2010 | OriginalPaper | Buchkapitel
Surface Integrity of Micro- and Nanomachined Surfaces
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Micro- and nanomachining processes are being developed that minimize the damage created due to the removal of materials at low and high material removal rates. In order to characterize the level of damage induced, the integrity of the workpiece surface requires to be measured. This chapter provides a state-of-the-art review of micro- and nanomachining and the measurement of surface integrity of micro- and nanomachined surfaces.