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2018 | OriginalPaper | Buchkapitel

Micro-Heater-Based Gas Sensors

verfasst von : Tie Li, Lei Xu, Yuelin Wang

Erschienen in: Micro Electro Mechanical Systems

Verlag: Springer Singapore

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Abstract

Microelectromechanical system (MEMS) technology has been promoting development of sensors. Micro-heaters, as typical MEMS devices, have been extensively researched for high-performance gas sensors in the past two decades. This chapter presents the design, fabrication, and characterization of micro-heaters with low power consumption, well-controlled temperature distribution, high mechanical strength, and long-term stability. Catalytic gas sensors and semiconductor gas sensors will be introduced with novel design and high performance. The goal of this chapter is to provide the reader with a general overview of micro-heaters and broader ways of designing better micro-heater-based gas sensors.

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Titel: Micro-Heater-Based Gas Sensors
verfasst von: Tie Li
Lei Xu
Yuelin Wang
Verlag: Springer Singapore
Buch: Micro Electro Mechanical Systems
Print ISBN: 978-981-10-5944-5

Electronic ISBN: 978-981-10-5945-2

Copyright-Jahr: 2018
DOI: https://doi.org/10.1007/978-981-10-5945-2_21

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