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2006 | Buch

Micromanufacturing and Nanotechnology

verfasst von: Dr. Nitaigour Premchand Mahalik

Verlag: Springer Berlin Heidelberg

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Über dieses Buch

Micromanufacturing and Nanotechnology is an emerging technological infrastructure and process that involves manufacturing of products and systems at the micro and nano scale levels. Development of micro and nano scale products and systems are underway due to the reason that they are faster, accurate and less expensive. Moreover, the basic functional units of such systems possesses remarkable mechanical, electronic and chemical properties compared to the macro-scale counterparts. Since this infrastructure has already become the prefered choice for the design and development of next generation products and systems it is now necessary to disseminate the conceptual and practical phenomenological know-how in a broader context. This book incorporates a selection of research and development papers. Its scope is the history and background, underlynig design methodology, application domains and recent developments.

Inhaltsverzeichnis

Frontmatter
1. Introduction
N. P. Mahalik
2. Principles of MEMS and MOEMS
N. P. Mahalik, S. E. Iyuke, B. H. Ahn
3. Laser Technology in Micromanufacturing
Sungho Jeong
4. Soft Geometrical Error Compensation Methods Using Laser Interferometer
K. K. Tan, S. N. Huang
5. Characterising Etching Processes in Bulk Micromachining
S. K. Bag
6. Features of Surface Micromachining and Wafer Bonding Process
S. K. Bag, Daniela S. Mainardi, N. P. Mahalik
7. Micromanufacturing for Document Security: Optically Variable Devices
Robert A. Lee
8. Nanofinishing Techniques
S. Jha, V. K. Jain
9. Micro and Nanotechnology Applications for Space Micropropulsion
Giulio Manzoni
10. Carbon Nanotube Production and Applications: Basis of Nanotechnology
S. E. Iyuke, N. P. Mahalik
11. Carbon based Nanostructures
Qianwang Chen, Zhao Huang
12. Molecular Logic Gates
Chandana Karnati, Hai-Feng Ji
13. Nanomechanical Cantilever Devices for Biological Sensors
Tae Song Kim, Jeong Hoon Lee, Dae Sung Yoon
14. Micro Energy and Chemical Systems (MECS) and Multiscale Fabrication
Brian K. Paul
15. Sculptured Thin Films
John A. Polo Jr.
16. e-Beam Nanolithography Integrated with Nanoassembly: Precision Chemical Engineering
Paula M. Mendes, Jon A. Preece
17. Nanolithography in the Evanescent Near Field
M. M. Alkaisi, R. J. Blaikie
18. Nanotechnology for Fuel Cell Applications
Daniela S. Mainardi, N. P. Mahalik
19. Derivatisation of Carbon Nanotubes with Amines: A Solvent-free Technique
Basiuk V.A., Basiuk E.V.
20. Chemical Crosslinking in C60 Thin Films
Vladimir A. Basiuk, Edgar Alvarez-Zauco, Elena V. Basiuk
Backmatter
Metadaten
Titel
Micromanufacturing and Nanotechnology
verfasst von
Dr. Nitaigour Premchand Mahalik
Copyright-Jahr
2006
Verlag
Springer Berlin Heidelberg
Electronic ISBN
978-3-540-29339-2
Print ISBN
978-3-540-25377-8
DOI
https://doi.org/10.1007/3-540-29339-6

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