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Erschienen in:
2008 | OriginalPaper | Buchkapitel
Nanostructuring and Nanobonding by EBiD
verfasst von : Thomas Wich
Erschienen in: Automated Nanohandling by Microrobots
Verlag: Springer London
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Since 1974, when Taniguchi coined the expression
nanotechnology
[1] as a description of manufacturing processes, a lot of different techniques for manufacturing on this small scale have been developed. Until that time, manufacturing processes on the micrometer scale used to be the limit. Conventional semiconductor-processing technologies are mostly limited by the achievable resolution in lithography. However, this resolution depends on the wavelength of light — or, in general, on electromagnetic waves. In order to process materials on the nanometer scale, it is either necessary to develop a new approach in materials structuring (often referred to as the bottom-up approach) or to extend the possibilities of common techniques, for example by using electromagnetic waves with considerably shorter wavelengths.