Investigation of Frequency Response of Yttrium Doped AIN-Based Saw Devices

The main task of this work is the modeling of the frequency response of surface acoustic wave delay line based on Al_{1 – x}Y_xN thin films for different Yttrium concentrations. Firstly, the acousto-mechanical properties were investigated using density-functional approximation. It was found that the high piezoelectric response was predicted from high Yttrium concentrations. Secondly, frequency response of IDT/AlYN/Si is obtained by mean of four modeling methods: Impulse Response model, Transmission Matrix model, the Modified Matrix model and the combination P-matrix model. The results shown that the P-matrix model combined with the coupling-of-modes approach is in good agreement with experimental results compared to other models. It is found that high Yttrium concentration provide lower insertion loss. Moreover, the resonant frequency also shifted slightly to the lower frequencies with increasing Yttrium concentration.