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2021 | Buch

Levitation Micro-Systems

Applications to Sensors and Actuators

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Über dieses Buch

This book presents inductive and hybrid levitation micro-systems and their applications in micro-sensors and –actuators. It proposes and discusses analytical and quasi-finite element techniques for modeling levitation micro-systems based on the Lagrangian formalism. In particular, micro-bearings, -actuators, -accelerators and –accelerometers based on inductive levitation are comprehensively described with accompanying experimental measurements.

Inhaltsverzeichnis

Frontmatter
Chapter 1. Introduction to Levitation Micro-Systems
Abstract
Levitation is a physical phenomenon, which is associated with a body floating freely without mechanical attachment with a surrounding. This fascinating approach to suspend a body can be realized by utilizing several known methods including a jet of gas, intense acoustic waves and others. However, only the levitation using electric and magnetic force fields so-called electromagnetic levitation  can avoid reliance on an intermediate medium to act on a floating body.
Kirill Poletkin
Chapter 2. Micro-Coil Fabrication Techniques
Abstract
Inductive levitation micro-systems have been actively studied since 1995 when the Shearwood group [1] fabricated the first prototype with targeted applications including micro-motors, -actuators and -inertial sensors. Then, in 2006, the Zhang group presented the IL-micro-system with improved planar coil design [2]. An alternative coil design in the shape of a rectangular spiral, which also provides stable levitation, was employed in the micro-gyroscope prototype reported by the Tsai group in work [3].
Kirill Poletkin
Chapter 3. Analytical Modelling
Abstract
To fully benefit from inductive levitation and utilize its advantages in L-micro-systems such as
Kirill Poletkin
Chapter 4. Quasi-finite Element Modelling
Abstract
In this chapter, the quasi-finite element approach for modelling of electromagnetic levitation micro-systems is developed [1]. The developed approach allows calculating accurately and efficiently a distribution of induced eddy current within a levitated micro-object by means of using finite elements. The combination of finite element manner to calculate induced eddy current and the set of six differential equations describing the behaviour of the mechanical part of electromagnetic levitation system is the resulting essence of the proposed quasi-finite element approach to simulate IL-micro-systems.
Kirill Poletkin
Chapter 5. Inductive Levitation Micro-Systems
Abstract
Application of inductive levitation micro-systems as micro-bearings is considered. In particular, the analysis of their stability and dynamics based on the analytical and quasi-finite element approach presented in Chaps. 3 and 4, respectively, is conducted by accompanying with experimental measurements included electrical and physical parameters of the system such as coil impedance, levitation height and operating temperature of micro-coils. Also, the inductive micro-bearing with the lowest energy dissipation is discussed.
Kirill Poletkin
Chapter 6. Hybrid Levitation Micro-Systems
Abstract
In this chapter, applications of hybrid levitation micro-systems based on a combination of electric and inductive force fields to micro-actuators, micro-accelerators and micro-accelerometers are discussed.
Kirill Poletkin
Chapter 7. Mechanical Thermal Noise in Levitation Micro-Gyroscopes
Abstract
Micromachined levitation gyroscopes (MLGs) employing the operating principle of a classical spinning gyroscope for sensing an angular rate have been intensively studied over recent decades. The main feature of such gyroscopes is that a spinning rotor is suspended, without physical attachment to an inertial frame by means of using, in particular, electromagnetic levitation phenomena.
Kirill Poletkin
Backmatter
Metadaten
Titel
Levitation Micro-Systems
verfasst von
Dr. Kirill Poletkin
Copyright-Jahr
2021
Electronic ISBN
978-3-030-58908-0
Print ISBN
978-3-030-58907-3
DOI
https://doi.org/10.1007/978-3-030-58908-0

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