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Journal of Materials Science
Erschienen in: Journal of Materials Science 22/2017

24.07.2017 | Chemical routes to materials

Wet chemical etching of ZnO films using NH x -based (NH4)2CO3 and NH4OH alkaline solution

verfasst von: Jae-Kwan Kim, Ji-Myon Lee

Erschienen in: Journal of Materials Science | Ausgabe 22/2017

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Abstract

In this paper, we deposited ZnO thin films by RF magnetron sputtering at room temperature from un-doped targets. Wet chemical etching of ZnO films in (NH4)2CO3 and NH4OH solutions were examined. For comparison, hydrochloric acid was also used as an etchant. The NH x -based alkaline solutions provide well-controlled etching rate, and smooth surface and sidewall profiles. Although NH x -based alkaline solution etch rates for ZnO were relatively low, they were enhanced with the use of a H3O stabilizer. In this case, the NH4OH solution went from reaction-dominant mode to diffusion-dominant mode, which is beneficial for smooth surface morphology.
Vorheriger Artikel Characterizing the feasibility of processing wet granular materials to improve rheology for 3D printing
Nächster Artikel A bifunctional electrocatalyst of PtNi nanoparticles immobilized on three-dimensional carbon nanofiber mats for efficient and stable water splitting in both acid and basic media

