Skip to main content
Erschienen in: Experiments in Fluids 1/2005

01.07.2005 | Originals

Dynamic calibration technique for thermal shear-stress sensors with mean flow

verfasst von: V. Chandrasekaran, A. Cain, T. Nishida, L. N. Cattafesta, M. Sheplak

Erschienen in: Experiments in Fluids | Ausgabe 1/2005

Einloggen

Aktivieren Sie unsere intelligente Suche, um passende Fachinhalte oder Patente zu finden.

search-config
loading …

Abstract

This paper presents the development of a dynamic calibration technique for thermal shear-stress sensors using acoustic plane wave excitation. The technique permits the independent variation in the mean and fluctuating shear stresses. The theoretical development and the practical implementation of the technique are presented. The studied configuration has the capability to dynamically calibrate shear-stress sensors up to 20 kHz. An illustrative application of this technique to an uncompensated silicon micromachined thermal shear-stress sensor operated in constant current mode is discussed. Specifically, the sensor has been statically calibrated over a range of wall shear stress from 7 to 80 mPa. A dynamic calibration of the sensor over a range of 2–12 mPa has been performed up to 7 kHz.

Sie haben noch keine Lizenz? Dann Informieren Sie sich jetzt über unsere Produkte:

Springer Professional "Wirtschaft+Technik"

Online-Abonnement

Mit Springer Professional "Wirtschaft+Technik" erhalten Sie Zugriff auf:

  • über 102.000 Bücher
  • über 537 Zeitschriften

aus folgenden Fachgebieten:

  • Automobil + Motoren
  • Bauwesen + Immobilien
  • Business IT + Informatik
  • Elektrotechnik + Elektronik
  • Energie + Nachhaltigkeit
  • Finance + Banking
  • Management + Führung
  • Marketing + Vertrieb
  • Maschinenbau + Werkstoffe
  • Versicherung + Risiko

Jetzt Wissensvorsprung sichern!

Springer Professional "Technik"

Online-Abonnement

Mit Springer Professional "Technik" erhalten Sie Zugriff auf:

  • über 67.000 Bücher
  • über 390 Zeitschriften

aus folgenden Fachgebieten:

  • Automobil + Motoren
  • Bauwesen + Immobilien
  • Business IT + Informatik
  • Elektrotechnik + Elektronik
  • Energie + Nachhaltigkeit
  • Maschinenbau + Werkstoffe




 

Jetzt Wissensvorsprung sichern!

