Skip to main content

2021 | OriginalPaper | Buchkapitel

Corrected Phase Reconstruction in Diffraction Phase Microscopy System

verfasst von : V. P. Bui, S. Gorelik, Z. E. Ooi, Q. Wang, C. E. Png

Erschienen in: Advances in Condition Monitoring and Structural Health Monitoring

Verlag: Springer Singapore

Aktivieren Sie unsere intelligente Suche, um passende Fachinhalte oder Patente zu finden.

search-config
loading …

Abstract

This paper presents an approach for correcting phase reconstruction from the interferogram Diffraction phase microscopy (DPM) system if there exist artefacts around the defect features due to noises. By averaging local region around the artefacts of the unwrapped phase using a sliding window with iterative approach, the correct phase information can be retrieved. The reconstructed phase images after correction step demonstrate the ability of the proposed approach in extracting the correct phase data from the system.

Sie haben noch keine Lizenz? Dann Informieren Sie sich jetzt über unsere Produkte:

Springer Professional "Wirtschaft+Technik"

Online-Abonnement

Mit Springer Professional "Wirtschaft+Technik" erhalten Sie Zugriff auf:

  • über 102.000 Bücher
  • über 537 Zeitschriften

aus folgenden Fachgebieten:

  • Automobil + Motoren
  • Bauwesen + Immobilien
  • Business IT + Informatik
  • Elektrotechnik + Elektronik
  • Energie + Nachhaltigkeit
  • Finance + Banking
  • Management + Führung
  • Marketing + Vertrieb
  • Maschinenbau + Werkstoffe
  • Versicherung + Risiko

Jetzt Wissensvorsprung sichern!

Springer Professional "Technik"

Online-Abonnement

Mit Springer Professional "Technik" erhalten Sie Zugriff auf:

  • über 67.000 Bücher
  • über 390 Zeitschriften

aus folgenden Fachgebieten:

  • Automobil + Motoren
  • Bauwesen + Immobilien
  • Business IT + Informatik
  • Elektrotechnik + Elektronik
  • Energie + Nachhaltigkeit
  • Maschinenbau + Werkstoffe




 

Jetzt Wissensvorsprung sichern!

Springer Professional "Wirtschaft"

Online-Abonnement

Mit Springer Professional "Wirtschaft" erhalten Sie Zugriff auf:

  • über 67.000 Bücher
  • über 340 Zeitschriften

aus folgenden Fachgebieten:

  • Bauwesen + Immobilien
  • Business IT + Informatik
  • Finance + Banking
  • Management + Führung
  • Marketing + Vertrieb
  • Versicherung + Risiko




Jetzt Wissensvorsprung sichern!