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Literatur
1.
Bagnall DM, Chen YF, Zhu Z, Yao T, Koyama S, Shen MY, Goto T (1997) Optically pumped lasing of ZnO at room temperature. Appl Phys Lett 70:2230–2232CrossRef
2.
Tang ZK, Wong GKL, Yu M, Kawasaki M, Ohtomo A, Koinuma H, Segawa Y (1998) Room-temperature ultraviolet laser emission from self-assembled ZnO microcrystallite thin films. Appl Phys Lett 72:3270–3272CrossRef
3.
Look DC (2001) Recent advances in ZnO materials and devices. Mater Sci Eng B 80:383–387CrossRef
4.
Kohiki S, Nishitani M, Wada T (1994) Enhanced electrical conductivity of zinc oxide thin films by ion implantation of gallium, aluminum, and boron atoms. J Appl Phys 75:2069–2072CrossRef
5.
Ohta H, Kawamura K, Orita M, Hirano M, Sarukura N, Hosono H (2000) Current injection emission from a transparent p–n junction composed of p-SrCu2O2/n-ZnO. Appl Phys Lett 77:475–477CrossRef
6.
Yamamoto T, Yoshida HK (1999) Solution using a codoping method to unipolarity for the fabrication of p-type ZnO. Jpn J Appl Phys 38:L166CrossRef
7.
Joseph M, Tabata H, Kawai T (1999) p-type electrical conduction in ZnO thin films by Ga and N cooping. Jpn J Appl Phys 38:L1205CrossRef
8.
Segawa Y, Ohtomo A, Kawasaki M, Koinuma H, Tang ZK, Yu P, Wong GKL (1997) Growth of ZnO thin film by laser MBE: lasing of exciton at room temperature. Phys Stat Sol (b) 202:669–672CrossRef
9.
Özgür Ü, Alivov YI, Liu C, Teke A, Reshchikov MA, Dogan S, Avrutin V, Cho SJ, Morkoc H (2005) A comprehensive review of ZnO materials and devices. J Appl Phys 98:041301CrossRef
10.
Pearton SJ, Norton DP, Ip K, Heo YW, Steiner T (2005) Recent progress in processing and properties of ZnO. Prog Mater Sci 50:293–340CrossRef
11.
Özgür Ü, Hofstetter D, Morkoc H (2010) ZnO devices and applications: a review of current status and future prospects. Proc IEEE 98:1255–1268CrossRef
12.
Ito Y, Kushida K, Sugawara K, Takeuchi H (1995) A 100-MHz ultrasonic transducer array using ZnO thin films. IEEE Trans Ferroelectr Freq Control 42:316–324CrossRef
13.
Kluth O, Loffl A, Wieder S, Beneking C (1997) Texture etched Al-doped ZnO: a new material for enhanced light trapping in thin film solar cells. In: Proceedings of 26th photovoltaic specialists conference (PVSC). IEEE, pp 715–718
14.
Hickemell FS (1992) The etched surface of sputtered zinc oxide and its relationship to fractal growth and surface wave properties. In: Proceedings of ultrasonics symposium, 1992. IEEE, pp 373–376
15.
Lou KC, Zhu X, Lakdawala H, Kim ES (1997) Study on etch front of piezoelectric ZnO film and new step coverage technique. In: Proceedings of ultrasonics symposium, 1997. IEEE, pp 565–568
16.
Chang SC, Hicks DB, Laugal RCO (1992) Patterning of zinc oxide thin films. In: Solid-state sensor and actuator workshop. Technical digest. IEEE, pp 41–45
17.
Maki H, Ikoma T, Sakaguchi I, Ohashi N, Haneda H, Tanaka J, Ichinose N (2002) Control of surface morphology of ZnO (0001) by hydrochloric acid etching. Thin Solid Films 411:91–95CrossRef
18.
Warekois EP, Lavine MC, Marino AN, Gatos HC (1962) Crystallographic polarity in the II–VI compounds. J Appl Phys 33:690–696CrossRef
19.
Takahashi K, Funakubo H, Ohashi N, Haneda H (2005) Micro-patterning of ZnO single crystal surface by anisotropic wet-chemical etching. Thin Solid Films 486:42–45CrossRef
20.
Ohashi N, Takahashi K, Hishita S, Sakaguchi I, Funakubo H, Haneda H (2007) Fabrication of ZnO microstructures by anisotropic wet-chemical etching. J Electrochem Soc 154:82–87CrossRef
21.
Vellekoop MJ, Visser CCO, Sarro PM, Venema A (1990) Compatibility of zinc oxide with silicon IC processing. Sens Actuators 23:1027–1030CrossRef
22.
Zhu J, Emanetoglu NW, Chen Y, Yakshinskiy BV, Lu Y (2004) Wet-chemical etching of (11–20) ZnO films. J Electron Mater 33:556–559CrossRef
23.
Lee JM, Kim KK, Hyun CK, Tampo H, Niki S (2006) Microstructural evolution of ZnO by wet-etching using acidic solutions. J Nanosci Nanotechnol 6:3364–3368CrossRef
24.
Pearton SJ, Norton DP, Ip K, Heo YW, Steiner T (2004) Recent advances in processing of ZnO. J Vac Sci Technol B 22:932–948CrossRef
25.
Yoo DG, Nam SH, Kim MH, Jeong SH, Lee HG, Lee HJ, Lee NE, Hong BY, Kim YJ, Jung D, Boo JH (2008) Fabrication of the ZnO thin films using wet-chemical etching processes on application for organic light emitting diode (OLED) devices. Surf Coat Technol 202:5476–5479CrossRef
26.
