Design principle of micro-mechanical probe for lateral-deflection-controlled friction force microscopy

Design principles of lateral-deflection-controlled friction force microscopy (FFM) are presented. Lateral-deflection-controlled FFM can overcome a fundamental problem of dual-axis FFM and can provide higher lateral resolution by compensating for friction force and providing effectively high rigidity to the probe. In this paper, key micro components are investigated: micro structures for detection of lateral probe deflection and for lateral drive of the probe. The micro structure for deflection detection is fabricated at the end of the probe and is used in combination with an optical lever method. The micro structure that reflects light (positive type) can provide higher sensitivity than a conventional structure that does not reflect light (negative type). For the probe lateral drive, a micro conduction structure that connects the probe with a support beam is used. A micro electrical conduction structure using stiction is introduced, and its feasibility is experimentally confirmed. These micro structures can improve the measurement accuracy.