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Erschienen in:
Introduction Kapitel lesen Erstes Kapitel lesen

2013 | OriginalPaper | Buchkapitel

6. Designs of Tuneable FBARs

verfasst von : Spartak Gevorgian, Alexander K. Tagantsev, Andrei Vorobiev

Erschienen in: Tuneable Film Bulk Acoustic Wave Resonators

Verlag: Springer London

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Abstract

In this chapter, the basic design features of intrinsically tuneable FBARs are considered focusing on the Bragg reflectors for the solidly mounted resonators. Effects of the electrodes and other layers on the tuneable performance of the FBARs including tuneability, Q-factor, and electromechanical coupling coefficient are also addressed.

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Vorheriges Kapitel FBARs Utilizing Induced Piezoelectric Effect
Nächstes Kapitel Fabrication Processes and Measurements
Fußnoten
1
In some cases, the film may be self aligned with spontaneous polarization normal to the plane of the film.
 
Literatur
Ancey P (2006) Above IC RF MEMS and BAW filters: fact or fiction. In Proceedings of IEEE BCTM, pp 186–190
Berge J, Gevorgian S (2011) Tuneable bulk acoustic wave resonators based on Ba0.25Sr0.75TiO3 thin films and a HfO2/SiO2 Bragg reflectors. IEEE Trans Ultrason Ferreoelectr Freq Control 58:2768–2771CrossRef
Berge J, Norling M, Vorobiev A, Gevorgian S (2008) Field and temperature dependent parameters of the dc field induced resonances in BaxSr1−xTiO3-based tuneable thin film bulk acoustic resonators. J Appl Phys 103:064508CrossRef
Enlund J, Katardjiev I, Martin DM (2005) Fabrication and evaluation of an “electrodeless” solidly mounted thin film electroacoustic resonator. In: Proceedings of IEEE Ultrasonics Symposium, 1837–1839
Enlund J, Martin DM, Yantchev V, Katardjiev I (2008) Solidly mounted thin film electro-acoustic resonator utilizing a conductive Bragg reflector. Sens Actuators: A Phys 141:598–602CrossRef
Gevorgian S, Vorobiev A (2010) Impact of the electrodes on the tuneability of paraelectric BST film based FBARs. In: Proceedings of EuMC, pp 1210–1213
Gevorgian S, Vorbiev A, Deleniv A (2009) Ferroelectrics in microwave devices, circuits and systems: physics, modelling, fabrication and measurements. Springer, LondonCrossRef
Ivan IA et al (2010) Comparative material study between PZT ceramic and newer crystalline PMN-PT and PZN-PT material for composite bimorph actuators. Rev Adv Mater Sci 24:1–9
Ivira B, Reinhardt A, Volatier A, Defay E, Aid M, Ansey P (2008) Tuneable/switchable thin film bulk acoustic wave (BAW) resonator using thin electrostrictive film under DC bias for GHz applications. In: Proceedings of second European conference and exhibition on integration issues of miniaturized systems—MOMS, MOEMS, ICS and electronic components (SSI), pp 1–8
Jose S, Jansman ABM, Hueting RJE, Senior Member, Schmitz J (2010) Optimized reflector stacks for solidly mounted bulk acoustic wave resonators. IEEE Trans Ultrason Ferroelectr Freq Control 57:2763CrossRef
Kaitila J, Ylilammi M, Ellä J, Aigner R (2003) Spurious resonance free bulk acoustic wave resonator. In: Proceedings of IEEE ultrasonic symposium, pp 84–87
Kim D-H, Yim M, Chai D, Park J-S, Yoon G (2004) Improved resonance characteristics by thermal annealing of W/SiO2 multi-layers in film bulk acoustic wave resonator devices. Jpn J Appl Phys 43:1545–1550CrossRef
Lee V, Sis SA, Zhu X, Mortazawi A (2010) Intrinsically switchable interdigitated barium titanate thin film contour mode resonators. In: Proceedings of IEEE IMS’2010, pp 1448–1451
