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Erschienen in:
2013 | OriginalPaper | Buchkapitel
Exergy Analysis of Atomic Layer Deposition for Al2O3 Nano-film Preparation
verfasst von : Fenfen Wang, Tao Li, Hong-Chao Zhang, Chris Y. Yuan
Erschienen in: Re-engineering Manufacturing for Sustainability
Verlag: Springer Singapore
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In this paper exergy analysis is applied on Atomic Layer Deposition (ALD) of Al
2
O
3
thin film to analyze the utilization and losses of exergy in ALD system. The exergies associated with material flow, heat flow, and work flow are calculated. Based on the exergy balance equation, exergy loss is calculated for the ALD Al
2
O
3
process and then exergy efficiency is calculated with a value of 2.72×10
− 5
. According to the result it can be concluded that the utilization of exergy is extremely low in ALD Al
2
O
3
process. This research can be useful for future energy consumption and optimization of ALD system.