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Optical and Quantum Electronics

Erschienen in:

01.04.2022

Theoretical study of 2D sub-wavelength structure fabrication via surface plasmon excitation utilizing the enhanced Kretschmann structure combined with sample rotation

verfasst von: Tianxu Jia, Yaqian Ren, Xiangxian Wang, Yunping Qi, Xiaolei Wen

Erschienen in: Optical and Quantum Electronics | Ausgabe 4/2022

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Abstract

A theoretical method of nanoscale lithography based on the enhanced Kretschmann structure and excitation of surface plasmons to fabricate periodic 2D sub-wavelength structures is proposed in this paper. The optical field distribution, which is greatly enhanced by using the enhanced Kretschmann structure, can be determined using the finite element method and related formulas to simulate rotation and exposure of a lithography sample. Consequently, various sub-wavelength structures can be modeled through different rotation methods and exposure times, such as square dot arrays, quasi-hexagonally close-packed structures, and circular grating structures. In addition, if the metal and dielectric materials are determined, various reflection spectra can be chosen from by combining different metal and dielectric thicknesses. This proposed method has the advantages of low cost, high resolution, and high efficiency, providing a prospective fabrication method for 2D sub-wavelength structures in practical applications.

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Titel: Theoretical study of 2D sub-wavelength structure fabrication via surface plasmon excitation utilizing the enhanced Kretschmann structure combined with sample rotation
verfasst von: Tianxu Jia
Yaqian Ren
Xiangxian Wang
Yunping Qi
Xiaolei Wen
Publikationsdatum: 01.04.2022
Verlag: Springer US
Erschienen in: Optical and Quantum Electronics / Ausgabe 4/2022
Print ISSN: 0306-8919
Elektronische ISSN: 1572-817X
DOI: https://doi.org/10.1007/s11082-022-03596-w

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