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2011 | OriginalPaper | Buchkapitel

8. Nanoindentation of Thin Films and Small Volumes of Materials

verfasst von : Anthony C. Fischer-Cripps

Erschienen in: Nanoindentation

Verlag: Springer New York

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Abstract

One of the most popular applications of nanoindentation is the determination of the mechanical properties of thin films. In nanoindentation tests, the properties of the film may be measured without removing the film from the substrate as is done in other types of testing. The spatial distribution of properties, in both lateral and depth dimensions, may be measured, and a wide variety of films are amenable to the technique, from ion-implanted surfaces to optical coatings and polymer films. Apart from testing films in-situ, nanoindentation techniques can also be used for films made as free-standing microbeams or membranes [1].

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Vorheriges Kapitel Time-dependent Nanoindentation

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Titel: Nanoindentation of Thin Films and Small Volumes of Materials
verfasst von: Anthony C. Fischer-Cripps
Verlag: Springer New York
Buch: Nanoindentation
Print ISBN: 978-1-4419-9871-2

Electronic ISBN: 978-1-4419-9872-9

Copyright-Jahr: 2011
DOI: https://doi.org/10.1007/978-1-4419-9872-9_8

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