Equal Radial Force Structure Pressure Sensor Data Analysis and Finite Element Analysis

As big data is very important today, we creative a force sensor with the AT-cut quartz crystal resonator and analyze the experimental data. Quartz crystal resonator has the characteristic that the resonance frequency changes by the external force, which has high precision, fast-speed response. Also it has the superior feature in the temperature and frequency stability. But it also has weakness, because of quartz crystal resonator has low degree of mechanical characteristic and weak to stress concentration by bending that the quartz crystal resonator had been hardly applied to the force measurement.The objective of this study is to construct the sensor mechanism that safely maintains the quartz crystal resonator for the external force with flat structure.We using finite element multiphysics simulation software designed and implemented an innovative structure-equal radial force structure, According to the measured data, applied load equivalent radial force structure between size and the frequency of the quartz monitor chip has a good linear relationship. The proposed force sensor is flat, small, and sensitive. It can be applied to several usages such as medical treatment and contact force detection of human.