Skip to main content
Erschienen in: Journal of Materials Science 14/2017

30.03.2017 | Original Paper

Deposition, characterization and gas sensors application of RF magnetron-sputtered terbium-doped ZnO films

verfasst von: Anita Hastir, Robert L. Opila, Nipin Kohli, Zuhal Onuk, Bo Yuan, Kevin Jones, Virpal, Ravi Chand Singh

Erschienen in: Journal of Materials Science | Ausgabe 14/2017

Einloggen

Aktivieren Sie unsere intelligente Suche, um passende Fachinhalte oder Patente zu finden.

search-config
loading …

Abstract

Influence of terbium (Tb) doping on structural, optical and morphological properties of radio frequency magnetron-sputtered ZnO films has been investigated using various characterization techniques. Investigations revealed the formation of hexagonal wurtzite structure of ZnO with preferential c-axis orientation, presence of oxygen vacancies, modification of surface morphology and surface roughness, and confirmation of oxidation states of elements present in ZnO and Tb-doped ZnO films. Subsequently, films deposited with varied Tb concentrations have been tested for ethanol vapor sensing. Doped films exhibited reduction in optimum operable temperature, enhancement in ethanol sensing response and improvement in response/recovery time in comparison with pristine ZnO. The observed improvement in doped samples has been attributed to modifications in surface properties such as morphology, surface roughness, basicity, structural disorder and oxygen vacancies introduced due to dopant incorporation.

Sie haben noch keine Lizenz? Dann Informieren Sie sich jetzt über unsere Produkte:

Springer Professional "Wirtschaft+Technik"

Online-Abonnement

Mit Springer Professional "Wirtschaft+Technik" erhalten Sie Zugriff auf:

  • über 102.000 Bücher
  • über 537 Zeitschriften

aus folgenden Fachgebieten:

  • Automobil + Motoren
  • Bauwesen + Immobilien
  • Business IT + Informatik
  • Elektrotechnik + Elektronik
  • Energie + Nachhaltigkeit
  • Finance + Banking
  • Management + Führung
  • Marketing + Vertrieb
  • Maschinenbau + Werkstoffe
  • Versicherung + Risiko

Jetzt Wissensvorsprung sichern!

Springer Professional "Technik"

Online-Abonnement

Mit Springer Professional "Technik" erhalten Sie Zugriff auf:

  • über 67.000 Bücher
  • über 390 Zeitschriften

aus folgenden Fachgebieten:

  • Automobil + Motoren
  • Bauwesen + Immobilien
  • Business IT + Informatik
  • Elektrotechnik + Elektronik
  • Energie + Nachhaltigkeit
  • Maschinenbau + Werkstoffe




 

Jetzt Wissensvorsprung sichern!

