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Erschienen in:

2015 | OriginalPaper | Buchkapitel

1. Introduction

verfasst von : Arief Suriadi Budiman

Erschienen in: Probing Crystal Plasticity at the Nanoscales

Verlag: Springer Singapore

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Abstract

Small scale plasticity plays an important role in the modern electronics. The µSXRD technique offers the unique capability to study the plastic evolution of the grains in the interconnect lines during electromigration (in situ) at the submicron resolution. These experiments provide useful insights and may also provide important practical implications, as will be discussed in greater detail, for the fundamental understanding of the electromigration degradation mechanisms, as well as for the industry critical assessment methodologies of electromigration device lifetime. The technique can also be used to provide the key tool to probe the plastic behavior of the materials at small scales under the mechanical load. Understanding and controlling plasticity and the mechanical properties of materials on this scale could thus lead to new and more robust nanomechanical structures and devices.

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Titel: Introduction
verfasst von: Arief Suriadi Budiman
Verlag: Springer Singapore
Buch: Probing Crystal Plasticity at the Nanoscales
Print ISBN: 978-981-287-334-7

Electronic ISBN: 978-981-287-335-4

Copyright-Jahr: 2015
DOI: https://doi.org/10.1007/978-981-287-335-4_1

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