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Erschienen in:
2006 | OriginalPaper | Buchkapitel
Thermal Management of RF Mems Relay Switch
verfasst von : R. J. Pryputniewicz
Erschienen in: Fracture of Nano and Engineering Materials and Structures
Verlag: Springer Netherlands
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Radio frequency (RF) switches are one of many MEMS devices that make it possible to communicate, sense, and measure while using minimal amount of space and very low power. The RF microswitches have either capacitive or resistive configuration. The capacitive switches use a flexible membrane design, in which capacitance between two electrodes is induced via electrical voltage; reaching threshold capacitance activates the switch, which enables transmission of a signal. The resistive switches, on the other hand, make direct metal to metal contact. Such design usually uses a cantilever beam that bends as voltage is applied to the two electrodes.