Anhänge
Nur mit Berechtigung zugänglich
Literatur
1.
Zurück zum Zitat Zhang SL, Lim JO, Huh JS, Lee W (2012) Selective growth of ZnO nanorods and its gas sensor application. IEEE Sens J 12:3143–3148CrossRef Zhang SL, Lim JO, Huh JS, Lee W (2012) Selective growth of ZnO nanorods and its gas sensor application. IEEE Sens J 12:3143–3148CrossRef
2.
Zurück zum Zitat Lupan O, Postica V, Grottrup J, Mishra AK, Leeuw NHD, Adelung R (2017) Enhanced UV and ethanol vapour sensing of the single 3-D ZnO tetrapod alloyed with Fe2O3 nanoparticles. Sens Actuators, B 245:448–461CrossRef Lupan O, Postica V, Grottrup J, Mishra AK, Leeuw NHD, Adelung R (2017) Enhanced UV and ethanol vapour sensing of the single 3-D ZnO tetrapod alloyed with Fe2O3 nanoparticles. Sens Actuators, B 245:448–461CrossRef
3.
Zurück zum Zitat Aswal DK, Gupta SK (2006) Science and technology of chemiresistor gas sensors. Nova Science Publishers, New York Aswal DK, Gupta SK (2006) Science and technology of chemiresistor gas sensors. Nova Science Publishers, New York
4.
Zurück zum Zitat Xu M, Li Q, Ma Y, Fan H (2014) Ni-doped ZnO nanorods gas sensor: enhanced gas-sensing properties, AC and DC electrical behaviours. Sens Actuators, B 199:403–409CrossRef Xu M, Li Q, Ma Y, Fan H (2014) Ni-doped ZnO nanorods gas sensor: enhanced gas-sensing properties, AC and DC electrical behaviours. Sens Actuators, B 199:403–409CrossRef
5.
Zurück zum Zitat Singh RC, Singh MP, Singh O, Chandi PS, Kumar R (2011) Effect of 100 MeV O 7 + ions irradiation on ethanol sensing response of nanostructures of ZnO and SnO2. Appl Phys A 98:161–166CrossRef Singh RC, Singh MP, Singh O, Chandi PS, Kumar R (2011) Effect of 100 MeV O 7 + ions irradiation on ethanol sensing response of nanostructures of ZnO and SnO2. Appl Phys A 98:161–166CrossRef
6.
Zurück zum Zitat Yoo R, Yoo S, Lee D, Kim J, Cho S, Lee W (2017) Highly selective detection of dimethyl methylphosphonate (DMMP) using CuO nanoparticles/ZnO flowers heterojunction. Sens Actuators, B 240:1099–1105CrossRef Yoo R, Yoo S, Lee D, Kim J, Cho S, Lee W (2017) Highly selective detection of dimethyl methylphosphonate (DMMP) using CuO nanoparticles/ZnO flowers heterojunction. Sens Actuators, B 240:1099–1105CrossRef
7.
Zurück zum Zitat Yoo R, Cho S, Song MJ, Lee W (2015) Highly sensitive gas sensor based on Al-doped ZnO nanoparticles for detection of dimethyl methylphosphonate as a chemical warfare agent simulant. Sens Actuators, B 221:217–223CrossRef Yoo R, Cho S, Song MJ, Lee W (2015) Highly sensitive gas sensor based on Al-doped ZnO nanoparticles for detection of dimethyl methylphosphonate as a chemical warfare agent simulant. Sens Actuators, B 221:217–223CrossRef
8.
Zurück zum Zitat Holken I, Neubuser G, Postica V, Bumke L, Lupan O, Baum M, Mishra YK, Kienle L, Adelung R (2016) Sacrificial template synthesis and properties of 3-D hollow-silicon nano- and microstructures. ACS Appl Mater Interfaces 8:20491–20498CrossRef Holken I, Neubuser G, Postica V, Bumke L, Lupan O, Baum M, Mishra YK, Kienle L, Adelung R (2016) Sacrificial template synthesis and properties of 3-D hollow-silicon nano- and microstructures. ACS Appl Mater Interfaces 8:20491–20498CrossRef
9.
