997)
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Metadaten
Titel
Atomic Resolution Transmission Electron Microscopy
verfasst von
Angus I. Kirkland
Shery L.-Y. Chang
John L. Hutchison
Copyright-Jahr
2019
Verlag
Springer International Publishing
DOI
https://doi.org/10.1007/978-3-030-00069-1_1

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