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Journal of Coatings Technology and Research

Erschienen in:

01.11.2010 | Brief Communication

Structural and mechanical investigations of magnetron sputtering TiO₂/Ti/TiN multilayer films on Si(100) substrate

verfasst von: Adele Carradò, Guy Schmerber, Hervè Pelletier

Erschienen in: Journal of Coatings Technology and Research | Ausgabe 6/2010

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Abstract

TiO₂/Ti/TiN multicompositional coating was prepared by DC reactive magnetron sputtering (MS) at a temperature of 150°C using a combination of a Ti metal target and a pure Ar, an Ar–O₂ mixture, or an Ar–N₂ mixture discharge gas, onto a Silicon(100) substrate. This system represents nano-structured multilayer substrate model for biomedical application as well as substrate models to reproduce the bulk titanium surface. This substrate model (Ti/TiN/Si(100)) makes possible and easy mechanical and microscopic characterization in particular for transmission electron microscopy after biocompatible test. The model multilayer TiO₂/Ti/TiN/(100) was obtained after preparation of two intermediate samples: TiN/Si(100) and Ti/TiN/Si(100). Structural (X-ray diffraction), morphological (scanning electron and atomic force microscopy) as well as mechanical (hardness and elastic modulus) studies of the MS films were performed.

Vorheriger Artikel The evaluation of nickel deposit obtained via Watts electrolyte at ambient temperature

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Titel: Structural and mechanical investigations of magnetron sputtering TiO2/Ti/TiN multilayer films on Si(100) substrate
verfasst von: Adele Carradò
Guy Schmerber
Hervè Pelletier
Publikationsdatum: 01.11.2010
Verlag: Springer US
Erschienen in: Journal of Coatings Technology and Research / Ausgabe 6/2010
Print ISSN: 1547-0091
Elektronische ISSN: 1935-3804
DOI: https://doi.org/10.1007/s11998-010-9287-9

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