Zurück zum Zitat Lupan O, Cretu V, Postica V, Ahmadi M, Cuenya BR, Chow L, Tiginyanu I, Viana B, Pauporte T, Adelung R (2016) Silver-doped zinc oxide single nanowire multifunctional nanosensor with a significant enhancement in response. Sens Actuators, B 223:893–903CrossRef Lupan O, Cretu V, Postica V, Ahmadi M, Cuenya BR, Chow L, Tiginyanu I, Viana B, Pauporte T, Adelung R (2016) Silver-doped zinc oxide single nanowire multifunctional nanosensor with a significant enhancement in response. Sens Actuators, B 223:893–903CrossRef
10.
Zurück zum Zitat Soleimanpour AM, Hou Y, Jayatissa AH (2011) The effect of UV irradiation on nanocrystalline zinc oxide thin films related to gas sensing characteristics. Appl Surf Sci 257:5398–5402CrossRef Soleimanpour AM, Hou Y, Jayatissa AH (2011) The effect of UV irradiation on nanocrystalline zinc oxide thin films related to gas sensing characteristics. Appl Surf Sci 257:5398–5402CrossRef
11.
Zurück zum Zitat Woo HS, Kwak CH, Chung JH, Lee JH (2015) Highly selective and sensitive xylene sensors using Ni-doped branched ZnO nanowire networks. Sens Actuators, B 216:358–366CrossRef Woo HS, Kwak CH, Chung JH, Lee JH (2015) Highly selective and sensitive xylene sensors using Ni-doped branched ZnO nanowire networks. Sens Actuators, B 216:358–366CrossRef
12.
Zurück zum Zitat Hastir A, Kohli N, Kang OS, Singh RC (2016) Selective liquefied petroleum gas sensor based on nanocomposites of zinc chromium oxide. J Electroceram 37:170–178CrossRef Hastir A, Kohli N, Kang OS, Singh RC (2016) Selective liquefied petroleum gas sensor based on nanocomposites of zinc chromium oxide. J Electroceram 37:170–178CrossRef
13.
Zurück zum Zitat Hjiri M, El Mir, Leonardi SG, Pistone A, Mavilia L, Neri G (2014) Al-doped ZnO for highly sensitive CO gas sensors. Sens Actuators, B 196:413–420CrossRef Hjiri M, El Mir, Leonardi SG, Pistone A, Mavilia L, Neri G (2014) Al-doped ZnO for highly sensitive CO gas sensors. Sens Actuators, B 196:413–420CrossRef
14.
Zurück zum Zitat Dar GN, Umar A, Zaidi SA, Ibrahim AA, Abaker M, Baskoutas S, Al-Assiri MS (2012) Ce-doped ZnO nanorods for the detection of hazardous chemical. Sens Actuators, B 173:72–78CrossRef Dar GN, Umar A, Zaidi SA, Ibrahim AA, Abaker M, Baskoutas S, Al-Assiri MS (2012) Ce-doped ZnO nanorods for the detection of hazardous chemical. Sens Actuators, B 173:72–78CrossRef
15.
Zurück zum Zitat Shide W, Chao L, Wei W, Huanxin W, Yangliang S, Youqi Z, Lingzhen L (2010) Nd-doped SnO2: characterization and its gas sensing property. J Rare Earths 28:171–173 Shide W, Chao L, Wei W, Huanxin W, Yangliang S, Youqi Z, Lingzhen L (2010) Nd-doped SnO2: characterization and its gas sensing property. J Rare Earths 28:171–173
16.
Zurück zum Zitat Matsuura M, Goto R, Tezuka N, Sugimoto S (2010) Influence of Nd oxide phase on the coercivity of Nd-Fe-B thin films. Mater Trans 51:1901–1904CrossRef Matsuura M, Goto R, Tezuka N, Sugimoto S (2010) Influence of Nd oxide phase on the coercivity of Nd-Fe-B thin films. Mater Trans 51:1901–1904CrossRef
17.
Zurück zum Zitat Singh S, Singh A, Yadav BC, Dwivedi PK (2013) Fabrication of nano-beads structured perovskite type neodymium iron oxide film: its structural, optical, electrical and LPG sensing investigations. Sens Actuators, B 177:730–739CrossRef Singh S, Singh A, Yadav BC, Dwivedi PK (2013) Fabrication of nano-beads structured perovskite type neodymium iron oxide film: its structural, optical, electrical and LPG sensing investigations. Sens Actuators, B 177:730–739CrossRef
18.
