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Erschienen in:
Experience from the Development of a Silicon-Based MEMS Six-DOF Force–Torque Sensor Kapitel lesen Erstes Kapitel lesen

2013 | OriginalPaper | Buchkapitel

3. Autocalibration of MEMS Accelerometers

verfasst von : Iuri Frosio, Federico Pedersini, N. Alberto Borghese

Erschienen in: Advanced Mechatronics and MEMS Devices

Verlag: Springer New York

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Abstract

In this chapter, we analyze the critical aspects of the widely diffused calibration and autocalibration procedures for MEMS accelerometers. After providing a review of the main applications of this kind of sensors, we introduce the different sensor models proposed in literature, highlighting the role of the axis misalignments in the sensor sensitivity matrix. We derive a principled noise model and discuss how noise affects the norm of the measured acceleration vector. Since autocalibration procedures are based on the assumption that the norm of the measured acceleration vector, in static condition, equals the gravity acceleration, we introduce the international gravity formula, which provides a reliable estimate of the gravity acceleration as a function of the local latitude and altitude. We derive then the autocalibration procedure in the context of maximum likelihood estimate and we provide examples of calibrations. For each calibrated sensor, we also illustrate how to derive the accuracy on the estimated parameters through the covariance analysis and how to compute the angles between the sensing axes of the sensor. In the conclusion, we summarize the main aspects involved in the autocalibration of MEMS accelerometers.

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Vorheriges Kapitel Piezoelectrically Actuated Robotic End-Effector with Strain Amplification Mechanisms
Nächstes Kapitel Miniaturization of Micromanipulation Tools
Fußnoten
1
Each component of a′ represents the projection of the local acceleration vector onto one of the sensing axes of the sensor; these are not necessarily orthogonal to each other.
 
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Metadaten
Titel
Autocalibration of MEMS Accelerometers
verfasst von
Iuri Frosio
Federico Pedersini
N. Alberto Borghese
Copyright-Jahr
2013
Verlag
Springer New York
Buch
Advanced Mechatronics and MEMS Devices

Print ISBN: 978-1-4419-9984-9

Electronic ISBN: 978-1-4419-9985-6

Copyright-Jahr: 2013

DOI
https://doi.org/10.1007/978-1-4419-9985-6_3

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