nach oben

The International Journal of Advanced Manufacturing Technology

Erschienen in:

18.03.2022 | ORIGINAL ARTICLE

Fabrication and characterization of resistance temperature detector by smart mask design

verfasst von: Ramazan Lok, Huseyın Karacali, Alı Varol, Ugur Camli, Ercan Yilmaz

Erschienen in: The International Journal of Advanced Manufacturing Technology | Ausgabe 1/2022

Einloggen

Aktivieren Sie unsere intelligente Suche, um passende Fachinhalte oder Patente zu finden.

search-config

KI-gestützte Suche

Aus

Abstract

The purpose of this study is to give detailed information about fabrication and characterization of resistance temperature detector by smart mask design. The effects of annealing on both structural and electrical properties were investigated. Changes in microstrain, lattice parameter and grain size values were observed by means of annealing. It has been shown that the structural changes cause a decrease in resistivity and sheet resistance values. Thousands of sensors can be fabricated according to the substrate size of thin film RTD produced. It is almost impossible to fabricate thousands of sensors with the same resistance value. But by the agency of the smart mask design proposed in this study, it is possible to adjust each RTD to the same resistance value by using the resistance adjustment points. Maximum TCR value was found to be around 3.98 × 10^–3 at 0 ⁰C. This value is very close to the standard TCR value 3.90 × 10^–3 at 0 ⁰C used for industrial applications.

Vorheriger Artikel An energy-concentrated synchrosqueezing transform using a reassignment operator for the analysis of nonstationary signals

Nächster Artikel Investigation on mechanism of ultrasonic welding AZ31B/5052 joint with laser texturing on mental surface

Sie haben noch keine Lizenz? Dann Informieren Sie sich jetzt über unsere Produkte:

Springer Professional "Wirtschaft+Technik"

Online-Abonnement

Mit Springer Professional "Wirtschaft+Technik" erhalten Sie Zugriff auf:

über 102.000 Bücher
über 537 Zeitschriften

aus folgenden Fachgebieten:

Automobil + Motoren
Bauwesen + Immobilien
Business IT + Informatik
Elektrotechnik + Elektronik
Energie + Nachhaltigkeit
Finance + Banking
Management + Führung
Marketing + Vertrieb
Maschinenbau + Werkstoffe
Versicherung + Risiko

Jetzt Wissensvorsprung sichern!

Jetzt informieren

Springer Professional "Technik"

Online-Abonnement

Mit Springer Professional "Technik" erhalten Sie Zugriff auf:

über 67.000 Bücher
über 390 Zeitschriften

aus folgenden Fachgebieten:

Automobil + Motoren
Bauwesen + Immobilien
Business IT + Informatik
Elektrotechnik + Elektronik
Energie + Nachhaltigkeit
Maschinenbau + Werkstoffe

Jetzt Wissensvorsprung sichern!

Jetzt informieren

Hussain A, Subasi O, Lazoglu I (2020) A novel sensor using photo-interrupter for measuring static friction coefficient. J Mech Sci Technol 34:2333–2339. https://doi.org/10.1007/s12206-020-0509-5CrossRef

Meister S, Grundhöfer L, Stüve J, Groves RM (2021) Imaging sensor data modelling and evaluation based on optical composite characteristics: Investigation of data quality for inline inspection. Int J Adv Manuf Technol 116:3965–3990. https://doi.org/10.1007/s00170-021-07591-5CrossRef

Hussain AM, Hussain MM (2016) CMOS-Technology-Enabled Flexible and Stretchable Electronics for Internet of Everything Applications. Adv Mater. https://doi.org/10.1002/adma.201504236CrossRef

Tiggelaar RM, Sanders RGP, Groenland AW, Gardeniers JGE (2009) Stability of thin platinum films implemented in high-temperature microdevices. Sensors Actuators, A Phys. https://doi.org/10.1016/j.sna.2009.03.017CrossRef

Sandborn P, Sandborn PA (2008) A random trimming approach for obtaining high-precision embedded resistors. IEEE Trans Adv Packag. https://doi.org/10.1109/TADVP.2007.908030CrossRefMATH

Kim J, Kim J, Shin Y, Yoon Y (2001) A Study on the Fabrication of an RTD (Resistance Temperature Detector) by Using Pt Thin Film. Korean J Chem Eng. https://doi.org/10.1007/BF02707199CrossRef

Qian Y, Luo Z, Liu Z et al (2014) Application of RTD sensor in the real time measurement and wireless transmission. In: Proceedings - 2014 4th International Conference on Instrumentation and Measurement, Computer, Communication and Control, IMCCC 2014

Mansoor M, Haneef I, Akhtar S et al (2015) Silicon diode temperature sensors - A review of applications. Sensors Actuators, A Phys

Makinwa KAA (2010) Smart temperature sensors in standard CMOS. In: Proceedings - 2010 Eurosensors XXIV. https://doi.org/10.1016/j.proeng.2010.09.262

10.