Zurück zum Zitat Tan TTY (2012) Rare earth nanotechnology. Taylor & Francis Group, LLC, LondonCrossRef Tan TTY (2012) Rare earth nanotechnology. Taylor & Francis Group, LLC, LondonCrossRef
19.
Zurück zum Zitat Hastir A, Kohli N, Singh RC (2017) Comparative study on gas sensing properties of rare earth (Tb, Dy and Er) doped ZnO sensor. J Phys Chem Solids 105:23–34CrossRef Hastir A, Kohli N, Singh RC (2017) Comparative study on gas sensing properties of rare earth (Tb, Dy and Er) doped ZnO sensor. J Phys Chem Solids 105:23–34CrossRef
20.
Zurück zum Zitat Yang L, Tang Y, Hu A, Chen X, Liang K, Zhang L (2008) Raman scattering and luminescence study on arrays of ZnO doped with Tb3+. Phys B 403:2230–2234CrossRef Yang L, Tang Y, Hu A, Chen X, Liang K, Zhang L (2008) Raman scattering and luminescence study on arrays of ZnO doped with Tb3+. Phys B 403:2230–2234CrossRef
21.
Zurück zum Zitat Hastir A, Kohli N, Singh RC (2016) Temperature dependent selective and sensitive terbium doped ZnO nanostructures. Sens Actuators, B 231:110–119CrossRef Hastir A, Kohli N, Singh RC (2016) Temperature dependent selective and sensitive terbium doped ZnO nanostructures. Sens Actuators, B 231:110–119CrossRef
22.
Zurück zum Zitat Mirzaei A, Janghorban K, Hashemi B, Bonyani M, Leonardi SG, Neri G (2016) Highly stable and selective ethanol sensor based on α-Fe2O3 nanoparticles prepared by Pechini sol–gel method. Ceram Int 42:6136–6144CrossRef Mirzaei A, Janghorban K, Hashemi B, Bonyani M, Leonardi SG, Neri G (2016) Highly stable and selective ethanol sensor based on α-Fe2O3 nanoparticles prepared by Pechini sol–gel method. Ceram Int 42:6136–6144CrossRef
24.
Zurück zum Zitat Maity A, Majumder SB (2015) NO2 sensing and selectivity characteristics of tungsten oxide thin films. Sens Actuators, B 206:423–429CrossRef Maity A, Majumder SB (2015) NO2 sensing and selectivity characteristics of tungsten oxide thin films. Sens Actuators, B 206:423–429CrossRef
25.
Zurück zum Zitat Nigro RL, Toro RG, Malandrino G, Fragala IL, Fiorenza P, Raineri V (2007) Chemical stability of CaCu3Ti4O12 thin films grown by MOCVD on different substrates. Thin Solid Films 515:6470–6473CrossRef Nigro RL, Toro RG, Malandrino G, Fragala IL, Fiorenza P, Raineri V (2007) Chemical stability of CaCu3Ti4O12 thin films grown by MOCVD on different substrates. Thin Solid Films 515:6470–6473CrossRef
26.
Zurück zum Zitat Park S, An S, Ko H, Jin C, Lee C (2013) Enhancement of ethanol sensing of TeO2 nanorods by Ag functionalization. Curr Appl Phys 13:576–580CrossRef Park S, An S, Ko H, Jin C, Lee C (2013) Enhancement of ethanol sensing of TeO2 nanorods by Ag functionalization. Curr Appl Phys 13:576–580CrossRef
27.
Zurück zum Zitat Bao L, Ryley J, Li Z, Wilker C, Zhang L, Reardon D, Opila RL (2009) Conduction mechanism of sputtered BaTiO3BaTi3 film on Ni substrate. J Appl Phys 106:114114CrossRef Bao L, Ryley J, Li Z, Wilker C, Zhang L, Reardon D, Opila RL (2009) Conduction mechanism of sputtered BaTiO3BaTi3 film on Ni substrate. J Appl Phys 106:114114CrossRef
29.
Zurück zum Zitat Singh O, Singh RC (2012) Enhancement in ethanol sensing response by surface activation of ZnO with SnO2. Mater Res Bull 47:557–561CrossRef Singh O, Singh RC (2012) Enhancement in ethanol sensing response by surface activation of ZnO with SnO2. Mater Res Bull 47:557–561CrossRef
30.
