Temperature Controlled Chip Reactor for Rapid PCR

Micro system technology offers new possibilities in the realization of miniaturized chemical devices. A miniaturized thermocycler was developed using thermal simulation and micromachining for preparation of the silicon chip. This device integrates a sample chamber etched in single crystalline silicon, a thin film heater and thin film temperature sensors. An external circuit allows the fast and precise thermal control at high heating and cooling rates with small power consumtion. In this device PCR experiments were performed successfully.