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Erschienen in:
2019 | OriginalPaper | Buchkapitel
In-Liquid Laser Nanomachining by Photonic Nanojet in Optical Tweezers Configuration
verfasst von : Reza Aulia Rahman, Tsutomu Uenohara, Yasuhiro Mizutani, Yasuhiro Takaya
Erschienen in: Proceedings of the 12th International Conference on Measurement and Quality Control - Cyber Physical Issue
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Abstract
Parallel direct laser machining in sub-micro scale patterning at a surface of material on a large scale remains a challenging task though the laser machining has been widely applied in various applications. A photonic nanojet comes up as a promising way to solve the problem by involving near-field focusing of light waves below the surface of an introduced microsphere to fabricate structures of micro- and nanometer size. By generating laser power, the workpiece is then modified only locally at the tip of photonic nanojet that has as small as 616 nm width which provide fine machining pattern. In order to control the position of microsphere in nanomachining process, optical tweezers is introduced to the optical system. An in-liquid processing nanomachining by generating photonic nanojet in optical tweezers configuration from a laser beam is then be a subject to study by controlling the parameters investigate the viability of machining process.