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Chinese Journal of Mechanical Engineering
Erschienen in: Chinese Journal of Mechanical Engineering 2/2017

17.03.2017 | Review

Ball Tips of Micro/Nano Probing Systems: A Review

verfasst von: Ruijun LI, Chen CHEN, Dandong LI, Kuang-Chao FAN, Zhenying CHENG, Qiangxian HUANG, Xueming DANG

Erschienen in: Chinese Journal of Mechanical Engineering | Ausgabe 2/2017

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Abstract

To satisfy the measuring demands for the micro components of the industry, micro/nano probing systems with various ball tips have been developed. However, most of them cannot be used to measure the real micro geometrical features high precisely because the parameters of the ball tips are not appropriate. The ball tips with a diameter of less than 100 µm, a sphericity and eccentricity of far less than 1 µm are required urgently. A review on the state-of-the-art of ball tips of micro/nano probing systems is presented. The material characteristics and geometric parameters of now available ball tips are introduced separately. The existing fabrication methods for the ball tips are demonstrated and summarized. The ball tips’ future trends, which are smaller diameter, better sphericity and smaller eccentricity, are proposed in view of the practical requirements of high-precision measurement for micro geometrical features. Some challenges have to be faced in future, such as the promotion and high-precision measurement for the small ball tip’s sphericity and eccentricity. Fusion method without the gravity effect when the molten ball tip solidifying is a more suitable way to fabricate a small diameter ball tip together with a shaft.
Vorheriger Artikel New Family of RPR-Equivalent Parallel Mechanisms: Design and Application
Nächster Artikel Present Situation of the Anti-Fatigue Processing of High-Strength Steel Internal Thread Based on Cold Extrusion Technology: A Review

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Metadaten
Titel
Ball Tips of Micro/Nano Probing Systems: A Review
verfasst von
Ruijun LI
Chen CHEN
Dandong LI
Kuang-Chao FAN
Zhenying CHENG
Qiangxian HUANG
Xueming DANG
Publikationsdatum
17.03.2017
Verlag
Chinese Mechanical Engineering Society
Erschienen in
Chinese Journal of Mechanical Engineering / Ausgabe 2/2017
Print ISSN: 1000-9345
Elektronische ISSN: 2192-8258
DOI
https://doi.org/10.1007/s10033-017-0082-8

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