Zurück zum Zitat Phan TL, Yu SC, Vincent R, Bui HM, Thanh TD, Lam VD, Lee YP (2010) Influence of Mn doping on structural, optical, and magnetic properties of Zn1−x MnxO nanorods. J Appl Phys 108:044910CrossRef Phan TL, Yu SC, Vincent R, Bui HM, Thanh TD, Lam VD, Lee YP (2010) Influence of Mn doping on structural, optical, and magnetic properties of Zn1−x MnxO nanorods. J Appl Phys 108:044910CrossRef
31.
Zurück zum Zitat Muchuweni E, Sathiaraj TS, Nyakotyo H (2016) Effect of gallium doping on the structural, optical and electrical properties of zinc oxide thin films prepared by spray pyrolysis. Ceram Int 42:10066–10070CrossRef Muchuweni E, Sathiaraj TS, Nyakotyo H (2016) Effect of gallium doping on the structural, optical and electrical properties of zinc oxide thin films prepared by spray pyrolysis. Ceram Int 42:10066–10070CrossRef
32.
Zurück zum Zitat Lupan O, Postica V, Ababii N, Hoppe M, Cretu V, Tiginyanu I, Sontea V, Pauporte Th, Viana B, Adelung R (2016) Influence of CuO nanostructures morphology on hydrogen gas sensing performances. Microelectron Eng 164:63–70CrossRef Lupan O, Postica V, Ababii N, Hoppe M, Cretu V, Tiginyanu I, Sontea V, Pauporte Th, Viana B, Adelung R (2016) Influence of CuO nanostructures morphology on hydrogen gas sensing performances. Microelectron Eng 164:63–70CrossRef
33.
Zurück zum Zitat Mosquera E, Michea CR, Morela M, Gracia F, Fuenzalida V, Zarated RA (2015) Zinc oxide nanoparticles with incorporated silver: structural, morphological, optical and vibrational properties. Appl Surf Sci 347:561–568CrossRef Mosquera E, Michea CR, Morela M, Gracia F, Fuenzalida V, Zarated RA (2015) Zinc oxide nanoparticles with incorporated silver: structural, morphological, optical and vibrational properties. Appl Surf Sci 347:561–568CrossRef
34.
Zurück zum Zitat Teng XM, Fan HT, Pan SS, Ye C, Lia GH (2006) Influence of annealing on the structural and optical properties of ZnO: Tb thin films. J Appl Phys 100:053507CrossRef Teng XM, Fan HT, Pan SS, Ye C, Lia GH (2006) Influence of annealing on the structural and optical properties of ZnO: Tb thin films. J Appl Phys 100:053507CrossRef
35.
Zurück zum Zitat Mosquera E, Bernal J, Zarate RA, Mendoza F, Katiyar RS, Morell G (2013) Growth and electron field-emission of single-crystalline ZnO nanowires. Mater Lett 93:326–329CrossRef Mosquera E, Bernal J, Zarate RA, Mendoza F, Katiyar RS, Morell G (2013) Growth and electron field-emission of single-crystalline ZnO nanowires. Mater Lett 93:326–329CrossRef
36.
Zurück zum Zitat Shaabana ER, Yahiab IS, Metwallyc EGE (2012) Validity of Swanepoel’s method for calculating the optical constants of thick films. Acta Phys Pol, A 121:628CrossRef Shaabana ER, Yahiab IS, Metwallyc EGE (2012) Validity of Swanepoel’s method for calculating the optical constants of thick films. Acta Phys Pol, A 121:628CrossRef
37.
Zurück zum Zitat Dorranian D, Dejam L, Dorranian GM et al (2012) Optical characterization of Cu3N thin film with Swanepoel method. J Theor Appl Phys 6:13CrossRef Dorranian D, Dejam L, Dorranian GM et al (2012) Optical characterization of Cu3N thin film with Swanepoel method. J Theor Appl Phys 6:13CrossRef
38.
