An evolutionary algorithm for design optimization of microsystems

The concept of an evolutionary algorithm for improving the design optimization process is presented. A first application, the design optimization of a micropump, is used for both, the description of the concept being especially tailored for multicriteria applications and the presentation of very promising results.The behavior of the micropump is formulated as an analog model including the various domains as there are electrical, thermal, and pneumatic phenomena. The parameters of this model are modified with the proposed evolutionary algorithm until a satisfactory behavior of the system is reached. The quality of the optimization depends highly on the quality of the simulation model at hand, therefore we give in addition an outlook of an evolutionary algorithm for improving the analog simulation model by using FEM results.