2014 | OriginalPaper | Buchkapitel
Growth and Characterization of AlInGaN/AlN/GaN Grown by MOCVD
verfasst von : Ravi Loganathan, Mathaiyan Jayasakthi, Kandhasamy Prabakaran, Raju Ramesh, Ponnusamy Arivazhagan, Boopathi kuppulingam, Subramanian Sankaranarayanan, Manavaimaran Balaji, Shubra Singh, Krishnan Baskar
Erschienen in: Physics of Semiconductor Devices
Verlag: Springer International Publishing
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N epilayers have been grown by metal organic chemical vapor deposition (MOCVD) at different temperatures from 740 to 940 °C. The incorporation of indium increases with decreasing growth temperature, while the incorporation of Al composition was 30–40 %. The optical properties of the samples have been investigated by photoluminescence (PL). The results show that the sample grown at 890 °C exhibits the best crystalline and optical quality.