Literatur
Zurück zum Zitat Bellhouse BJ, Schultz DL (1967) The determination of fluctuating velocity in air with thin film gauges. J Fluid Mech 29(2):289–295 Bellhouse BJ, Schultz DL (1967) The determination of fluctuating velocity in air with thin film gauges. J Fluid Mech 29(2):289–295
Zurück zum Zitat Bellhouse BJ, Schultz DL (1968) The measurement of fluctuating skin friction in air with heated thin-film gauges. J Fluid Mech 32(4):675–680 Bellhouse BJ, Schultz DL (1968) The measurement of fluctuating skin friction in air with heated thin-film gauges. J Fluid Mech 32(4):675–680
Zurück zum Zitat Bendat JS, Piersol AG (2000) Random data—analysis and measurement procedures. Wiley, NY, p 193 Bendat JS, Piersol AG (2000) Random data—analysis and measurement procedures. Wiley, NY, p 193
Zurück zum Zitat Cain A (1999) Static characterization of a micromachined thermal shear stress sensor. MS Thesis, Department of Electrical and Computer Engineering, University of Florida, Gainesville, FL Cain A (1999) Static characterization of a micromachined thermal shear stress sensor. MS Thesis, Department of Electrical and Computer Engineering, University of Florida, Gainesville, FL
Zurück zum Zitat Cain A, Chandrasekaran V, Nishida T, Sheplak M (2000) Development of a wafer-bonded, silicon-nitride membrane thermal shear stress sensor with platinum sensing element. Technical Digest, Solid-state sensor and actuator workshop, Hilton Head, SC Cain A, Chandrasekaran V, Nishida T, Sheplak M (2000) Development of a wafer-bonded, silicon-nitride membrane thermal shear stress sensor with platinum sensing element. Technical Digest, Solid-state sensor and actuator workshop, Hilton Head, SC
Zurück zum Zitat Chandrasekaran V (2000) Dynamic calibration technique for thermal shear stress sensors with variable mean flow. MS Thesis, Mechanical and Aerospace Engineering, University of Florida, Gainesville, FL Chandrasekaran V (2000) Dynamic calibration technique for thermal shear stress sensors with variable mean flow. MS Thesis, Mechanical and Aerospace Engineering, University of Florida, Gainesville, FL
Zurück zum Zitat Chew YT, Khoo BC, Lim CP, Teo CJ (1998) Dynamic response of a hot-wire anemometer. Part II: a flush-mounted hot-wire and hot-film probes for wall shear stress measurements. Meas Sci Technol 9:764–778CrossRef Chew YT, Khoo BC, Lim CP, Teo CJ (1998) Dynamic response of a hot-wire anemometer. Part II: a flush-mounted hot-wire and hot-film probes for wall shear stress measurements. Meas Sci Technol 9:764–778CrossRef
Zurück zum Zitat Comte-Bellot G (1976) Hot-wire anemometry. Annu Rev Fluid Mech 8:209–231CrossRef Comte-Bellot G (1976) Hot-wire anemometry. Annu Rev Fluid Mech 8:209–231CrossRef
Zurück zum Zitat Dowling AP, Williams JEF (1983) Sound and sources of sound. Halsted, New York, pp 69–71 Dowling AP, Williams JEF (1983) Sound and sources of sound. Halsted, New York, pp 69–71
Zurück zum Zitat Drake DG (1965) On the flow in a channel due to a periodic pressure gradient. Quart J Mech Appl Math XVIII(Part I):1–10 Drake DG (1965) On the flow in a channel due to a periodic pressure gradient. Quart J Mech Appl Math XVIII(Part I):1–10
Zurück zum Zitat Fan C, Chao B-T (1965) Unsteady, laminar, incompressible flow through rectangular ducts. ZAMP 16:351–360CrossRef Fan C, Chao B-T (1965) Unsteady, laminar, incompressible flow through rectangular ducts. ZAMP 16:351–360CrossRef
Zurück zum Zitat Fox RW, McDonald AT (1998) Introduction to fluid mechanics, 5th edn. Wiley, New York, p 333 Fox RW, McDonald AT (1998) Introduction to fluid mechanics, 5th edn. Wiley, New York, p 333
