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Erschienen in:
01.05.2013
Fabrication and characterization of iron and fluorine co-doped BST thin films for microwave applications
Erschienen in: Journal of Materials Science | Ausgabe 9/2013
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Abstract
The effects of fluorine co-doping by means of a post-thermal annealing process of iron-doped BST thin films in a fluorine-containing atmosphere have been investigated. XPS and ToF-SIMS sputter depth profiling verified a homogeneous fluorine distribution in the thin films. By employing EPR, it was shown that singly charged (\( {\text{Fe}}_{\text{Ti}}^{\prime } \)–\( {\text{V}}_{\text{O}}^{ \cdot \cdot } \))· defect complexes, as well as ‘isolated’ \( {\text{Fe}}_{\text{Ti}}^{\prime } \) centres with a distribution of \( {\text{F}}_{\text{O}}^{ \cdot } \) sites in remote coordination spheres exist in the fluorinated films. Tunability enhancement due to fluorine co-doping as well as a Q-factor enhancement due to iron doping is demonstrated.