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Erschienen in:
Free Vibration of Compliant Mechanisms Based on Euler-Bernoulli-Beams Kapitel lesen Erstes Kapitel lesen

2023 | OriginalPaper | Buchkapitel

Design and Analysis of Single Drive Tri-Axis MEMS Gyroscope

verfasst von : Pradnya Chabbi, Anant Khedkar, Venkatesh K. P. Rao

Erschienen in: Microactuators, Microsensors and Micromechanisms

Verlag: Springer International Publishing

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Abstract

MEMS based single and dual-axis gyroscopes have been widely explored for potential application in automotive, space, defense, and consumer electronics sectors. Tri-axis gyroscopes based on MEMS, however, have been sparsely studied. This work presents a novel design for tri-axis MEMS gyroscope and an analytical model to obtain the natural frequencies in drive and sense modes. These frequency values have been compared with the numerically obtained frequencies using Finite Element Analysis (FEA). The analytical results lie within 10% of their numerically obtained values. The frequency matching process involves many iterations of geometric dimensions if the end application requires minor design changes. The proposed analytical model will make the design customization easy as the frequencies of each mode will be expressed as a function of critical geometrical parameters saving multiple numerical runs required for design optimization.

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Vorheriges Kapitel Parametric Tuning of Natural Frequencies of Tuning Fork Gyroscope
Nächstes Kapitel Analysis of the Equilibrium of a Magnetic Contactless Suspension
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Metadaten
Titel
Design and Analysis of Single Drive Tri-Axis MEMS Gyroscope
verfasst von
Pradnya Chabbi
Anant Khedkar
Venkatesh K. P. Rao
Copyright-Jahr
2023
Buch
Microactuators, Microsensors and Micromechanisms

Print ISBN: 978-3-031-20352-7

Electronic ISBN: 978-3-031-20353-4

Copyright-Jahr: 2023

DOI
https://doi.org/10.1007/978-3-031-20353-4_13

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