The LIGA Process for Microsystems

Threedimensional microstructures can be fabricated from metals, metal alloys, plastics and ceramic materials with submicron tolerances by means of the socalled LIGA process which is based on a combination of lithography, electroforming and molding processes. Since a large variety of materials can be processed without any restrictions in the cross-sectional shape of the microstructures, a wide range of applications exists. Present development work deals with sensors for automotive technology, optical components for satellite experiments, optical demultiplexers and fiber-chip coupling elements for optical communications, micronozzles and microvalves for fluid technology, microfiltration devices, detachable electrical micro-connectors, ultrasonic sensors for medical diagnosis, and various further microstructure products. In view of the versatility of the LIGA process, it is to be expected that it will play a major role in realizing future innovative microsystems.