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Erschienen in:
2014 | OriginalPaper | Buchkapitel
Interference Measurement of Surfaces Roughness
verfasst von : Oleg V. Angelsky, Andrew P. Maksimyak, Peter P. Maksimyak
Erschienen in: Fringe 2013
Verlag: Springer Berlin Heidelberg
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The optical techniques are non-contact, non-destructive and highly efficient for diagnostics of rough surfaces. The optical techniques may be divided into profile interference and heterodyning techniques [1, 2], techniques based on measuring of the angular distribution of scattered radiation[3], and optical correlation techniques [4, 5]. However, when the height of surface inhomogeneities exceeds the wavelength of the probing beam the unambiguous connection between the statistical parameters of the roughness and of the scattered field is lost.