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Erschienen in: Journal of Materials Science 9/2016

08.02.2016 | Original Paper

Multilevel resistance state of Cu/La2O3/Pt forming-free switching devices

verfasst von: Pranab Kumar Sarkar, Manoj Prajapat, Arabinda Barman, Snigdha Bhattacharjee, Asim Roy

Erschienen in: Journal of Materials Science | Ausgabe 9/2016

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Abstract

An improved temperature dependent uniformity and reliability is investigated in La2O3/Pt-based memory devices with Cu top electrode. The microstructural investigation suggested the formation of polycrystalline La2O3 layer with stoichiometric chemical composition confirmed by X-ray photoelectron spectroscopy. Besides showing a forming-free resistive switching (RS) behaviour, the device also exhibited excellent multilevel capability with low switching voltage. A uniformity in the SET/RESET process was observed indicating enhanced switching stability. In addition, endurance with a high ON/OFF ratio of the order 103 and satisfactory data retention time over 104 s at 85 °C temperature confirmed the reliability of memory cells. Intrinsic tailoring of switching mechanism has been discussed in the framework of electric field-induced creation and annihilation of the reproducible Cu filaments in switching layer. The metallic nature of conducting filament has further been confirmed by temperature-dependent RS characterization.

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Literatur
1.
Zurück zum Zitat Waser R, Aono M (2007) Nanoionics-based resistive switching memories. Nat Mater 6:833–840CrossRef Waser R, Aono M (2007) Nanoionics-based resistive switching memories. Nat Mater 6:833–840CrossRef
2.
Zurück zum Zitat Wei Zhou L, Long Shao X, Yuan Li X et al (2015) Interface engineering for improving reliability of resistance switching in Cu/HfO2/TiO2/Pt structure. Appl Phys Lett 107:072901. doi:10.1063/1.4928710 CrossRef Wei Zhou L, Long Shao X, Yuan Li X et al (2015) Interface engineering for improving reliability of resistance switching in Cu/HfO2/TiO2/Pt structure. Appl Phys Lett 107:072901. doi:10.​1063/​1.​4928710 CrossRef
3.
Zurück zum Zitat Mandal S, El-Amin A, Alexander K, Rajendran B, Jha R (2014) Novel synaptic memory device for neuromorphic computing. Sci Rep. doi:10.1038/srep05333 Mandal S, El-Amin A, Alexander K, Rajendran B, Jha R (2014) Novel synaptic memory device for neuromorphic computing. Sci Rep. doi:10.​1038/​srep05333
4.
Zurück zum Zitat Sohn JI, Choi SS, Morris SM et al (2010) Novel nonvolatile memory with multibit storage based on a ZnO nanowire transistor. Nano Lett 10:4316–4320. doi:10.1021/nl1013713 CrossRef Sohn JI, Choi SS, Morris SM et al (2010) Novel nonvolatile memory with multibit storage based on a ZnO nanowire transistor. Nano Lett 10:4316–4320. doi:10.​1021/​nl1013713 CrossRef
5.
Zurück zum Zitat Miranda EA, Walczyk C, Wenger C, Schroeder T (2010) Model for the resistive switching effect in mim structures based on the transmission properties of narrow constrictions. IEEE Electron Device Lett 31:609–611. doi:10.1109/led.2010.2046310 CrossRef Miranda EA, Walczyk C, Wenger C, Schroeder T (2010) Model for the resistive switching effect in mim structures based on the transmission properties of narrow constrictions. IEEE Electron Device Lett 31:609–611. doi:10.​1109/​led.​2010.​2046310 CrossRef
6.
Zurück zum Zitat Yang YC, Pan F, Liu Q, Liu M, Zeng F (2009) Fully room-temperature-fabricated nonvolatile resistive memory for ultrafast and high-density memory application. Nano Lett 9:1636–1643. doi:10.1021/nl900006g CrossRef Yang YC, Pan F, Liu Q, Liu M, Zeng F (2009) Fully room-temperature-fabricated nonvolatile resistive memory for ultrafast and high-density memory application. Nano Lett 9:1636–1643. doi:10.​1021/​nl900006g CrossRef