Marksteiner S, Kaitila J, Fattinger GG, Aigner R (2005) Optimisation of acoustic mirrors for solidly mounted BAW resonators. In: Proceedings of IEEE ultrasonic symposium, pp 329–332
Mescher MJ, Reed ML, Schlesingermat TE (1997) Stress control in sputtered silicon Nitride films. Mat Res Soc Symp Proc 472:239–244CrossRef
Noeth A, Yamada T, Sherman VO, Muralt P (2007) Tuning of direct current bias-induced resonances in micromachined, Ba0.3Sr0.7TiO3 thin-film capacitors. J Appl Phys 102:114110CrossRef
Noeth A, Yamada T, Tagantsev AK, Setter N (2009) Effect of mechanical loading on the tuning of acoustic resonances in BaxSr1−xTiO3 thin films. J Electroceram 24:237–244CrossRef
Noeth A, Yamada T, Muralt P, Tagantsev AK (2010) Tuneable thin film bulk acoustic wave resonator based on BaxSr1−xTiO3 thin film. IEEE Trans Ultrason Ferroelectr Freq Control 57:379–385CrossRef
Norling M (2009) Piezoelectric and ferroelectric device technologies for microwave oscillators. Chalmers University of Technology, Gothenburg
Norling M, Vorobiev A, Jacobsson H, Gevorgian S (2007) A low-noise K-band VCO based on room- temperature ferroelectric varactors. IEEE Trans Microw Theory Tech 55:361–370CrossRef
Norling M, Enlund J, Katardjiev I, Gevorgian S (2008) Oscillators based on monolithically integrated AlN TFBARs. IEEE Trans Microw Theory Tech 56:3209–3216CrossRef
Ruby R, Larson J, Feng C, Fazzio S (2005) The effect of perimeter geometry on FBAR resonator electrical performance. IEEE Microw Symp Dig 4:217–220
Rundqvist P, Vorobiev A, Kollberg E, Gevorgian S (2006) Large signal circuit model of parallel-plate ferroelectric varactors. J Appl Phys 100:074101CrossRef
Saddik GN, Boesch DS, Stemmer S, York RA (2007) DC electric field tuneable bulk acoustic wave solidly mounted resonator, using SrTiO3. Appl Phys Lett 91:043501CrossRef
Saddik GN, Son J, Stemmer S, York RA (2011) Improvement of barium strontium titanate solidly mounted resonator quality factor by reduction in electrode surface roughness. J Appl Phys 109:091606CrossRef
Volatier A, Defaÿ E, N’hari A, Carpentier JF, Ancey Dubus PB (2006) Design, elaboration and characterization of coupled resonator filters for WCDMA applications. In: Proceedings of IEEE IMS’2006. pp 829–832
Vorobiev A, Gevorgian S (2010) Tuneable BaxSr1−xTiO3 FBARs based on SiO2/W Bragg reflectors. In: Proceedings of IEEE IMS’2010
Vorobiev A, Berge J, Norling M, Gevorgian S (2010) Silicon substrate integration of BST based tuneable TFBARs using all-dielectric SiO2/AlN Bragg reflectors. In: Proceedings of IEEE SiRF’2010
Vorobiev A, Gevorgian S, Löffler M, Olsson E (2011) Correlations between microstructure and Q-factor of tuneable thin film bulk acoustic wave resonators. J Appl Phys 110:054102CrossRef
Wei CL, Chen Y-C, Cheng C-C, Kao K-S (2008) Solidly mounted resonators consisting of a molybdenum and titanium Bragg reflector. Appl Phys A 90:501–506CrossRef
Zhu X, Phillips JD, Mortazawi A (2007) A DC voltage dependant switchable thin film bulk wave acoustic resonator using ferroelectric thin film. In: Proceedings of IEEE MTT-S’2007, pp 671–674
Zinck C, Defay E, Volatier A, Caruyer G, Tanon DP, Figuiere L (2004) Design, integration and characterization of PZT tuneable FBAR, 2004. In: Proceedings of IEEE international ultrasonics, ferroelectrics, and frequency control joint 50th anniversary conference, pp 29–32
Metadaten
Titel
Designs of Tuneable FBARs
verfasst von
Spartak Gevorgian
Alexander K. Tagantsev
Andrei Vorobiev
Copyright-Jahr
2013
Verlag
Springer London
Buch
Tuneable Film Bulk Acoustic Wave Resonators

Print ISBN: 978-1-4471-4943-9

Electronic ISBN: 978-1-4471-4944-6

Copyright-Jahr: 2013

DOI
https://doi.org/10.1007/978-1-4471-4944-6_6

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