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Erschienen in:
2001 | OriginalPaper | Buchkapitel
Green’s Function Approach for Three-Dimensional Diffusion Simulation of Industrial High Voltage Applications
verfasst von : J. Cervenka, M. Knaipp, A. Hössinger, S. Selberherr
Erschienen in: Simulation of Semiconductor Processes and Devices 2001
Verlag: Springer Vienna
Enthalten in: Professional Book Archive
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In todays high voltage processes the optimization of process and layout design is a key point to get competitive products. Effects like punch-through between two junctions and breakdown near the surface of the wells make it necessary to analyze complex three-dimensional process steps by simulators which give accurate answers to the process engineers.