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Journal of Materials Science: Materials in Electronics
Erschienen in: Journal of Materials Science: Materials in Electronics 15/2017

21.04.2017

A new technique for transparent solid state Li3PO4 electrolyte layer growth: thermionic vacuum arc technique

verfasst von: Soner Özen, Şadan Korkmaz, Suat Pat, H. Hakan Yudar

Erschienen in: Journal of Materials Science: Materials in Electronics | Ausgabe 15/2017

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Abstract

In this research, a Li3PO4 electrolyte thin film was deposited on glass substrate under high vacuum condition by means of the thermionic vacuum arc (TVA) method. A new deposition mechanism for solid-state battery applications is presented. The physical properties of the produced sample were analyzed with X-ray diffraction device, spectrophotometer, interferometer, scanning electron microscope, and atomic force microscope. In order to understand the surface features of the thin film, AFM analysis was carried out by non-contact mode at ambient condition. The formation of microstructures were monitored clearly by the AFM device. The UV–Vis spectrophotometer result showed that produced film has a high transmittance in the visible region and near infrared region.
Vorheriger Artikel Embedded nonlinear passive components on flexible substrates for microelectronics applications
Nächster Artikel Erratum to: Synthesis of AgO–TiO2 nanocomposite through a simple method and its antibacterial activities

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Metadaten
Titel
A new technique for transparent solid state Li3PO4 electrolyte layer growth: thermionic vacuum arc technique
verfasst von
Soner Özen
Şadan Korkmaz
Suat Pat
H. Hakan Yudar
Publikationsdatum
21.04.2017
Verlag
Springer US
Erschienen in
Journal of Materials Science: Materials in Electronics / Ausgabe 15/2017
Print ISSN: 0957-4522
Elektronische ISSN: 1573-482X
DOI
https://doi.org/10.1007/s10854-017-6955-x

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