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Microsystem Technologies

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01.03.2009 | Technical Paper

Micro injection molding of micro gear using nano-sized zirconia powder

verfasst von: P. C. Yu, Q. F. Li, J. Y. H. Fuh, T. Li, P. W. Ho

Erschienen in: Microsystem Technologies | Ausgabe 3/2009

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Abstract

Powder injection molding (PIM) is well established in macro molding. Scaling down to micro-PIM (μPIM) opens a new arena for cost effective production of micro components. One potential application is the manufacture of cutting tools with sharp edges for machining. However, scaling down to such a level produces challenges in raw material preparation, injection molding and thermal treatment. In this report, near dense (>98% of theoretical density) tensile bars and 3 mm micro gears were produced using 50 nm Yttria Tetragonal Zirconia Polycrystal (Y-TZP). The sintered gear teeth were well defined and visually defect free.

Vorheriger Artikel Numerical and experimental validation of out-of-plane resonance closed formulas for MEMS suspended plates with square holes

Nächster Artikel Surface activation using remote plasma for silicon to quartz wafer bonding

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Titel: Micro injection molding of micro gear using nano-sized zirconia powder
verfasst von: P. C. Yu
Q. F. Li
J. Y. H. Fuh
T. Li
P. W. Ho
Publikationsdatum: 01.03.2009
Verlag: Springer-Verlag
Erschienen in: Microsystem Technologies / Ausgabe 3/2009
Print ISSN: 0946-7076
Elektronische ISSN: 1432-1858
DOI: https://doi.org/10.1007/s00542-008-0673-5

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