Literatur
1.
Zurück zum Zitat Chowdhury S, Izatt J (2014) Structured illumination diffraction phase microscopy for broadband, subdiffraction resolution quantitative phase imaging. Opt Lett Chowdhury S, Izatt J (2014) Structured illumination diffraction phase microscopy for broadband, subdiffraction resolution quantitative phase imaging. Opt Lett
2.
Zurück zum Zitat Zhou R et al (2015) Semiconductor defect metrology using laser-based quantitative phase imaging. Proc SPIE Zhou R et al (2015) Semiconductor defect metrology using laser-based quantitative phase imaging. Proc SPIE
3.
Zurück zum Zitat Pham H et al (2011) Off-axis quantitative phase imaging processing using CUDA: toward real-time applications. Biomed Opt Express Pham H et al (2011) Off-axis quantitative phase imaging processing using CUDA: toward real-time applications. Biomed Opt Express
4.
Zurück zum Zitat Bhaduri B et al (2014) Diffraction phase microscopy: principles and applications in materials and life sciences. Adv Opt Photonics Bhaduri B et al (2014) Diffraction phase microscopy: principles and applications in materials and life sciences. Adv Opt Photonics
5.
Zurück zum Zitat Bhaduri B, Popescu G (2012) Derivative method for phase retrieval in off-axis quantitative phase imaging. Opt Lett Bhaduri B, Popescu G (2012) Derivative method for phase retrieval in off-axis quantitative phase imaging. Opt Lett
6.
Zurück zum Zitat Ikeda T et al (2005) Hilbert phase microscopy for investigating fast dynamics in transparent systems. Opt Lett Ikeda T et al (2005) Hilbert phase microscopy for investigating fast dynamics in transparent systems. Opt Lett
7.
Zurück zum Zitat Takeda M, Ina H, Kobayashi S (1982) Fourier-transform method of fringe-pattern analysis for computer-based topography and interferometry. J Opt Soc Am Takeda M, Ina H, Kobayashi S (1982) Fourier-transform method of fringe-pattern analysis for computer-based topography and interferometry. J Opt Soc Am
8.
Zurück zum Zitat Kemao Q (2004) Windowed Fourier transform for fringe pattern analysis. Appl Opt Kemao Q (2004) Windowed Fourier transform for fringe pattern analysis. Appl Opt
9.
Zurück zum Zitat Trusiak M et al (2016) Single and two-shot quantitative phase imaging using Hilbert-Huang Transform based fringe pattern analysis. Proc SPIE Trusiak M et al (2016) Single and two-shot quantitative phase imaging using Hilbert-Huang Transform based fringe pattern analysis. Proc SPIE
10.
Zurück zum Zitat Herráez M (2002) Fast two-dimensional phase-unwrapping algorithm based on sorting by reliability following a noncontinuous path. Appl Opt Herráez M (2002) Fast two-dimensional phase-unwrapping algorithm based on sorting by reliability following a noncontinuous path. Appl Opt
11.
Zurück zum Zitat Goldstein R et al (1988) Satellite radar interferometry: two-dimensional phase unwrapping. Radio Sci Goldstein R et al (1988) Satellite radar interferometry: two-dimensional phase unwrapping. Radio Sci
12.
Zurück zum Zitat Costantini M (1998) A novel phase unwrapping method based on network programming. IEEE Trans Geosci Remote Sens Costantini M (1998) A novel phase unwrapping method based on network programming. IEEE Trans Geosci Remote Sens
13.
Zurück zum Zitat Pritt MD, Shipman JS (1994) Least-squares two-dimensional phase unwrapping using FFT's. IEEE Trans Geosci Remote Sens Pritt MD, Shipman JS (1994) Least-squares two-dimensional phase unwrapping using FFT's. IEEE Trans Geosci Remote Sens
14.
Zurück zum Zitat Ghiglia DC, Romero LA (1996) Minimum Lp-norm two-dimensional phase unwrapping. J Opt Soc Am A Ghiglia DC, Romero LA (1996) Minimum Lp-norm two-dimensional phase unwrapping. J Opt Soc Am A
15.
Zurück zum Zitat Huang HYH et al (2012) Path-independent phase unwrapping using phase gradient and total-variation (TV) denoising. Opt Express Huang HYH et al (2012) Path-independent phase unwrapping using phase gradient and total-variation (TV) denoising. Opt Express
16.
Zurück zum Zitat Flynn TJ (1997) Two-dimensional phase unwrapping with minimum weighted discontinuity. J Opt Soc Am A Flynn TJ (1997) Two-dimensional phase unwrapping with minimum weighted discontinuity. J Opt Soc Am A
17.
Zurück zum Zitat Cheng C-Y, Hsieh C-L (2017) Background estimation and correction for high-precision localization microscopy. ACS Photonics Cheng C-Y, Hsieh C-L (2017) Background estimation and correction for high-precision localization microscopy. ACS Photonics
18.
Zurück zum Zitat Zhou R et al (2013) Detecting 20 nm wide defects in large area nanopatterns using optical interferometric microscopy. Nano Lett Zhou R et al (2013) Detecting 20 nm wide defects in large area nanopatterns using optical interferometric microscopy. Nano Lett
19.
Zurück zum Zitat Katkovnik V et al (2008) Phase local approximation (PhaseLa) technique for phase unwrap from noisy data. IEEE Trans Image Process Katkovnik V et al (2008) Phase local approximation (PhaseLa) technique for phase unwrap from noisy data. IEEE Trans Image Process
20.
Zurück zum Zitat Ghiglia DC, Romero LA (1994) Robust two-dimensional weighted and unweighted phase unwrapping that uses fast transforms and iterative methods. J Opt Soc Am A Ghiglia DC, Romero LA (1994) Robust two-dimensional weighted and unweighted phase unwrapping that uses fast transforms and iterative methods. J Opt Soc Am A
21.
Zurück zum Zitat Goldstein G, Creath K (2014) Quantitative phase microscopy: how to make phase data meaningful. Proc SPIE Int Soc Opt Eng Goldstein G, Creath K (2014) Quantitative phase microscopy: how to make phase data meaningful. Proc SPIE Int Soc Opt Eng
Metadaten
Titel
Corrected Phase Reconstruction in Diffraction Phase Microscopy System
verfasst von
V. P. Bui
S. Gorelik
Z. E. Ooi
Q. Wang
C. E. Png
Copyright-Jahr
2021
Verlag
Springer Singapore
DOI
https://doi.org/10.1007/978-981-15-9199-0_48

    Marktübersichten

    Die im Laufe eines Jahres in der „adhäsion“ veröffentlichten Marktübersichten helfen Anwendern verschiedenster Branchen, sich einen gezielten Überblick über Lieferantenangebote zu verschaffen.