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1997 | Buch

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Microsystem Technology and Microrobotics

verfasst von: Sergej Fatikow, Ulrich Rembold

Verlag: Springer Berlin Heidelberg

Enthalten in: Professional Book Archive

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Microsystem technology (MST) integrates very small (up to a few nanometers) mechanical, electronic, optical, and other components on a substrate to construct functional devices. These devices are used as intelligent sensors, actuators, and controllers for medical, automotive, household and many other purposes. This book is a basic introduction to MST for students, engineers, and scientists. It is the first of its kind to cover MST in its entirety. It gives a comprehensive treatment of all important parts of MST such as microfabrication technologies, microactuators, microsensors, development and testing of microsystems, and information processing in microsystems. It surveys products built to date and experimental products and gives a comprehensive view of all developments leading to MST devices and robots.

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Inhaltsverzeichnis

Frontmatter

1. Ideas and Problems of Microsystem Technology and Microrobotics

Abstract

In recent years, the microsystem technology has become an important source for sensors, actuators and entire control modules. So far there is no generally accepted definition for MST. Most MST researchers characterize a microsystem as the integration of miniaturized sensors, actuators and signal processing units, enabling the overall system to sense, decide and react. MST can be defined as the functional integration of mechanical, electronic, optical and any other functional elements, using special MST techniques.

Sergej Fatikow, Ulrich Rembold

2. Microsystem Technology Applications

Abstract

In practically all technical areas, the performance of components and systems is greatly improved by their miniaturizing. The present state of the development of microsystem technology is not very advanced yet, but it allows us to get an idea of what will happen in the future. In a few years, microsystems will be able to perceive many events happening in their environment, evaluate them and convert the result into actions by means of intelligent control algorithms. Inexpensive mass production, a lower material content and low energy consumption will make the microproducts competitive economically; they will become more reliable with increasing degree of integration, and new functions will be created by using MST.

Sergej Fatikow, Ulrich Rembold

3. Techniques of Microsystem Technology

Abstract

In Chapter 1 we learned that in MST an effort is being made to combine microtechniques with special properties of materials and their effects to fabricate functional microdevices. The techniques of MST can be divided into three classes: the microtechniques, the system techniques and the materials and their effects, Fig. 3.1. The borderlines of these techniques are not well defined. However, the classification is useful when discussing the principles of MST.

Sergej Fatikow, Ulrich Rembold

4. Key Processes to Produce Micromechanical Components

Abstract

Micromechanics has become an accepted technology and many devices are finding industrial applications. This new technology was created during the past few years and its impact can only be anticipated. The subject is being taught by almost all important technical universities as an important discipline. Micromechanics is concerned with manufacturing methods to produce small parts in the µm-range using special MST techniques, such as lithography, thin layer techniques, dry and wet etching, micromolding, etc.

Sergej Fatikow, Ulrich Rembold

5. Microactuators: Principles and Examples

Abstract

The MST applications introduced in Chapter 2 suggest the use of new microactuator systems which allow motions to be realized with micrometer accuracy. Conventional motion concepts or manufacturing methods are no longer able to fulfill the demands concerning miniaturization and all questions connected with it. Microsystems, and in particular future microrobots, require the development of new advanced actuators with very small dimensions, simple mechanical construction and high reliability.

Sergej Fatikow, Ulrich Rembold

6. Microsensors: Principles and Examples

Abstract

Sensors are increasingly being used for many technical applications. A sensor is a vital organ of an artificial system, forming the interface between the controller and the environment. Sensors can smell, taste, see and feel by measuring mechanical, biochemical, thermal, magnetic and radiation parameters. They are usually classified according to the signals that are measured. An easy to understand sensor classification can be seen in Table 6.1.

Sergej Fatikow, Ulrich Rembold

7. MST and Information Processing

Abstract

Already in Chapter 3 various system techniques of importance for MST were discussed. Since this research field is extremely large, we will focus on the discussion of the design and information processing encountered in micro-systems. The present state of the technology for realizing interfaces between the microsystem and its surroundings as well as the many existing interconnection technologies and casing techniques will not be covered here. The interested reader may refer to [Koh194a] and [Menz93] where these topics are described in detail.

Sergej Fatikow, Ulrich Rembold

8. Microrobotics

Abstract

In the previous chapters we have discussed the most important components of a complete microsystem, which are the microactuator, microsensor and information processing unit. Although there have been enormous advancements on the component level there are very few complete microsystems available presently. The spectrum of potential microsystems is very broad and was already introduced in the introductory chapters. This chapter will be dedicated to an important area of MST, the microrobotics.

Sergej Fatikow, Ulrich Rembold

Backmatter

Titel: Microsystem Technology and Microrobotics
verfasst von: Sergej Fatikow
Ulrich Rembold
Copyright-Jahr: 1997
Verlag: Springer Berlin Heidelberg
Electronic ISBN: 978-3-662-03450-7
Print ISBN: 978-3-642-08232-0
DOI: https://doi.org/10.1007/978-3-662-03450-7