1989 | OriginalPaper | Buchkapitel
Off-Line Quality Control in Integrated Circuit Fabrication using Experimental Design
verfasst von : M. S. Phadke, R. N. Kackar, D. V. Speeney, M. J. Grieco
Erschienen in: Quality Control, Robust Design, and the Taguchi Method
Verlag: Springer US
Enthalten in: Professional Book Archive
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This paper describes and illustrates the off-line quality control method, which is a systematic method of optimizing a production process. It also documents our efforts to optimize the process for forming contact windows in 3.5-μm technology complementary metal-oxide semiconductor (CMOS) circuits fabricated in the Murray Hill Integrated Circuit Design Capability Laboratory (MH ICDCL). Here, by optimization we mean minimizing the process variance while keeping the process mean on target.