8.
Zurück zum Zitat Mondal S, Chen H-Y, Her J-L, Ko F-H, Pan T-M (2012) Effect of Ti doping concentration on resistive switching behaviors of Yb2O3 memory cell. Appl Phys Lett 101:083506. doi:10.1063/1.4747695 CrossRef Mondal S, Chen H-Y, Her J-L, Ko F-H, Pan T-M (2012) Effect of Ti doping concentration on resistive switching behaviors of Yb2O3 memory cell. Appl Phys Lett 101:083506. doi:10.​1063/​1.​4747695 CrossRef
9.
10.
11.
Zurück zum Zitat Peng S, Zhuge F, Chen X et al (2012) Mechanism for resistive switching in an oxide-based electrochemical metallization memory. Appl Phys Lett 100:072101. doi:10.1063/1.3683523 CrossRef Peng S, Zhuge F, Chen X et al (2012) Mechanism for resistive switching in an oxide-based electrochemical metallization memory. Appl Phys Lett 100:072101. doi:10.​1063/​1.​3683523 CrossRef
12.
Zurück zum Zitat Yang Y, Gao P, Li L et al (2014) Electrochemical dynamics of nanoscale metallic inclusions in dielectrics. Nat Commun. doi:10.1038/ncomms5232 Yang Y, Gao P, Li L et al (2014) Electrochemical dynamics of nanoscale metallic inclusions in dielectrics. Nat Commun. doi:10.​1038/​ncomms5232
13.
Zurück zum Zitat Prakash A, Deleruyelle D, Song J, Bocquet M, Hwang H (2015) Resistance controllability and variability improvement in a TaOx-based resistive memory for multilevel storage application. Appl Phys Lett 106:233104. doi:10.1063/1.4922446 CrossRef Prakash A, Deleruyelle D, Song J, Bocquet M, Hwang H (2015) Resistance controllability and variability improvement in a TaOx-based resistive memory for multilevel storage application. Appl Phys Lett 106:233104. doi:10.​1063/​1.​4922446 CrossRef
14.
Zurück zum Zitat Tung-Ming P, Chih-Hung L, Mondal S, Fu-Hsiang K (2012) Resistive switching characteristics of Tm O, Yb O, and Lu O-based metal–insulator–metal memory devices. IEEE Trans Nanotechnol 11:1040–1046. doi:10.1109/TNANO.2012.2211893 CrossRef Tung-Ming P, Chih-Hung L, Mondal S, Fu-Hsiang K (2012) Resistive switching characteristics of Tm O, Yb O, and Lu O-based metal–insulator–metal memory devices. IEEE Trans Nanotechnol 11:1040–1046. doi:10.​1109/​TNANO.​2012.​2211893 CrossRef
16.
Zurück zum Zitat Pan T-M, Lu C-H (2011) Forming-free resistive switching behavior in Nd2O3, Dy2O3, and Er2O3 films fabricated in full room temperature. Appl Phys Lett 99:113509. doi:10.1063/1.3638490 CrossRef Pan T-M, Lu C-H (2011) Forming-free resistive switching behavior in Nd2O3, Dy2O3, and Er2O3 films fabricated in full room temperature. Appl Phys Lett 99:113509. doi:10.​1063/​1.​3638490 CrossRef
17.
Zurück zum Zitat Hajimiri H, Mishra P, Bhunia S, Long B, Yibo L, Jha R (2013) In: IEEE/ACM international symposium on nanoscale architectures (NANOARCH) Hajimiri H, Mishra P, Bhunia S, Long B, Yibo L, Jha R (2013) In: IEEE/ACM international symposium on nanoscale architectures (NANOARCH)
18.
Zurück zum Zitat Chen W, Lu W, Long B et al (2015) Switching characteristics of W/Zr/HfO2/TiN ReRAM devices for multi-level cell non-volatile memory applications. Semicond Sci Technol 30:075002CrossRef Chen W, Lu W, Long B et al (2015) Switching characteristics of W/Zr/HfO2/TiN ReRAM devices for multi-level cell non-volatile memory applications. Semicond Sci Technol 30:075002CrossRef
21.
Zurück zum Zitat Mondal S, Her J-L, Koyama K, Pan T-M (2014) Resistive switching behavior in Lu2O3 thin film for advanced flexible memory applications. Nanoscale Res Lett 9:1–8. doi:10.1186/1556-276X-9-3 CrossRef Mondal S, Her J-L, Koyama K, Pan T-M (2014) Resistive switching behavior in Lu2O3 thin film for advanced flexible memory applications. Nanoscale Res Lett 9:1–8. doi:10.​1186/​1556-276X-9-3 CrossRef
22.
Zurück zum Zitat Zhao Y (2012) Design of higher-k and more stable rare earth oxides as gate dielectrics for advanced CMOS devices. Materials 5:1413–1438CrossRef Zhao Y (2012) Design of higher-k and more stable rare earth oxides as gate dielectrics for advanced CMOS devices. Materials 5:1413–1438CrossRef
