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Journal of Materials Science: Materials in Electronics

Erschienen in:

16.07.2018

Acetic acid sensing of Mg-doped ZnO thin films fabricated by the sol–gel method

verfasst von: Vahid Khorramshahi, Javad Karamdel, Ramin Yousefi

Erschienen in: Journal of Materials Science: Materials in Electronics | Ausgabe 17/2018

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Abstract

Acetic acid vapor thin film gas sensor was developed by synthesizing Mg-doped ZnO nanoparticles using a low cost and facile sol–gel route and were characterized using field emission scanning electron microscopy, transmission electron microscopy, X-ray diffraction, Fourier transform infrared spectroscopy and photoluminescence analysis. Morphological characterizations showed the formation of well-defined and highly crystalline ZnO nanoparticles on Si(100)/SiO₂ substrate. Gas sensing characterization of dip coated Mg-doped ZnO thin films were performed in temperature range of 150–400 °C at different acetic acid vapor concentrations. At 300 °C, the sensitivity for pure ZnO, Zn_0.98Mg_0.02O and Zn_0.94Mg_0.06O samples at concentration of 200 ppm of acetic acid were 124, 78 and 67%, respectively. The highest sensitivity for Zn_0.96Mg_0.04O sample was 136% at the same vapor concentration and temperature. It showed a fast response time and recovery time (145 and 110 s, respectively).

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Titel: Acetic acid sensing of Mg-doped ZnO thin films fabricated by the sol–gel method
verfasst von: Vahid Khorramshahi
Javad Karamdel
Ramin Yousefi
Publikationsdatum: 16.07.2018
Verlag: Springer US
Erschienen in: Journal of Materials Science: Materials in Electronics / Ausgabe 17/2018
Print ISSN: 0957-4522
Elektronische ISSN: 1573-482X
DOI: https://doi.org/10.1007/s10854-018-9604-0

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