Han SC, Kim JK, Kim JY, Kim KK, Tampo H, Niki S, Lee JM (2010) Formation of hexagonal pyramids and pits on V-/VI-polar and III-/II-polar GaN/ZnO surfaces by wet etching. J Electrochem Soc 157:60–64CrossRef
27.
Lim W, Craciun V, Siebein K, Gila BP, Norton DP, Pearton SJ, Ren F (2008) Surface and bulk thermal annealing effects on ZnO crystals. Appl Surf Sci 254:2396–2400CrossRef
28.
Xing GZ, Yao B, Cong CX, Yang T, Xie YP, Li BH, Shen DZ (2008) Effect of annealing on conductivity behavior of undoped zinc oxide prepared by rf magnetron sputtering. J Alloy Compd 457:36–41CrossRef
29.
Oh BY, Jeong MC, Kim DS, Lee W, Myoung JM (2005) Post-annealing of Al-doped ZnO films in hydrogen atmosphere. J Cryst Growth 281:475–480CrossRef
30.
Chopra KL, Major S, Pandya DK (1983) Transparent conductors—a status review. Thin Solid Films 102:1–46CrossRef
31.
Fujimura N, Nishihara T, Goto S, Xu J, Ito T (1993) Control of preferred orientation for ZnO x films: control of self-texture. J Cryst Growth 130:269–279CrossRef
32.
Nandi SK, Chakraborty S, Bera MK, Maiti CK (2007) Structural and optical properties of ZnO films grown on silicon and their applications in MOS devices in conjunction with ZrO2 as a gate dielectric. Bull Mater Sci 30:247–254CrossRef
33.
Barna PB, Adamik M (1998) Fundamental structure forming phenomena of polycrystalline films and the structure zone models. Thin Solid Films 317:27–33CrossRef
34.
Sagalowicz L, Fox GR (1999) Planar defects in ZnO thin films deposited on optical fibers and flat substrates. J Mater Res 14:1876–1885CrossRef
35.
Sanon G, Rup R, Mansingh A (1990) Growth and characterization of tin oxide films prepared by chemical vapour deposition. Thin Solid Films 190:287–301CrossRef
36.
Khomyak VV, Slyotov MM, Shtepliuk II, Lashkarev GV, Slyotov OM, Marianchuk PD, Kosolovskiy VV (2013) Annealing effect on the near-band edge emission of ZnO. J Phys Chem Solids 74:291–297CrossRef
37.
Ansari SA, Khan MM, Kalathil S, Nisar A, Lee J, Cho MM (2013) Oxygen vacancy induced band gap narrowing of ZnO nanostructures by an electrochemically active biofilm. Nanoscale 5:9238–9246CrossRef
38.
Li CC, Du ZF, Li LM, Yu HC, Wan Q, Wang TH (2007) Surface-depletion controlled gas sensing of ZnO nanorods grown at room temperature. Appl Phys Lett 91:032101CrossRef
39.
Chen M, Wang X, Yu YH, Pei ZL, Bai XD, Sun C, Huang RF, Wen LS (2008) X-ray photoelectron spectroscopy and auger electron spectroscopy studies of Al-doped ZnO films. Appl Surf Sci 158:134CrossRef
40.
Kim YS, Tai WP, Shu SJ (2005) Effect of preheating temperature on structural and optical properties of ZnO thin films by sol–gel process. Thin Solid Films 491:153–160CrossRef
41.
Yang X, Wolcott A, Wang G, Sobo A, Fitzmorris RC, Qian F, Zhang JZ, Li Y (2009) Nitrogen-doped ZnO nanowire arrays for photoelectrochemical water splitting. Nano Lett 9:2331–2336CrossRef
42.
Chen LC, Tu YJ, Wang YS, Kan RS, Huang CM (2008) Characterization and photoreactivity of N-S-, and C-doped ZnO under UV and visible light illumination. J Photochem Photobiol A Chem 199:170–178CrossRef
43.
Moulder JF, Stickle WF, Sobol PE, Bomben KD (1992) Handbook of X-ray Photoelectron Spectroscopy. Perkin-Elmer Corporation, Eden Prairie
44.
Fuggle JC, Menzel D (1979) XPS, UPS and XAES studies of the adsorption of nitrogen, oxygen, and nitrogen oxides on W(110) at 300 and 100 K: I. Adsorption of N2, N2O and NO2N2O4. Surf Sci 79:1–25CrossRef
45.
Owen JI, Zhang W, Köhl D, Hüpkes J (2012) Study on the in-line sputtering growth and structural properties of polycrystalline ZnO: Al on ZnO and glass. J Cryst Growth 344:12–18CrossRef
46.
Windischmann H (1992) Intrinsic stress in sputter-deposited thin films. Crit Rev Solid State Mater Sci 17:547–596CrossRef
47.
Han MY, Jou JH (1995) Determination of the mechanical properties of rf-magnetron sputtered zinc oxide thin films on substrates. Thin Solid Films 260:58–64CrossRef
48.
Ohya Y, Saiki H, Tanaka T, Takahashi Y (1996) Microstructure of TiO2 and ZnO films fabricated by the sol–gel method. J Am Ceram Soc 79:825–830CrossRef
Metadaten
Titel
Wet chemical etching of ZnO films using NH x -based (NH4)2CO3 and NH4OH alkaline solution
verfasst von
Jae-Kwan Kim
Ji-Myon Lee
Publikationsdatum
24.07.2017
Verlag
Springer US
Erschienen in
Journal of Materials Science / Ausgabe 22/2017
Print ISSN: 0022-2461
Elektronische ISSN: 1573-4803
DOI
https://doi.org/10.1007/s10853-017-1409-7

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