Zurück zum Zitat Khallaf H, Chai G, Lupan O, Heinrich H, Park S, Schulte A, Chow L (2009) Investigation of chemical bath deposition of ZnO thin films using six different complexing agents. J Phys D Appl Phys 42:135304CrossRef Khallaf H, Chai G, Lupan O, Heinrich H, Park S, Schulte A, Chow L (2009) Investigation of chemical bath deposition of ZnO thin films using six different complexing agents. J Phys D Appl Phys 42:135304CrossRef
39.
Zurück zum Zitat Bhargava R, Sharma PK, Kumar S, Pandey AC, Kumar N (2010) Consequence of doping mediated strain and the activation energy on the structural and optical properties of ZnO: Cr nanoparticles. J Solid State Chem 183:1400–1408CrossRef Bhargava R, Sharma PK, Kumar S, Pandey AC, Kumar N (2010) Consequence of doping mediated strain and the activation energy on the structural and optical properties of ZnO: Cr nanoparticles. J Solid State Chem 183:1400–1408CrossRef
40.
Zurück zum Zitat Pal PP, Manam J (2013) Photoluminescence and thermoluminescence studies of Tb3+ doped ZnO nanorods. Mater Sci Eng, B 178:400–408CrossRef Pal PP, Manam J (2013) Photoluminescence and thermoluminescence studies of Tb3+ doped ZnO nanorods. Mater Sci Eng, B 178:400–408CrossRef
41.
Zurück zum Zitat Pal SM, Bera S, Sarkar S, Sunirmal J (2014) Influence of Al doping on microstructural optical and photo-catalytic properties of sol–gel based nanostructured zinc oxide films on glass. RSC Adv 4:11552–11563CrossRef Pal SM, Bera S, Sarkar S, Sunirmal J (2014) Influence of Al doping on microstructural optical and photo-catalytic properties of sol–gel based nanostructured zinc oxide films on glass. RSC Adv 4:11552–11563CrossRef
42.
Zurück zum Zitat Bandopadhyay K, Mitra J (2015) Zn interstitials and O vacancies responsible for n-type ZnO: what do the emission spectra reveal? RSC Adv 5:23540–23547CrossRef Bandopadhyay K, Mitra J (2015) Zn interstitials and O vacancies responsible for n-type ZnO: what do the emission spectra reveal? RSC Adv 5:23540–23547CrossRef
43.
Zurück zum Zitat Moulder JF, Strickle WF, Sobol PE, Bomben KD (1995) Handbook of X-ray photoelectron spectroscopy. ULVAC-PHI, Inc., Chigasaki Moulder JF, Strickle WF, Sobol PE, Bomben KD (1995) Handbook of X-ray photoelectron spectroscopy. ULVAC-PHI, Inc., Chigasaki
44.
Zurück zum Zitat Kumar V, Som S, Kumar V, Kumar V, Ntwaeaborwa OM, Coetsee E, Swart HC (2014) Tunable and white emission from ZnO: Tb3+ nanophosphors for solid state lighting applications. Chem Eng J 255:541–552CrossRef Kumar V, Som S, Kumar V, Kumar V, Ntwaeaborwa OM, Coetsee E, Swart HC (2014) Tunable and white emission from ZnO: Tb3+ nanophosphors for solid state lighting applications. Chem Eng J 255:541–552CrossRef
45.
Zurück zum Zitat Chen M, Wang X, Yu YH, Pei ZL, Bai XD, Sun C, Huang RF, Wen LS (2000) X-ray photoelectron spectroscopy and auger electron spectroscopy studies of Al-doped ZnO films. Appl Surf Sci 158:134–140CrossRef Chen M, Wang X, Yu YH, Pei ZL, Bai XD, Sun C, Huang RF, Wen LS (2000) X-ray photoelectron spectroscopy and auger electron spectroscopy studies of Al-doped ZnO films. Appl Surf Sci 158:134–140CrossRef
46.
Zurück zum Zitat Kumar V, Kumar V, Som S, Duvenhage MM, Ntwaeaborwa OM, Swart HC (2014) Effect of Eu doping on the photoluminescence properties of ZnO nanophosphors for red emission applications. Appl Surf Sci 308:419–430CrossRef Kumar V, Kumar V, Som S, Duvenhage MM, Ntwaeaborwa OM, Swart HC (2014) Effect of Eu doping on the photoluminescence properties of ZnO nanophosphors for red emission applications. Appl Surf Sci 308:419–430CrossRef
