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Erschienen in:
Design, Development, Fabrication, Packaging, and Testing of MEMS Pressure Sensors for Aerospace Applications Kapitel lesen Erstes Kapitel lesen

2014 | OriginalPaper | Buchkapitel

Piezoceramic Coatings for MEMS and Structural Health Monitoring

verfasst von : Soma Dutta

Erschienen in: Micro and Smart Devices and Systems

Verlag: Springer India

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Abstract

The advent of smart materials has given a new dimension to the field of Materials Science, resulting in many significant application-oriented developments in all fields of engineering. Piezoelectric material is an important member of the smart material family. Bulk piezo sensors and actuators have been used widely for smart structure applications. The limitation in using piezoceramic material in its bulk form as sensors and actuators in real applications is due to its brittleness, nonconformability, high temperature processing, small area coverage, and associated ill effects of using an adhesive bond layer for attaching them. In situ piezo transducers, covering a large area, provide a very good solution circumventing aforementioned problems. The indigenous development of a smart and conformal piezoceramic coating with a low process temperature makes it suitable for Silicon batch processing not only for the fabrication of piezoceramic MEMS but also for the Nondestructive Evaluation (NDE) of metals and composites in guided wave-based real-time Structural Health Monitoring (SHM). This chapter presents the development of application-specific in situ piezoeceramic coating and the technical challenges therein.

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Vorheriges Kapitel Processing and Characterization of Shape Memory Films for Microactuators
Nächstes Kapitel Cost-Effective Processing of Polymers and Application to Devices
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Metadaten
Titel
Piezoceramic Coatings for MEMS and Structural Health Monitoring
verfasst von
Soma Dutta
Copyright-Jahr
2014
Verlag
Springer India
Buch
Micro and Smart Devices and Systems

Print ISBN: 978-81-322-1912-5

Electronic ISBN: 978-81-322-1913-2

Copyright-Jahr: 2014

DOI
https://doi.org/10.1007/978-81-322-1913-2_13

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