Formation of textured microstructure by mist deposition of TiO₂ nanoparticles

Unique and various textured TiO₂ films have been easily fabricated by mist deposition method on silicon and glass substrates with mild preparation conditions. Two kinds of TiO₂ nanoparticle with different shape, size, and crystal form were used as starting material, which resulted in a simple preparation process under low temperature and ordinary pressure. It was easy to control the thickness, morphology, and roughness of textured TiO₂ film by adjusting the mist deposition conditions such as deposition time, temperature, and the shape and size of nanoparticles. The optical properties of textured TiO₂ films before and after spin coating of Ag nanoparticles were investigated. The angular dependence of the reflectance was obviously reduced by textured TiO₂ surface and such effect was enhanced by Ag nanoparticles coating. A broad plasmon band of Ag grains was observed in the absorption spectrum of the textured Ag nanoparticle-coated TiO₂ film.