47.
Zurück zum Zitat Kohli N, Singh O, Singh RC (2011) Influence of pH on particle size and sensing response of chemically synthesized chromium oxide nanoparticles to alcohols. Sens Actuators, B 158:259–264CrossRef Kohli N, Singh O, Singh RC (2011) Influence of pH on particle size and sensing response of chemically synthesized chromium oxide nanoparticles to alcohols. Sens Actuators, B 158:259–264CrossRef
48.
Zurück zum Zitat Mishra RK, Kushwaha A, Sahay PP (2014) Influence of Cu doping on the structural, photoluminescence and formaldehyde sensing properties of SnO2 nanoparticles. RSC Adv 4:3904–3912CrossRef Mishra RK, Kushwaha A, Sahay PP (2014) Influence of Cu doping on the structural, photoluminescence and formaldehyde sensing properties of SnO2 nanoparticles. RSC Adv 4:3904–3912CrossRef
49.
Zurück zum Zitat Zhang SL, Lim JO, Huh JS, Noh JS, Lee W (2013) Two-step fabrication of ZnO nanosheets for high-performance VOCs gas sensor. Curr Appl Phys 13:S156–S161CrossRef Zhang SL, Lim JO, Huh JS, Noh JS, Lee W (2013) Two-step fabrication of ZnO nanosheets for high-performance VOCs gas sensor. Curr Appl Phys 13:S156–S161CrossRef
50.
Zurück zum Zitat Postica V, Holken I, Schneider V, Kaidas V, Polonskyi O, Cretu V, Tiginyanu I, Faupel F, Adelung R, Lupan O (2016) Multifunctional device based on ZnO: Fe nanostructured films with enhanced UV and ultra-fast ethanol vapour sensing. Mater Sci Semicond Process 49:20–33CrossRef Postica V, Holken I, Schneider V, Kaidas V, Polonskyi O, Cretu V, Tiginyanu I, Faupel F, Adelung R, Lupan O (2016) Multifunctional device based on ZnO: Fe nanostructured films with enhanced UV and ultra-fast ethanol vapour sensing. Mater Sci Semicond Process 49:20–33CrossRef
51.
Zurück zum Zitat Chen J, Yan X, Liu W, Xue Q (2011) The ethanol sensing property of magnetron sputtered ZnO thin films modified by Ag ion implantation. Sens Actuators, B 160:1499–1503CrossRef Chen J, Yan X, Liu W, Xue Q (2011) The ethanol sensing property of magnetron sputtered ZnO thin films modified by Ag ion implantation. Sens Actuators, B 160:1499–1503CrossRef
52.
Zurück zum Zitat Zheng K, Gu L, Sun D, Mo XL, Chen G (2010) The properties of ethanol gas sensor based on Ti doped ZnO nanotetrapods. Mater Sci Eng, B 166:104–107CrossRef Zheng K, Gu L, Sun D, Mo XL, Chen G (2010) The properties of ethanol gas sensor based on Ti doped ZnO nanotetrapods. Mater Sci Eng, B 166:104–107CrossRef
53.
Zurück zum Zitat Chou SM, Teoh LG, Lai WH, Su YH, Hon MH (2006) ZnO: Al thin film gas sensor for detection of ethanol vapor. Sensors 6:1420–1427CrossRef Chou SM, Teoh LG, Lai WH, Su YH, Hon MH (2006) ZnO: Al thin film gas sensor for detection of ethanol vapor. Sensors 6:1420–1427CrossRef
54.
Zurück zum Zitat Kuo GH, Wang HP, Hsu HH, Wang J, Chiu YM, Jou CJG, Hsu TF, Chen FL (2009) Sensing of ethanol with nanosize Fe-ZnO thin films. J Nanomater. doi:10.1155/2009/316035 Kuo GH, Wang HP, Hsu HH, Wang J, Chiu YM, Jou CJG, Hsu TF, Chen FL (2009) Sensing of ethanol with nanosize Fe-ZnO thin films. J Nanomater. doi:10.​1155/​2009/​316035
55.
Zurück zum Zitat Hassan MM, Khan W, Naqvi AH, Mishra P, Islam SS (2014) Fe dopants enhancing ethanol sensitivity of ZnO thin film deposited by RF magnetron sputtering. J Mater Sci 49:6248–6256. doi:10.1007/s10853-014-8349-2 CrossRef Hassan MM, Khan W, Naqvi AH, Mishra P, Islam SS (2014) Fe dopants enhancing ethanol sensitivity of ZnO thin film deposited by RF magnetron sputtering. J Mater Sci 49:6248–6256. doi:10.​1007/​s10853-014-8349-2 CrossRef
