Synthesis of Nanostructured Composite Coatings in Arc Discharge Plasma

In this paper, we consider the results of the investigation of complex composition multilayer vacuum ion-plasma nanostructured coatings based on carbides and silicides of metals. The results of the studies of corrosion resistance, thermal stability, and heat resistance, as well as the results of tests on the microhardness of formed coatings, are presented. The developed technology for multilayer nanostructured vacuum ion-plasma coatings on the basis of titanium carbosilicides with improved performance characteristics is presented. It includes several stages: preliminary surface preparation before the process of coating synthesis, preliminary surface cleaning using a high-current diffusion discharge, surface cleaning with ions of the cathode material, synthesis of nanostructured coatings, with alternating thin layers of variable hardness and different composition and subsequent cooling with the possibility of heat treatment, for example, subsequent thermal annealing.