Michalski L, Eckersdorf K, Kucharski J, McGhee J (2001) 2- Temperature measurement, John Wiley & Sons

11.

Ginoux JM, Muthuswamy B, Meucci R et al (2020) A physical memristor based Muthuswamy–Chua–Ginoux system. Sci Rep 10:1–10. https://doi.org/10.1038/s41598-020-76108-zCrossRef

12.

Basu S, Debnath AK (2019) 2 - Power Plant Instrumentation and Control Handbook: A Guide to Thermal Power Plants, Academic Press

13.

Matthias N (2002) 10-Electrical Temperature Measurement with thermocouples and resistance thermometers

14.

Courbat J, Briand D, de Rooij NF (2008) Reliability improvement of suspended platinum-based micro-heating elements. Sensors Actuators, A Phys. https://doi.org/10.1016/j.sna.2007.04.006CrossRef

15.

Dankoco MD, Tesfay GY, Benevent E, Bendahan M (2016) Temperature sensor realized by inkjet printing process on flexible substrate. Mater Sci Eng B Solid-State Mater Adv Technol. https://doi.org/10.1016/j.mseb.2015.11.003CrossRef

16.

Feteira A (2009) Negative temperature coefficient resistance (NTCR) ceramic thermistors: an industrial perspective. J Am Ceram Soc

17.

Kedzierski MA (1993) Principles and methods of temperature measurement. Exp Therm Fluid Sci. https://doi.org/10.1016/0894-1777(93)90045-kCrossRef

18.

Technical Blog, Temperature Sensor Comparison. https://www.variohm.com/news-media/technical-blog-archive/temperature-sensor-comparison. Accessed 1 Jan 2022

19.

Reverter F (2021) A Tutorial on Thermal Sensors in the 200th Anniversary of the Seebeck Effect. IEEE Sens J 21:22122–22132. https://doi.org/10.1109/JSEN.2021.3105546CrossRef

20.

Meijer GCM (2001) Temperature sensors and voltage references implemented in cmos technology. IEEE Sens J 1:225–234. https://doi.org/10.1109/JSEN.2001.954835CrossRef

21.

Reif-Acherman S (2011) Studies on the temperature dependence of electric conductivity for metals in the nineteenth century: A neglected chapter in the history of superconductivity. Rev Bras Ensino Fis 33. https://doi.org/10.1590/S1806-11172011000400020

22.

Lacy F (2011) Evaluating the resistivity-temperature relationship for RTDs and other conductors. IEEE Sens J 11:1208–1213. https://doi.org/10.1109/JSEN.2010.2089977CrossRef

23.

Fernicola VC, Iacomini L (2008) Approximating the ITS-90 temperature scale with industrial platinum resistance thermometers. Int J Thermophys 29:1817–1827. https://doi.org/10.1007/s10765-008-0463-4CrossRef

24.

Jeroish ZE, Bhuvaneshwari KS, Samsuri F, Narayanamurthy V (2022) Microheater: material, design, fabrication, temperature control, and applications—a role in COVID-19. Springer, US

25.

Temperature Sensor Comparison. https://www.variohm.com/news-media/technical-blog-archive/temperature-sensor-comparison. Accessed 1 Jan 2022

26.

Zribi A, Barthès M, Bégot S et al (2016) Design, fabrication and characterization of thin film resistances for heat flux sensing application. Sensors Actuators, A Phys 245:26–39. https://doi.org/10.1016/j.sna.2016.04.040CrossRef

27.

Gureyev VV, L’vov AA (2007) High accuracy semiautomatic calibration of industrial RTDs. Conf Rec - IEEE Instrum Meas Technol Conf 1–5. https://doi.org/10.1109/imtc.2007.379291

28.

International Standard (1995) IEC-60751-Industrial platinum resistance thermometer Sensors. http://rpa.energy.mn/wp-content/uploads/2017/03/IEC-60751-Industrial-platinum-resistance-thermometer-Sensors.pdf

29.