56.
Zurück zum Zitat Rambu AP, Doroftei C, Ursu L, Iacomi F (2013) Structure and gas sensing properties of nanocrystalline Fe-doped ZnO films prepared by spin coating method. J Mater Sci 48:4305–4312. doi:10.1007/s10853-013-7245-5 CrossRef Rambu AP, Doroftei C, Ursu L, Iacomi F (2013) Structure and gas sensing properties of nanocrystalline Fe-doped ZnO films prepared by spin coating method. J Mater Sci 48:4305–4312. doi:10.​1007/​s10853-013-7245-5 CrossRef
57.
Zurück zum Zitat Sivalingam D, Gopalakrishnan JB, Rayappan JBB (2012) Structural, morphological, electrical and vapour sensing properties of Mn doped nanostructured ZnO thin films. Sens Actuators, B 166–167:624–631CrossRef Sivalingam D, Gopalakrishnan JB, Rayappan JBB (2012) Structural, morphological, electrical and vapour sensing properties of Mn doped nanostructured ZnO thin films. Sens Actuators, B 166–167:624–631CrossRef
58.
Zurück zum Zitat Tarwal NL, Rajgure AV, Patil JY, Khandekar MS, Suryavanshi SS, Patil PS, Gang MG, Kim JH, Jang JH (2013) A selective ethanol gas sensor based on spray-derived Ag–ZnO thin films. J Mater Sci 48:7274–7282. doi:10.1007/s10853-013-7547-7 CrossRef Tarwal NL, Rajgure AV, Patil JY, Khandekar MS, Suryavanshi SS, Patil PS, Gang MG, Kim JH, Jang JH (2013) A selective ethanol gas sensor based on spray-derived Ag–ZnO thin films. J Mater Sci 48:7274–7282. doi:10.​1007/​s10853-013-7547-7 CrossRef
59.
Zurück zum Zitat Stambolova I, Konstantinov K, Vassilev S, Peshev P, Tsacheva T (2000) Lanthanum doped SnO2 and ZnO thin films sensitive to ethanol and humidity. Mater Chem Phys 63:104–108CrossRef Stambolova I, Konstantinov K, Vassilev S, Peshev P, Tsacheva T (2000) Lanthanum doped SnO2 and ZnO thin films sensitive to ethanol and humidity. Mater Chem Phys 63:104–108CrossRef
60.
Zurück zum Zitat Cheong HW, Lee MJ (2006) Sensing characteristics and surface reaction mechanism of alcohol sensors based on doped SnO2. J Ceram Process Res 7:183–191 Cheong HW, Lee MJ (2006) Sensing characteristics and surface reaction mechanism of alcohol sensors based on doped SnO2. J Ceram Process Res 7:183–191
61.
Zurück zum Zitat Sharma RK, Bhatnagar MC, Sharma GL (1997) Mechanism of highly sensitive and fast response Cr doped TiO2 oxygen gas sensor. Sens Actuators, B 45:209–215CrossRef Sharma RK, Bhatnagar MC, Sharma GL (1997) Mechanism of highly sensitive and fast response Cr doped TiO2 oxygen gas sensor. Sens Actuators, B 45:209–215CrossRef
Metadaten
Titel
Deposition, characterization and gas sensors application of RF magnetron-sputtered terbium-doped ZnO films
verfasst von
Anita Hastir
Robert L. Opila
Nipin Kohli
Zuhal Onuk
Bo Yuan
Kevin Jones
Virpal
Ravi Chand Singh
Publikationsdatum
30.03.2017
Verlag
Springer US
Erschienen in
Journal of Materials Science / Ausgabe 14/2017
Print ISSN: 0022-2461
Elektronische ISSN: 1573-4803
DOI
https://doi.org/10.1007/s10853-017-1059-9

Weitere Artikel der Ausgabe 14/2017

Journal of Materials Science 14/2017 Zur Ausgabe

    Marktübersichten

    Die im Laufe eines Jahres in der „adhäsion“ veröffentlichten Marktübersichten helfen Anwendern verschiedenster Branchen, sich einen gezielten Überblick über Lieferantenangebote zu verschaffen.