Zurück zum Zitat Freymuth P (1981) Calculation of square wave test for frequency optimized hot-film anemometers. J Phys E 14:238–240 Freymuth P (1981) Calculation of square wave test for frequency optimized hot-film anemometers. J Phys E 14:238–240
Zurück zum Zitat Goldberg HD, Breuer KS, Schmidt MA (1994) A silicon wafer-boding technology for microfabricated shear-stress sensors with backside contacts. Technical Digest, Solid-state sensor and actuator workshop, Hilton Head, SC, pp 111–115 Goldberg HD, Breuer KS, Schmidt MA (1994) A silicon wafer-boding technology for microfabricated shear-stress sensors with backside contacts. Technical Digest, Solid-state sensor and actuator workshop, Hilton Head, SC, pp 111–115
Zurück zum Zitat Haritonidis JH (1989) The measurement of wall shear stress. Advances in fluid mechanics measurements. Springer, Berlin, pp 229–261 Haritonidis JH (1989) The measurement of wall shear stress. Advances in fluid mechanics measurements. Springer, Berlin, pp 229–261
Zurück zum Zitat Jones MG, Stiede PE (1997) Comparison of methods for determining specific acoustic impedance. J Acoust Soc Am 101(5):2694–2704CrossRef Jones MG, Stiede PE (1997) Comparison of methods for determining specific acoustic impedance. J Acoust Soc Am 101(5):2694–2704CrossRef
Zurück zum Zitat Ling SC, Hubbard PG (1956) The hot film anemometer: a new device for fluid mechanics research. J Aero Sci 23:890–891 Ling SC, Hubbard PG (1956) The hot film anemometer: a new device for fluid mechanics research. J Aero Sci 23:890–891
Zurück zum Zitat Liu C, Tai Y, Huang J, Ho C (1994) Surface micromachined thermal shear stress sensor. In: Proceedings of the ASME symposium on application of microfabrication to fluid mechanics, Chicago, IL, USA Liu C, Tai Y, Huang J, Ho C (1994) Surface micromachined thermal shear stress sensor. In: Proceedings of the ASME symposium on application of microfabrication to fluid mechanics, Chicago, IL, USA
Zurück zum Zitat Liu C, Huang J-B, Zhu ZA, Jiang F, Tung S, Tai Y-C, Ho C-M (1999) A micromachined flow shear stress sensor based on thermal transfer principles. J Micro Elec Mech Sys 8(1):90–99 Liu C, Huang J-B, Zhu ZA, Jiang F, Tung S, Tai Y-C, Ho C-M (1999) A micromachined flow shear stress sensor based on thermal transfer principles. J Micro Elec Mech Sys 8(1):90–99
Zurück zum Zitat Löfdahl L, Gad-el-Hak M (1999) MEMS-based pressure and shear stress sensors for turbulent flows. Meas Sci Technol 10:665–686CrossRef Löfdahl L, Gad-el-Hak M (1999) MEMS-based pressure and shear stress sensors for turbulent flows. Meas Sci Technol 10:665–686CrossRef
Zurück zum Zitat Morse PM, Ingard KU (1968) Theoretical acoustics. Princeton University Press, Princeton, NJ Morse PM, Ingard KU (1968) Theoretical acoustics. Princeton University Press, Princeton, NJ
Zurück zum Zitat Naughton JW, Sheplak M (2002) Modern developments in shear stress measurement. Prog Aerospace Sci 38:515–570CrossRef Naughton JW, Sheplak M (2002) Modern developments in shear stress measurement. Prog Aerospace Sci 38:515–570CrossRef
Zurück zum Zitat Ng K-Y (1990) A liquid shear stress sensor using wafer-bonding technology. MS Thesis, Massachusetts Institute of Technology, USA Ng K-Y (1990) A liquid shear stress sensor using wafer-bonding technology. MS Thesis, Massachusetts Institute of Technology, USA
Zurück zum Zitat O’Brien V (1975) Pulsatile fully developed flow in rectangular channels. J Franklin Inst 300(3):225–230CrossRef O’Brien V (1975) Pulsatile fully developed flow in rectangular channels. J Franklin Inst 300(3):225–230CrossRef
Zurück zum Zitat Oudheusden B, Huijsing J (1988) Integrated flow friction sensor. Sens Actuat A–Phys 15:135–144CrossRef Oudheusden B, Huijsing J (1988) Integrated flow friction sensor. Sens Actuat A–Phys 15:135–144CrossRef