Witt F, Vook RW (1968) Thermally induced strains in cubic metal films. J Appl Phys. https://doi.org/10.1063/1.1656671

30.

Witt F, Vook RW (1969) Thermally induced strains in diamond cubic, tetragonal, orthorhombic, and hexagonal films. J Appl Phys. https://doi.org/10.1063/1.1657457

31.

Nasiri-Tabrizi B (2014) Thermal treatment effect on structural features of mechano-synthesized fluorapatite-titania nanocomposite: A comparative study. J Adv Ceram. https://doi.org/10.1007/s40145-014-0090-4CrossRef

32.

Moret MP, Devillers MAC, Tichelaar FD et al (2003) Damage after annealing and aging at room temperature of platinized silicon substrates. Thin Solid Films. https://doi.org/10.1016/S0040-6090(03)00453-XCrossRef

33.

Sreemany M, Sen S (2006) Effect of substrate temperature and annealing temperature on the structural, electrical and microstructural properties of thin Pt films by rf magnetron sputtering. Appl Surf Sci. https://doi.org/10.1016/j.apsusc.2006.05.040CrossRef

34.

Ehrlich A, Weiß U, Hoyer W, Geßner T (1997) Microstructural changes of Pt/Ti bilayer during annealing in different atmospheres - An XRD study. Thin Solid Films. https://doi.org/10.1016/S0040-6090(96)09452-7CrossRef

35.

Inokuma T, Taketa Y, Haradome M (1987) The Relationship Between the Electrical Properties of Thick Film Resistors and the Thermal Expansion Coefficient of the Substrates. Act Passiv Electron Components. https://doi.org/10.1155/1987/65302CrossRef

36.

Solliard C, Flueli M (1985) Surface stress and size effect on the lattice parameter in small particles of gold and platinum. Surf Sci. https://doi.org/10.1016/0039-6028(85)90610-7CrossRef

37.

Sandborn PAM, Sandborn PA (2007) Using embedded resistor emulation and trimming to demonstrate measurement methods and associated engineering model development. Int J Eng Educ

38.

Suresh KS (2013) Electric circuit analysis, Pearson Education India

39.

Schuettler M, Stiess S, King BV, Suaning GJ (2005) Fabrication of implantable microelectrode arrays by laser cutting of silicone rubber and platinum foil. J Neural Eng. https://doi.org/10.1088/1741-2560/2/1/013

40.

Mailly F, Giani A, Bonnot R et al (2001) Anemometer with hot platinum thin film. Sensors Actuators, A Phys. https://doi.org/10.1016/S0924-4247(01)00668-9CrossRef

Titel: Fabrication and characterization of resistance temperature detector by smart mask design
verfasst von: Ramazan Lok
Huseyın Karacali
Alı Varol
Ugur Camli
Ercan Yilmaz
Publikationsdatum: 18.03.2022
Verlag: Springer London
Erschienen in: The International Journal of Advanced Manufacturing Technology / Ausgabe 1/2022
Print ISSN: 0268-3768
Elektronische ISSN: 1433-3015
DOI: https://doi.org/10.1007/s00170-022-09041-2

Premium Partner

Marktübersichten

Die im Laufe eines Jahres in der „adhäsion“ veröffentlichten Marktübersichten helfen Anwendern verschiedenster Branchen, sich einen gezielten Überblick über Lieferantenangebote zu verschaffen.

Zur Marktübersicht

Springer Professional

Abstract

Bitte loggen Sie sich ein, um Zugang zu Ihrer Lizenz zu erhalten.

Sie haben noch keine Lizenz? Dann Informieren Sie sich jetzt über unsere Produkte:

Springer Professional "Wirtschaft+Technik"

Springer Professional "Technik"

Weitere Artikel der Ausgabe 1/2022

Correction to: Concurrent layout and trajectory optimization for robot workcell toward energy‑efficient and collision‑free automation

Numerical and experimental analysis of electrohydraulic forming of Al 5052 and Al 6061 using conical die

High-precision position control of belt drive system based on OPC communication

Visual odometry algorithm based on geometric prior for dynamic environments

Concurrent layout and trajectory optimization for robot workcell toward energy-efficient and collision-free automation

Gesture- and vision-based automatic grasping and flexible placement in teleoperation

Premium Partner

Marktübersichten