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Erschienen in:
1984 | OriginalPaper | Buchkapitel
Laser Micromachining of Polyimide Materials
verfasst von : P. A. Moskowitz, D. R. Vigliotti, R. J. von Gutfeld
Erschienen in: Polyimides
Verlag: Springer US
Enthalten in: Professional Book Archive
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A laser-enhanced chemical process has been developed for the removal of material from polyimide to produce vias, grooves, and cavities on the order of tens of pm in size. The process takes advantage of the highly absorbant nature of polyimide to blue light. The focused light of an argon laser is used to heat the polyimide locally in the presence of a caustic bath such as NaOH. The heating speeds the chemical reaction of the polyimide with the NaOH solution to form soluble compounds which are then dissolved. The effects of varying concentration of etchant have been investigated; removal rates have been measured for NaOH and other solutions; and etching of copper/polyimide laminates has been accomplished.