Zurück zum Zitat Padmanabhan A, Goldberg HD, Schmidt MA, Breuer KS (1996) A wafer-bonded floating-element shear stress microsensor with optical position sensing by photodiodes. J Micro Elec Mech Syst 5(4):307–315 Padmanabhan A, Goldberg HD, Schmidt MA, Breuer KS (1996) A wafer-bonded floating-element shear stress microsensor with optical position sensing by photodiodes. J Micro Elec Mech Syst 5(4):307–315
Zurück zum Zitat Padmanabhan A, Sheplak M, Breuer KS, Schmidt MA (1997) Micromachined sensors for static and dynamic shear stress measurements in aerodynamic flows. Technical Digest, Transducers 1997, Chicago, IL, USA, pp 137–140 Padmanabhan A, Sheplak M, Breuer KS, Schmidt MA (1997) Micromachined sensors for static and dynamic shear stress measurements in aerodynamic flows. Technical Digest, Transducers 1997, Chicago, IL, USA, pp 137–140
Zurück zum Zitat Pan T, Hyman D, Mehregany M, Reshotko E, Garverick S (1999) Microfabricated shear stress sensors, part 1: design and fabrication. AIAA J 37(1):66–72 Pan T, Hyman D, Mehregany M, Reshotko E, Garverick S (1999) Microfabricated shear stress sensors, part 1: design and fabrication. AIAA J 37(1):66–72
Zurück zum Zitat Panton RL (1996) Incompressible flow, 2nd edn. Wiley, NY, pp 267–270 Panton RL (1996) Incompressible flow, 2nd edn. Wiley, NY, pp 267–270
Zurück zum Zitat Perry AE, Smits AJ, Chong MS (1979) The effects of certain low frequency phenomena on the calibration of hot wires. J Fluid Mech 90:415–431 Perry AE, Smits AJ, Chong MS (1979) The effects of certain low frequency phenomena on the calibration of hot wires. J Fluid Mech 90:415–431
Zurück zum Zitat Schmidt MA, Howe RT, Senturia SD, Haritonidis JH (1988) Design and calibration of a microfabricated floating-element shear-stress sensor. IEEE T Electron Dev 35:750–757CrossRef Schmidt MA, Howe RT, Senturia SD, Haritonidis JH (1988) Design and calibration of a microfabricated floating-element shear-stress sensor. IEEE T Electron Dev 35:750–757CrossRef
Zurück zum Zitat Sheplak M, Padmanabhan A, Schmidt MA, Breuer KS (2001) Dynamic calibration of a shear stress sensor using stokes layer excitation. AIAA J 39(5):819–823 Sheplak M, Padmanabhan A, Schmidt MA, Breuer KS (2001) Dynamic calibration of a shear stress sensor using stokes layer excitation. AIAA J 39(5):819–823
Zurück zum Zitat Sheplak M, Chandrasekaran V, Cain A, Nishida T, Cattafesta L (2002) Characterization of a micromachined thermal shear stress sensor. AIAA J 40(6):1099–1104 Sheplak M, Chandrasekaran V, Cain A, Nishida T, Cattafesta L (2002) Characterization of a micromachined thermal shear stress sensor. AIAA J 40(6):1099–1104
Zurück zum Zitat Tennekes H, Lumley JL (1972) A first course in turbulence. MIT Press, Cambridge, MA Tennekes H, Lumley JL (1972) A first course in turbulence. MIT Press, Cambridge, MA
Zurück zum Zitat White FM (1991) Viscous fluid flow, 2nd edn. McGraw-Hill, NY White FM (1991) Viscous fluid flow, 2nd edn. McGraw-Hill, NY
Metadaten
Titel
Dynamic calibration technique for thermal shear-stress sensors with mean flow
verfasst von
V. Chandrasekaran
A. Cain
T. Nishida
L. N. Cattafesta
M. Sheplak
Publikationsdatum
01.07.2005
Erschienen in
Experiments in Fluids / Ausgabe 1/2005
Print ISSN: 0723-4864
Elektronische ISSN: 1432-1114
DOI
https://doi.org/10.1007/s00348-005-0969-5

Weitere Artikel der Ausgabe 1/2005

Experiments in Fluids 1/2005 Zur Ausgabe

    Marktübersichten

    Die im Laufe eines Jahres in der „adhäsion“ veröffentlichten Marktübersichten helfen Anwendern verschiedenster Branchen, sich einen gezielten Überblick über Lieferantenangebote zu verschaffen.