23.
Zurück zum Zitat Zhao H, Tu H, Wei F, Xiong Y, Zhang X, Du J (2013) Characteristics and mechanism of nano‐polycrystalline La2O3 thin‐film resistance switching memory. Phys Status Solidi 7:1005–1008. doi:10.1002/pssr.201308068 CrossRef Zhao H, Tu H, Wei F, Xiong Y, Zhang X, Du J (2013) Characteristics and mechanism of nano‐polycrystalline La2O3 thin‐film resistance switching memory. Phys Status Solidi 7:1005–1008. doi:10.​1002/​pssr.​201308068 CrossRef
24.
Zurück zum Zitat Sunding MF, Hadidi K, Diplas S, Løvvik OM, Norby TE, Gunnæs AE (2011) XPS characterisation of in situ treated lanthanum oxide and hydroxide using tailored charge referencing and peak fitting procedures. J Electron Spectrosc Relat Phenom 184:399–409. doi:10.1016/j.elspec.2011.04.002 CrossRef Sunding MF, Hadidi K, Diplas S, Løvvik OM, Norby TE, Gunnæs AE (2011) XPS characterisation of in situ treated lanthanum oxide and hydroxide using tailored charge referencing and peak fitting procedures. J Electron Spectrosc Relat Phenom 184:399–409. doi:10.​1016/​j.​elspec.​2011.​04.​002 CrossRef
25.
Zurück zum Zitat Chen L, Yang W, Li Y et al (2012) Resistive switching properties of plasma enhanced-ALD La2O3 for novel nonvolatile memory application. J Vac Sci Technol A30:01A148. doi:10.1116/1.3669516 Chen L, Yang W, Li Y et al (2012) Resistive switching properties of plasma enhanced-ALD La2O3 for novel nonvolatile memory application. J Vac Sci Technol A30:01A148. doi:10.​1116/​1.​3669516
27.
Zurück zum Zitat Liu D, Wang N, Wang G et al (2013) Nonvolatile bipolar resistive switching in amorphous Sr-doped LaMnO3 thin films deposited by radio frequency magnetron sputtering. Appl Phys Lett 102:134105. doi:10.1063/1.4800229 CrossRef Liu D, Wang N, Wang G et al (2013) Nonvolatile bipolar resistive switching in amorphous Sr-doped LaMnO3 thin films deposited by radio frequency magnetron sputtering. Appl Phys Lett 102:134105. doi:10.​1063/​1.​4800229 CrossRef
29.
31.
Zurück zum Zitat Sharma Y, Misra P, Katiyar RS (2014) Unipolar resistive switching behavior of amorphous YCrO3 films for nonvolatile memory applications. J Appl Phys 116:084505. doi:10.1063/1.4893661 CrossRef Sharma Y, Misra P, Katiyar RS (2014) Unipolar resistive switching behavior of amorphous YCrO3 films for nonvolatile memory applications. J Appl Phys 116:084505. doi:10.​1063/​1.​4893661 CrossRef
32.
Zurück zum Zitat Bid A, Bora A, Raychaudhuri AK (2006) Temperature dependence of the resistance of metallic nanowires of diameter ≥15 nm: applicability of Bloch-Grüneisen theorem. Phys Rev B 74:035426_1–035426_8 Bid A, Bora A, Raychaudhuri AK (2006) Temperature dependence of the resistance of metallic nanowires of diameter ≥15 nm: applicability of Bloch-Grüneisen theorem. Phys Rev B 74:035426_1–035426_8
34.
Zurück zum Zitat Nagata T, Haemori M, Yamashita Y et al (2011) Bias application hard x-ray photoelectron spectroscopy study of forming process of Cu/HfO2/Pt resistive random access memory structure. Appl Phys Lett 99:223517. doi:10.1063/1.3664781 CrossRef Nagata T, Haemori M, Yamashita Y et al (2011) Bias application hard x-ray photoelectron spectroscopy study of forming process of Cu/HfO2/Pt resistive random access memory structure. Appl Phys Lett 99:223517. doi:10.​1063/​1.​3664781 CrossRef
Metadaten
Titel
Multilevel resistance state of Cu/La2O3/Pt forming-free switching devices
verfasst von
Pranab Kumar Sarkar
Manoj Prajapat
Arabinda Barman
Snigdha Bhattacharjee
Asim Roy
Publikationsdatum
08.02.2016
Verlag
Springer US
Erschienen in
Journal of Materials Science / Ausgabe 9/2016
Print ISSN: 0022-2461
Elektronische ISSN: 1573-4803
DOI
https://doi.org/10.1007/s10853-016-9753-6

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