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Journal of Nanoparticle Research
Erschienen in: Journal of Nanoparticle Research 12/2015

01.12.2015 | Research Paper

Dependence of Ba(Zr0.15Ti0.85)O3 films growth on substrate temperature and oxygen gas pressure prepared by pulsed laser deposition

verfasst von: M. L. V. Mahesh, A. R. James

Erschienen in: Journal of Nanoparticle Research | Ausgabe 12/2015

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Abstract

Ferroelectric Ba(Zr0.15Ti0.85)O3 (BZT) thin films were deposited on Pt/Ti/SiO2/Si <111> substrates using Pulsed Laser Deposition technique. The effect of processing parameters such as substrate temperature and oxygen gas pressure on the structural properties of the films was analyzed. The experimental results showed that the films deposited at substrate temperature ≥600 °C, exhibited crystalline nature corresponding to perovskite phase structure. The mechanism explaining the dependence of the crystallinity of the BZT films on the substrate temperature is discussed. AFM data show the dependence of grain growth on oxygen partial pressure of the BZT thin films. The films deposited at 200 mT were found to have an average grain size of about 40 nm. The results were found to be in accordance with SEM analysis. Raman scattering spectral data were used to characterize the phonon modes of the BZT films at room temperature. Raman studies reveal the occurrence of multiple phases corresponding to the pinched-phase transition, reported to be possessed by the composition under study.
Vorheriger Artikel Investigation of selective etching mechanism and its dependency on the particle size in preparation of hollow silica spheres
Nächster Artikel Daylight-driven photocatalytic degradation of ionic dyes with negatively surface-charged In2S3 nanoflowers: dye charge-dependent roles of reactive species

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Metadaten
Titel
Dependence of Ba(Zr0.15Ti0.85)O3 films growth on substrate temperature and oxygen gas pressure prepared by pulsed laser deposition
verfasst von
M. L. V. Mahesh
A. R. James
Publikationsdatum
01.12.2015
Verlag
Springer Netherlands
Erschienen in
Journal of Nanoparticle Research / Ausgabe 12/2015
Print ISSN: 1388-0764
Elektronische ISSN: 1572-896X
DOI
https://doi.org/10.1007/s11051-015-3292-y

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